Titanium oxide optical device films deposited by physical vapor deposition

Patent metadata

Field	Value
Publication number	US-11976351-B2
Application number	US-202217692465-A
Country	US
Kind code	B2
Filing date	Mar 11, 2022
Priority date	Mar 11, 2021
Publication date	May 7, 2024
Grant date	May 7, 2024

Abstract

An optical device is provided. The optical device includes an optical device substrate having a first surface; and an optical device film disposed over the first surface of the optical device substrate. The optical device film is formed of titanium oxide. The titanium oxide is selected from the group of titanium(IV) oxide (TiO 2 ), titanium monoxide (TiO), dititanium trioxide (Ti 2 O 3 ), Ti 3 O, Ti 2 O, δ-TiO x , where x is 0.68 to 0.75, and Ti n O 2n-1 , where n is 3 to 9, the optical device film has a refractive index greater than 2.72 at a 520 nanometer (nm) wavelength, and a rutile phase of the titanium oxide comprises greater than 94 percent of the optical device film.

First claim

What is claimed is:

1. An optical device comprising:
an optical device substrate having a first surface; and
an optical device film disposed over the first surface of the optical device substrate, wherein
the optical device film includes a first side facing the first surface of the optical device substrate,
the optical device film includes a first side surface and an opposing second side surface, the first side surface and the second side surface each extending from the first side of the optical device film,
the optical device film is formed of titanium oxide continuously from the first side surface to the second side surface,
the titanium oxide is selected from the group consisting of titanium(IV) oxide (TiO 2 ), titanium monoxide (TiO), dititanium trioxide (Ti 2 O 3 ), Ti 3 O, Ti 2 O, δ-TiO x , where x is 0.68 to 0.75, and Ti n O 2n-1 , where n is 3 to 9,
the optical device film has a refractive index greater than 2.72 at a 520 nanometer (nm) wavelength, and
a rutile phase of the titanium oxide comprises greater than 94 percent of the optical device film.

2. The optical device of claim 1 , wherein the optical device film has a refractive index greater than 2.75 at a 520 nm wavelength.

3. The optical device of claim 1 , wherein the refractive index of the optical device film is greater than or equal to 2.85 at a 465 nm wavelength, greater than or equal to 2.78 at a 500 nm wavelength, greater than or equal to 2.74 at a 532 nm wavelength, and greater than or equal to 2.65 at a 633 nm wavelength.

4. The optical device of claim 1 , wherein the optical device film is formed of a continuous layer of titanium oxide.

5. An optical device comprising:
an optical device substrate having a first surface; and
a plurality of optical device structures disposed over the first surface of the optical device substrate, the plurality of optical device structures spaced apart from each other in a direction parallel to the first surface, wherein
each optical device structure includes a first side facing the first surface of the optical device substrate,
each optical device structure includes a first side surface and an opposing second side surface, the first side surface and the second side surface each extending from the first side of the corresponding optical device structure,
each optical device structure of the plurality of optical device structures is formed of titanium oxide continuously from the first side surface to the second side surface,
the titanium oxide is selected from the group consisting of titanium oxide titanium(IV) oxide (TiO 2 ), titanium monoxide (TiO), dititanium trioxide (Ti 2 O 3 ), Ti 3 O, Ti 2 O, δ-TiO x , where x is 0.68 to 0.75, and Ti n O 2n-1 , where n is 3 to 9,
each optical device structure has a refractive index greater than 2.72 at a 520 nanometer (nm) wavelength, and
a rutile phase of the titanium oxide comprises greater than 94 percent of the optical device structures.

6. The optical device of claim 5 , wherein each optical device structure has a refractive index
greater than 2.75 at a 520 nm wavelength.

7. The optical device of claim 5 , wherein the refractive index of each optical device structure is greater than or equal to 2.85 at a 465 nm wavelength, greater than or equal to 2.78 at a 500 nm wavelength, greater than or equal to 2.74 at a 532 nm wavelength, and greater than or equal to 2.65 at a 633 nm wavelength.

8. The optical device of claim 5 , wherein each optical device structure is formed of a continuous layer of titanium oxide.

9. A method, comprising:
disposing an optical device substrate on a substrate support in a processing volume of a process chamber, the optical device substrate having a first surface; and
depositing an optical device film of titanium oxide over the first surface of the optical device substrate using a physical vapor deposition (PVD) process, wherein
the optical device film includes a first side facing the first surface of the optical device substrate,
the optical device film includes a first side surface and an opposing second side surface, the first side surface and the second side surface each extending from the first side of the optical device film,
the optical device film is formed of titanium oxide continuously from the first side surface to the second side surface,
the PVD process comprises providing a flowrate of a sputter gas and a flowrate of an oxygen-containing gas to the processing volume and providing RF energy to a target disposed in the process volume,
the titanium oxide is selected from the group consisting of titanium(IV) oxide (TiO 2 ), titanium monoxide (TiO), dititanium trioxide (Ti 2 O 3 ), Ti 3 O, Ti 2 O, δ-TiO x , where x is 0.68 to 0.75, and Ti n O 2n-1 , where n is 3 to 9,
the optical device film has a refractive index greater than 2.72 at a 520 nanometer (nm) wavelength,
a pressure in the processing volume is less than or equal to 50 mTorr during the depositing of the optical device film, and
a rutile phase of titanium oxide comprises greater than 94 percent of the optical device film.

10. The method of claim 9 , wherein the optical device film has a refractive index greater than 2.75 at a 520 nm wavelength.

11. The method of claim 9 , wherein a ratio of the flowrate of the sputter gas to the flowrate of the oxygen-containing gas is between about 1:0.1 to about 1:6.

12. The method of claim 9 , wherein a ratio of the flowrate of the sputter gas to the flowrate of the oxygen-containing gas is between about 1:1 to about 1:3.

13. The method of claim 12 , wherein the pressure in the processing volume is less than or equal to 10 mTorr during the depositing of the optical device film.

14. The method of claim 9 , wherein the pressure in the processing volume is less than or equal to 10 mTorr during the depositing of the optical device film.

15. The method of claim 9 , wherein a ratio of the flowrate of the sputter gas to the flowrate of the oxygen-containing gas is between about 1:0.1 to about 1:1.6.

16. The method of claim 9 , wherein the PVD process further comprises providing DC power to the target during the depositing of the optical device film.

17. The method of claim 9 , wherein the process chamber includes a magnetron assembly and the PVD process further comprises directing magnetic fields from the magnetron assembly to regions around the target in the processing volume during the depositing of the optical device film.

18. The method of claim 9 , further comprising adjusting a bias of the substrate support during the depositing of the optical device film using an auto capacitance tuner.

19. The method of claim 9 , wherein the refractive index of the optical device film is greater than or equal to 2.85 at a 465 nm wavelength, greater than or equal to 2.78 at a 500 nm wavelength, greater than or equal to 2.74 at a 532 nm wavelength, and greater than or equal to 2.65 at a 633 nm wavelength.

20. The method of claim 9 , wherein the optical device film is formed of a continuous layer of titanium oxide.

Assignees

• Applied Materials Inc

Inventors

• Ohno Kenichi
• Ceballos Andrew
• Armstrong Karl J
• KURATOMI Takashi
• Hourani Rami
• Godet Ludovic

Classifications

• C23C14/083 Primary

  of refractory metals or yttrium · CPC title

• C03C17/2456

  Coating containing TiO2 · CPC title

• C23C14/35

  by application of a magnetic field, e.g. magnetron sputtering {(C23C14/3457 takes precedence)} · CPC title

• C23C14/54

  Controlling or regulating the coating process · CPC title

• G02B1/10

  Optical coatings produced by application to, or surface treatment of, optical elements (G02B1/08 takes precedence) · CPC title