Methods for encapsulating silver mirrors on optical structures

Patent metadata

Field	Value
Publication number	US-11976002-B2
Application number	US-202117141813-A
Country	US
Kind code	B2
Filing date	Jan 5, 2021
Priority date	Jan 5, 2021
Publication date	May 7, 2024
Grant date	May 7, 2024

Abstract

Embodiments of the present disclosure generally relate to encapsulated optical devices and methods for fabricating the encapsulated optical devices. In one or more embodiments, a method for encapsulating an optical device includes depositing a metallic silver layer on a substrate, depositing a barrier layer on the metallic silver layer, where the barrier layer contains silicon nitride, a metallic element, a metal nitride, or any combination thereof, and depositing an encapsulation layer containing silicon oxide on the barrier layer.

First claim

What is claimed is:

1. A method for encapsulating an optical device, comprising:
depositing a metallic silver layer on a substrate;
depositing a barrier layer on the metallic silver layer, wherein the barrier layer comprises a metal nitride, and wherein the barrier layer has a lower surface opposite an upper surface, and the lower surface is directly deposited on the metallic silver layer; and
depositing an encapsulation layer comprising silicon oxide directly on the upper surface of the barrier layer.

2. The method of claim 1 , wherein the encapsulation layer is deposited by a physical vapor deposition process.

3. The method of claim 2 , wherein the physical vapor deposition process comprises generating ozone or an oxygen plasma while depositing the encapsulation layer.

4. The method of claim 1 , wherein the metallic silver layer has a thickness of about 10 nm to about 200 nm.

5. The method of claim 1 , wherein the barrier layer further comprises silicon nitride deposited by physical vapor deposition.

6. The method of claim 1 , wherein the barrier layer comprises titanium nitride, tantalum nitride, tungsten nitride, chromium nitride, molybdenum nitride, vanadium nitride, alloys thereof, dopants thereof, or any combination thereof.

7. The method of claim 1 , wherein the barrier layer has a thickness of about 1 nm to about 50 nm.

8. The method of claim 1 , wherein the encapsulation layer has a thickness of about 10 nm to about 200 nm.

9. The method of claim 1 , wherein the substrate comprises glass, quartz, silicon dioxide, or fused silica.

10. The method of claim 1 , further comprising:
depositing an intermediate barrier layer on the substrate, wherein the intermediate barrier layer comprises a metal nitride; and
depositing the metallic silver layer directly on the intermediate barrier layer.

11. The method of claim 10 , wherein the intermediate barrier layer has a thickness of about 1 nm to about 50 nm.

12. The method of claim 1 , wherein the metallic silver layer contains about 75 atomic percent (at %) to 99 at % of metallic silver.

13. The method of claim 1 , wherein the substrate comprises a high refractive index material, and wherein the high refractive index material has a refractive index of greater than 1.5 to about 2.8.

14. A method for encapsulating an optical device, comprising:
depositing a first barrier layer on a substrate, wherein the first barrier layer comprises a metal nitride;
depositing a metallic silver layer on the first barrier layer;
depositing a second barrier layer on the metallic silver layer, wherein the second barrier layer comprises a metal nitride, and wherein the second barrier layer has a lower surface opposite an upper surface, and the lower surface is directly deposited on the metallic silver layer; and
depositing an encapsulation layer comprising silicon oxide directly on the upper surface of the second barrier layer by a physical vapor deposition process.

15. The method of claim 14 , wherein the physical vapor deposition process comprises generating ozone or an oxygen plasma while depositing the encapsulation layer.

16. The method of claim 14 , wherein the metallic silver layer has a thickness of about 10 nm to about 200 nm.

17. The method of claim 14 , wherein the first barrier layer or the second barrier layer independently further comprises silicon nitride deposited by physical vapor deposition.

18. The method of claim 14 , wherein each of the first barrier layer and the second barrier layer independently comprises titanium nitride, tantalum nitride, tungsten nitride, chromium nitride, molybdenum nitride, vanadium nitride, alloys thereof, dopants thereof, or any combination thereof.

19. The method of claim 14 , wherein the metallic silver layer contains about 75 atomic percent (at %) to 99 at % of metallic silver.

20. The method of claim 14 , wherein the substrate comprises a high refractive index material, and wherein the high refractive index material has a refractive index of greater than 1.5 to about 2.8.

Assignees

• Applied Materials Inc

Inventors

• Portillo Rivera Alexia Adilene
• Ceballos Andrew
• Ohno Kenichi
• Hourani Rami
• Armstrong Karl J
• Cohen Brian Alexander

Classifications

• G02B5/0858

  the reflecting layers comprising a single metallic layer with one or more dielectric layers · CPC title

• G02B5/085

  at least one of the reflecting layers comprising metal · CPC title

• C03C17/36 Primary

  at least one coating being a metal · CPC title

• C03C17/3615 Primary

  Coatings of the type glass/metal/other inorganic layers, at least one layer being non-metallic · CPC title

• C03C17/3626

  one layer at least containing a nitride, oxynitride, boronitride or carbonitride · CPC title