Measuring device

Patent metadata

Field	Value
Publication number	US-11980455-B2
Application number	US-202117538179-A
Country	US
Kind code	B2
Filing date	Nov 30, 2021
Priority date	Jun 7, 2019
Publication date	May 14, 2024
Grant date	May 14, 2024

Abstract

A measuring device is provided for reducing the occurrence of damage to a sensor section. The sensor section includes a substrate, a pair of comb electrodes on a first principal surface, and a pair of back-side electrodes disposed on a second principal surface and corresponding to the pair of comb electrodes, respectively. The pair of comb electrodes includes a plurality of tooth sections and connection sections that connect the tooth sections to each other, respectively. The substrate includes via-hole conductors in positions corresponding to the tooth sections inside a region surrounded by the outer tooth sections on opposite ends in a direction in which the tooth sections in the pair of comb electrodes are aligned and the connection sections. The via-hole conductors connect the comb electrodes and the back-side electrodes.

First claim

The invention claimed is:

1. A measuring device comprising:
a sensor including a substrate having a first principal surface and a second principal surface that opposes the first principal surface, a pair of comb electrodes disposed on the first principal surface, and a pair of back-side electrodes disposed on the second principal surface,
wherein each of the pair of comb electrodes includes a connection section and plurality of tooth sections extending therefrom,
wherein the substrate includes via-hole conductors disposed in positions that correspond to the tooth sections inside a region that is surrounded by the plurality of tooth sections on opposite ends in a direction in which the plurality of tooth sections are aligned and the connection sections,
wherein the via-hole conductors connect the pair of comb electrodes and the back-side electrodes, respectively, and
wherein the connection section of each of the pair of comb electrodes extends in a first direction and the plurality of tooth sections extend in a second direction orthogonal to the first direction.

2. The measuring device according to claim 1 , wherein the pair of back-side electrodes are disposed on the second principal surface at respective positions that correspond to positions of the pair of the comb electrodes of the first principal surface.

3. The measuring device according to claim 1 , wherein the sensor further includes a wall that protrudes from the first principal surface and surrounds the pair of comb electrodes.

4. The measuring device according to claim 3 , wherein the wall has a same structure as a structure of the pair of comb electrodes.

5. The measuring device according to claim 1 , wherein the via-hole conductors are arranged on leading ends of the tooth sections inside the region.

6. The measuring device according to claim 1 , wherein the pair of back-side electrodes are symmetric to each other about a central point on the second principal surface of the substrate.

7. The measuring device according to claim 1 , wherein the pair of back-side electrodes comprise an oblong shape.

8. The measuring device according to claim 1 , wherein each of the pair of back-side electrodes includes a base section and an extending section, and the via-hole conductors are connected to the extending sections in the pair of back-side electrodes, respectively.

9. The measuring device according to claim 1 , further comprising a main body having a cuboid shape with the sensor extending from the main body.

10. The measuring device according to claim 9 , wherein a longitudinal direction of the connection section of each of the pair of comb electrodes extends in a same direction as a longitudinal direction of the main body.

11. The measuring device according to claim 1 , wherein a number of the plurality of tooth sections of a first comb electrode of the pair of comb electrodes is different than a number of the plurality of tooth sections of a second comb electrode of the pair of comb electrodes.

12. The measuring device according to claim 1 , wherein each of the pair of comb electrodes is a laminate of a plurality of metal layers.

13. A measuring device comprising:
a sensor including a substrate having a first principal surface and a second principal surface that opposes the first principal surface, a pair of comb electrodes disposed on the first principal surface, and a pair of back-side electrodes disposed on the second principal surface,
wherein each of the pair of comb electrodes includes a connection section and plurality of tooth sections extending therefrom,
wherein the substrate includes via-hole conductors disposed in positions that correspond to the tooth sections inside a region that is surrounded by the plurality of tooth sections on opposite ends in a direction in which the plurality of tooth sections are aligned and the connection sections,
wherein the via-hole conductors connect the pair of comb electrodes and the back-side electrodes, respectively,
wherein each of the pair of comb electrodes is a laminate of a plurality of metal layers, and
wherein a first metal layer of the laminate of each of the pair of comb electrodes is embedded in a groove of the substrate of the sensor.

14. The measuring device according to claim 13 , further comprising a protective layer that covers the pair of comb electrodes.

15. The measuring device according to claim 13 , wherein the via-hole conductors are set immediately below the first metal layers in the pair of comb electrodes, respectively.

16. A measuring device comprising:
a sensor including a substrate having first and second surfaces that oppose each other, a pair of comb electrodes disposed on the first surface, and a pair of back-side electrodes disposed on the second surface; and
a pair of via-hole conductors extending through the substrate and that connect the pair of comb electrodes to the pair of back-side electrodes, respectively,
wherein each of the pair of comb electrodes includes a connection section and plurality of tooth sections that extend perpendicularly from the respective connection sections,
wherein the pair of via-hole conductors are disposed in the substrate and at positions inside a region that is surrounded by at least two tooth sections on opposite ends of the pair of comb electrodes, respectively, and the connection sections, and
wherein the sensor further includes a wall that protrudes from the first surface and surrounds the pair of comb electrodes.

17. The measuring device according to claim 16 , wherein the pair of back-side electrodes are disposed on the second surface at respective positions that correspond to positions of the pair of the comb electrodes of the first surface.

18. The measuring device according to claim 16 , wherein the via-hole conductors are arranged on leading ends of the tooth sections of the pair of comb electrodes.

Assignees

• Murata Manufacturing Co

Inventors

• Takagi Jun
• Tanaka Kenji
• Takahashi Tomoki

Classifications

• A61B5/0537 Primary

  Measuring body composition by impedance, e.g. tissue hydration or fat content · CPC title

• A61B5/682

  Mouth, e.g., oral cavity; tongue; Lips; Teeth · CPC title

• G01N27/223

  for determining moisture content, e.g. humidity (rain detectors on vehicle windows B60S1/0825) · CPC title

• A61B2562/0209

  Special features of electrodes classified in A61B5/24, A61B5/25, A61B5/283, A61B5/291, A61B5/296, A61B5/053 · CPC title

• G01D11/24

  Housings {; Casings for instruments} · CPC title