Light detector, light detection system, lidar device, mobile body, and vehicle

Patent metadata

Field	Value
Publication number	US-11996419-B2
Application number	US-202117445590-A
Country	US
Kind code	B2
Filing date	Aug 20, 2021
Priority date	Jan 8, 2021
Publication date	May 28, 2024
Grant date	May 28, 2024

Abstract

According to one embodiment, a light detector includes a plurality of elements. Each of the elements includes a first semiconductor region, a second semiconductor region, and a third semiconductor region. The second semiconductor region is located on the first semiconductor region and has a higher first-conductivity-type impurity concentration than the first semiconductor region. The third semiconductor region is located on the second semiconductor region. The elements are arranged at a first period in a second direction crossing a first direction. The first direction is from the first semiconductor region toward the second semiconductor region. A quenching part is electrically connected with the third semiconductor region. Multiple lenses are located respectively on the elements. One of the lenses is positioned on one of the elements. A refracting layer is located between the elements and the lenses. The refracting layer has a first thickness.

First claim

What is claimed is:

1. A light detector, comprising:
a plurality of elements, each of the elements including a first semiconductor region of a first conductivity type, a second semiconductor region of the first conductivity type, and a third semiconductor region of a second conductivity type, the second semiconductor region being located on the first semiconductor region and having a higher first-conductivity-type impurity concentration than the first semiconductor region, the third semiconductor region being located on the second semiconductor region, the elements being arranged at a first period in a second direction crossing a first direction, the first direction being from the first semiconductor region toward the second semiconductor region;
a quenching part electrically connected with the third semiconductor region;
a plurality of lenses located respectively on the elements, one of the lenses being positioned on one of the elements; and
a refracting layer located between the elements and the lenses, the refracting layer having a first thickness,
a ratio of the first thickness to the first period being not less than 0.16 and not more than 0.72.

2. The detector according to claim 1 , wherein
a first semiconductor layer includes the first to third semiconductor regions,
a thickness of the first semiconductor layer is a second thickness, and
a ratio of the second thickness to the first period is not less than 0.4 and not more than 1.2.

3. The detector according to claim 1 , wherein
the refracting layer includes:
a first layer located between the lenses and the elements; and
a second layer located between the first layer and the lenses.

4. The detector according to claim 1 , further comprising:
a conductive part connecting the third semiconductor region and the quenching part,
at least a portion of the conductive part being surrounded with the refracting layer in a plane perpendicular to the first direction.

5. The detector according to claim 1 , wherein
the first period is not more than 15 micrometers.

6. The detector according to claim 1 , wherein
the first thickness is not less than 2 micrometers and not more than 8 micrometers.

7. The detector according to claim 1 , wherein
the second semiconductor region and the third semiconductor region are surrounded with a portion of the first semiconductor region in a plane perpendicular to the first direction.

8. The detector according to claim 1 , further comprising:
a first structure body having a different refractive index from the first semiconductor region,
the elements including a first element and a second element,
the first element and the second element being adjacent to each other,
at least a portion of the first structure body being located between the first semiconductor region of the first element and the first semiconductor region of the second element.

9. The detector according to claim 8 , further comprising:
a second structure body having a different refractive index from the first semiconductor region,
at least a portion of the second structure body being located between the at least a portion of the first structure body and the first semiconductor region of the second element,
the at least a portion of the first structure body and the at least a portion of the second structure body being separated from each other.

10. The detector according to claim 9 , wherein
the first structure body and the second structure body respectively surround the first element and the second element.

11. The detector according to claim 10 , wherein
at least one of the first structure body or the second structure body is octagonal when viewed along the first direction.

12. The detector according to claim 8 , wherein
the first structure body surrounds the first element.

13. The detector according to claim 8 , wherein
the first structure body discontinuously surrounds the first element when viewed along the first direction.

14. The detector according to claim 8 , further comprising:
a second semiconductor layer of the first conductivity type, the second semiconductor layer having a higher first-conductivity-type impurity concentration than the first semiconductor region,
the first semiconductor region being located on the second semiconductor layer,
a lower portion of the first structure body being surrounded with the second semiconductor layer.

15. The detector according to claim 8 , wherein
an upper portion of the first structure body is surrounded with the refracting layer.

16. The detector according to claim 1 , wherein
the elements are avalanche photodiodes operating in a Geiger mode.

17. A light detection system, comprising:
the light detector according to claim 1 ; and
a distance measuring circuit calculating a time-of-flight of light from an output signal of the light detector.

18. A lidar device, comprising:
a light source irradiating light on an object; and
the light detection system according to claim 17 detecting light reflected by the object.

19. A mobile body, comprising:
the lidar device according to claim 18 .

20. A vehicle, comprising:
a plurality of the lidar devices according to claim 18 ; and
a vehicle body,
the lidar devices being located at four corners of the vehicle body.

Assignees

• Toshiba Kk

Inventors

• Okamoto Kazuaki
• Kwon Honam
• Shimizu Mariko
• Suzuki Kazuhiro
• Sasaki Keita
• Fujiwara Ikuo

Classifications

• H10F77/413

  directly associated or integrated with the devices, e.g. back reflectors (directly associated or integrated with photovoltaic cells H10F77/42) · CPC title

• H10F77/148

  Shapes of potential barriers · CPC title

• H10F30/225

  the potential barrier working in avalanche mode, e.g. avalanche photodiodes · CPC title

• H10F77/147

  Shapes of bodies · CPC title

• H10F39/107 Primary

  having multiple elements covered by H10F30/00 in a repetitive configuration, e.g. radiation detectors comprising photodiode arrays · CPC title