Fabrication methods for electronic devices integrating magnetic nanostructures

Patent metadata

Field	Value
Publication number	US-12002605-B1
Application number	US-202117176506-A
Country	US
Kind code	B1
Filing date	Feb 16, 2021
Priority date	Feb 16, 2021
Publication date	Jun 4, 2024
Grant date	Jun 4, 2024

Abstract

Magnetic nanowire components may be used in passive radio-frequency device allowing for smaller size devices, lower power consumption, and on-chip packaging potential across a wide range of technologies. A method for fabricating magnetic nanowire component electronic devices include depositing a conductive device pattern and transmission lines onto a substrate, aligning and securing a magnetic nanowire component to the device pattern, packaging the device with an insulation layer. Alternatively, the conductive device pattern and transmission lines may be deposited on the magnetic nanowire component, and the magnetic nanowire component may then be attached to a substrate.

First claim

What is claimed is:

1. A method for fabricating magnetic nanowire composite electronic devices the method comprising:
providing a substrate;
depositing an electrically conductive device pattern onto the substrate;
depositing at least one electrically conductive transmission line onto the substrate;
securing a magnetic nanowire component to the electrically conductive device pattern, the magnetic nanowire component being aligned to the electrically conductive device pattern;
applying a first mask on top of the magnetic nanowire component, transmission lines and the substrate;
depositing an insulation layer on top of the transmission lines;
removing the first mask;
depositing a ground layer on top of the magnetic nanowire component and the substrate; and
depositing an insulating or dielectric layer on top of the ground layer.

2. A method according to claim 1 , further comprising fabricating a magnetic nanowire component that further comprises:
preparing a porous template;
cleaning pores of the porous template;
placing an ionic fluid in a chamber, wherein the porous template is exposed to the ionic fluid through an aperture in the chamber;
applying a voltage across an anode and a cathode creating an electric field across the ionic fluid and porous substrate;
monitoring the applied voltage with a reference electrode; and
stirring the ionic fluid.

3. A method according to claim 1 , wherein removing the first mask occurs before the deposition of the ground layer and further includes applying a second mask before depositing the ground layer; and removing the second mask after depositing the ground layer.

4. A method according to claim 1 , wherein depositing an insulating or dielectric layer on top of the ground layer comprises depositing an insulating layer on top of the ground layer.

5. A method according to claim 1 , wherein depositing an insulating or dielectric layer on top of the ground layer comprises depositing a dielectric layer on top of the ground layer.

6. A method according to claim 1 , wherein the magnetic nanowire component is secured to the electrically conductive device pattern by an adhesive substance.

7. A method according to claim 1 , wherein the magnetic nanowire component is bonded to the electrically conductive device pattern.

8. A method according to claim 1 , wherein the electrically conductive device pattern comprises a circulator device pattern.

Assignees

• Uchicago Argonne Llc

Inventors

• Zhang Yuepeng
• Hryn John N
• Xie Yunsong

Classifications

• H01F1/0081 Primary

  in a non-magnetic matrix, e.g. Fe-nanowires in a nanoporous membrane · CPC title

• H01F41/0253

  for manufacturing permanent magnets · CPC title

• B82Y10/00

  Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic · CPC title

• B82Y25/00

  Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance · CPC title

• B82Y40/00

  Manufacture or treatment of nanostructures · CPC title