Sensor
US-2022307926-A1 · Sep 29, 2022 · US
US11982524B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11982524-B2 |
| Application number | US-202217876013-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jul 28, 2022 |
| Priority date | Aug 6, 2020 |
| Publication date | May 14, 2024 |
| Grant date | May 14, 2024 |
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An input includes a first electrode and a first deformation portion. An output includes a second electrode and a second deformation portion. A transmission portion enables transmission of an elastic wave from the first deformation portion to the transmission portion and transmission of an elastic wave from the transmission portion to the second deformation portion. In operation, an input signal is input to the first electrode that deforms the first deformation portion to generate an elastic wave. The transmission portion transmits the elastic wave from the first deformation portion to the second deformation portion that is deformed by the elastic wave to generate an output signal to the second electrode. The detection unit detects a deformation amount from the reference state of the transmission portion based on the output signal.
Opening claim text (preview).
The invention claimed is: 1. A deformation amount detection device comprising: an input including a first electrode and a first deformation portion; an output including a second electrode and a second deformation portion; a transmission portion disposed between the input and the output and configured to receive an elastic wave from the first deformation portion and to transmit the elastic wave to the second deformation portion, the transmission portion having a flexibility, such that the transmission portion is configured to be deformed from a reference state; and a detection unit that stores a table indicating a relationship between an electrical parameter of an output signal and an angle θ that is a deformation amount of the transmission portion, wherein the first electrode is configured to receive an input signal that deforms the first deformation portion to generate the elastic wave, wherein the transmission portion is configured to transmit the elastic wave from the first deformation portion to the second deformation portion, wherein the second deformation portion is deformed by the elastic wave to generate the output signal to the second electrode, and wherein the detection unit is configured to determine the angle θ as the deformation amount from the reference state of the transmission portion based on the output signal and the table, the angle θ indicating a positional relationship between a member connected to the input and a member connected to the output. 2. The deformation amount detection device according to claim 1 , wherein the input signal comprises a voltage that periodically changes. 3. The deformation amount detection device according to claim 1 , wherein the detection unit is configured to detect the deformation amount from the reference state of the transmission portion based on the electrical parameter included in the output signal. 4. The deformation amount detection device according to claim 1 , wherein the electrical parameter comprises at least one of an amplitude of the output signal, a frequency of the output signal, and a Q factor of the output signal. 5. The deformation amount detection device according to claim 1 , wherein the detection unit is configured to detect the deformation amount from the reference state of the transmission portion based on a time period from when the input signal is input to when the output signal is output. 6. The deformation amount detection device according to claim 1 , wherein each of the first deformation portion and the second deformation portion comprises a piezoelectric material. 7. The deformation amount detection device according to claim 6 , wherein each of the first deformation portion and the second deformation portion comprises a polylactic acid. 8. The deformation amount detection device according to claim 6 , wherein each of the first deformation portion and the second deformation portion comprises a polyvinylidene fluoride. 9. The deformation amount detection device according to claim 1 , wherein the first deformation portion, the second deformation portion, and the transmission portion are formed as a single film. 10. The deformation amount detection device according to claim 2 , wherein the input signal comprises a sound signal having the voltage that periodically changes. 11. The deformation amount detection device according to claim 1 , wherein the input further comprises a third electrode with the first deformation portion disposed between the first electrode and the third electrode. 12. The deformation amount detection device according to claim 11 , wherein the first electrode and the third electrode are conductor layers each having a rectangular shape in a plan view thereof, such that respective outer edges of the first electrode and the third electrode coincide with each other when viewed in the plan view. 13. The deformation amount detection device according to claim 11 , wherein the output further comprises a fourth electrode with the second deformation portion disposed between the second electrode and the fourth electrode. 14. The deformation amount detection device according to claim 13 , wherein the second electrode and the fourth electrode are conductor layers each having a rectangular shape in a plan view thereof, such that respective outer edges of the second electrode and the fourth electrode coincide with each other when viewed in the plan view. 15. A deformation amount detection device comprising: an input including an electrode and a deformation portion; a transmission portion that enables transmission of an elastic wave from the deformation portion to the transmission portion and transmission of a reflection wave of the elastic wave from the transmission portion to the deformation portion, the transmission portion having a flexibility that configures the transmission portion to be deformed from a reference state; and a detection unit that stores a table indicating a relationship between an electrical parameter of an output signal and an angle θ that is a deformation amount of the transmission portion, wherein the electrode is configured to receive an input signal that deforms the deformation portion to generate the elastic wave, wherein the transmission portion transmits the elastic wave from the deformation portion as the reflection wave to the deformation portion, wherein the deformation portion is deformed by the reflection wave to generate the output signal to the electrode, wherein the detection unit is configured to detect a deformation amount from the reference state of the transmission portion based on the output signal; and wherein the detection unit is configured to determine the angle θ as the deformation amount from the reference state of the transmission portion based on the output signal and the table. 16. The deformation amount detection device according to claim 15 , wherein the input signal comprises a voltage that periodically changes. 17. The deformation amount detection device according to claim 15 , wherein the detection unit is configured to detect the deformation amount from the reference state of the transmission portion based on the electrical parameter included in the output signal. 18. The deformation amount detection device according to claim 15 , wherein the electrical parameter comprises at least one of an amplitude of the output signal, a frequency of the output signal, and a Q factor of the output signal. 19. The deformation amount detection device according to claim 15 , wherein the deformation portion comprises a piezoelectric material. 20. The deformation amount detection device according to claim 19 , wherein the input further comprises a pair of electrodes, including the electrode, with the deformation portion disposed between the pair of electrodes, and wherein the pair of electrodes are conductor layers each having a rectangular shape in a plan view thereof, such that respective outer edges of the pair of electrodes coincide with each other when viewed in the plan view, and wherein the angle θ indicates a positional relationship between a pair of members connected to the pair of electrodes, respectively.
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