Chemical liquid storage body

Patent metadata

Field	Value
Publication number	US-11976001-B2
Application number	US-202016787197-A
Country	US
Kind code	B2
Filing date	Feb 11, 2020
Priority date	Sep 6, 2017
Publication date	May 7, 2024
Grant date	May 7, 2024

Abstract

An object of the present invention is to provide a chemical liquid storage body which hardly causes short and defects in a formed wiring board in a case where a chemical liquid stored in the chemical liquid storage body is used in a wiring forming process including photolithography after the chemical liquid storage body is preserved for a certain period of time. The chemical liquid storage body according to an embodiment of the present invention includes a container and a chemical liquid stored in the container, in which the chemical liquid contains at least one kind of specific metal component selected from the group consisting of Fe, Al, Cr, and Ni, a content of the specific metal component in the chemical liquid with respect to a total mass of the chemical liquid is equal to or smaller than 100 mass ppt, at least a portion of a liquid contact portion of the container is formed of glass containing sodium atoms, and provided that B represents a content of sodium atoms in a bulk region with respect to a total mass of the bulk region, and A represents a content of sodium atoms in a surface region with respect to a total mass of the surface region, a content mass ratio of A to B represented by A/B is higher than 0.10 and less than 1.0 in at least a portion of the liquid contact portion.

First claim

What is claimed is:

1. A chemical liquid storage body comprising:
a container; and
a chemical liquid stored in the container,
wherein the chemical liquid contains at least one kind of metal component selected from the group consisting of Fe, Al, Cr, and Ni,
in a case where the chemical liquid contains one kind of metal component selected from the group consisting of Fe, Al, Cr, and Ni, a content of the metal component with respect to a total mass of the chemical liquid is equal to or smaller than 100 mass ppt,
in a case where the chemical liquid contains two or more kinds of metal components selected from the group consisting of Fe, Al, Cr, and Ni, a total content of the metal components with respect to the total mass of the chemical liquid is equal to or smaller than 100 mass ppt,
at least a portion of a liquid contact portion of the container is formed of glass containing sodium atoms, and
provided that a region between a surface of the liquid contact portion and a position 10 nm below the surface in a thickness direction of the container is a surface region, a region between the surface and a position 2.0 μm below the surface in the thickness direction of the container is bulk region, B represents a content of sodium atoms in the bulk region with respect to a total mass of the bulk region, and A represents a content of sodium atoms in the surface region with respect to a total mass of the surface region, in a case where the surface region and the bulk region are measured by X-ray photoelectron spectroscopy, a content mass ratio of A to B represented by A/B is higher than 0.10 and less than 1.0 in at least a portion of the liquid contact portion, and
a void volume calculated by the following equation is 5% to 40% by volume, and in a void portion of the container, the number of particles having a particle diameter equal to or greater than 0.05 μm is 1 to 1,000/m 3 , wherein
Equation: void volume={1−(volume of chemical liquid in container/volume of container)}×100.

2. The chemical liquid storage body according to claim 1 ,
wherein the metal component contains metal particles.

3. The chemical liquid storage body according to claim 2 ,
wherein the content mass ratio A/B is higher than 0.10 and less than 0.80.

4. The chemical liquid storage body according to claim 2 ,
wherein the content B is 1.0% to 20% by mass.

5. The chemical liquid storage body according to claim 1 ,
wherein the content mass ratio A/B is higher than 0.10 and less than 0.80.

6. The chemical liquid storage body according to claim 5 ,
wherein the content B is 1.0% to 20% by mass.

7. The chemical liquid storage body according to claim 1 ,
wherein the content B is 1.0% to 20% by mass.

8. The chemical liquid storage body according to claim 1 ,
wherein the content B is 1.0% to 10% by mass.

9. The chemical liquid storage body according to claim 1 ,
wherein provided that D represents a content of SiO 2 in the bulk region with respect to the total mass of the bulk region, and C represents a content of SiO 2 in the surface region with respect to the total mass of the surface region, in a case where the surface region and the bulk region are measured by X-ray photoelectron spectroscopy, a content mass ratio of C to D represented by C/D is higher than 1.00 and less than 1.45 in at least a portion of the surface.

10. The chemical liquid storage body according to claim 9 ,
wherein the content mass ratio C/D is higher than 1.00 and less than 1.30.

11. The chemical liquid storage body according to claim 9 ,
wherein the content D is 68.0% to 80.0% by mass.

12. The chemical liquid storage body according to claim 1 ,
wherein the glass further contains at least one of calcium atoms or potassium atoms.

13. The chemical liquid storage body according to claim 1 ,
wherein the glass further contains calcium atoms, and
provided that F represents a content of calcium atoms in the bulk region with respect to the total mass of the bulk region, and E represents a content of calcium atoms in the surface region with respect to the total mass of the surface region, in a case where the surface region and the bulk region are measured by X-ray photoelectron spectroscopy, a content mass ratio of E to F represented by E/F is higher than 0.10 and less than 0.90 in at least a portion of the surface.

14. The chemical liquid storage body according to claim 13 ,
wherein the content mass ratio E/F is higher than 0.10 and less than 0.70.

15. The chemical liquid storage body according to claim 13 ,
wherein the content F is 0.10% to 15% by mass.

16. The chemical liquid storage body according to claim 13 ,
wherein the content F is 0.10% to 10% by mass.

17. The chemical liquid storage body according to claim 1 ,
wherein the glass further contains boron atoms, and
provided that H represents a content of boron atoms in the bulk region with respect to the total mass of the bulk region, and G represents a content of boron atoms in the surface region with respect to the total mass of the surface region, in a case where the surface region and the bulk region are measured by X-ray photoelectron spectroscopy, a content mass ratio of G to H represented by G/H is higher than 0.10 and less than 0.90 in at least a portion of the surface.

18. The chemical liquid storage body according to claim 1 ,
wherein in the chemical liquid, the number of particles having a particle diameter equal to or greater than 0.05 μm is 5 to 500/ml.

19. The chemical liquid storage body according to claim 1 ,
wherein in a void portion of the container, a concentration of an organic phosphorus compound is 0.01 to 100 volume ppb.

Assignees

• Fujifilm Corp

Inventors

• Kamimura Tetsuya
• Yoshidome Masahiro
• KAWADA Yukihisa

Classifications

• H10P76/2041

  Photolithographic processes · CPC title

• C03C17/245 Primary

  by deposition from the vapour phase · CPC title

• B65D23/02

  Linings or internal coatings · CPC title

• C03C17/004

  Coating the inside · CPC title

• C09G1/00

  Polishing compositions (French polish C09F11/00; detergents C11D) · CPC title