Laser device and extreme ultraviolet light generation system
US-2016316551-A1 · Oct 27, 2016 · US
US11973303B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11973303-B2 |
| Application number | US-202117360359-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jun 28, 2021 |
| Priority date | Jun 28, 2021 |
| Publication date | Apr 30, 2024 |
| Grant date | Apr 30, 2024 |
A practical reading order for non-experts. Skip the full description unless you need deep technical detail.
What the patent document calls the invention.
A short plain-language summary of the technical disclosure.
Who owns or filed the patent and who is credited as inventor.
Filing, priority, publication, and grant dates set the timeline.
The legal scope of protection — read this for what is actually claimed.
Technology tags used to group this patent with similar filings.
Prior art links and similar publications in this corpus.
Official abstract text for this publication.
A laser apparatus includes at least one electro-optic (EO) medium through which a polarized laser beam passes for N times, forming a plurality of first-pass to Nth-pass beams, by reflecting the polarized laser beam from at least one reflection mirror, and a power supplier configured to alternately provide a 1/N of a half-wave (λ/2) or quarter-wave (λ/4) voltage and remove the voltage to the EO medium, λ being a wavelength of the polarized laser beam. The at least one EO medium is tilted at angle θ and/or angle ϕ with respect to one of the plurality of first-pass to Nth-pass beams. The at least one EO medium comprises a M number of EO mediums, and the power supplier is configured to alternately provide a 1/M*N of a half-wave (λ/2) or quarter-wave (λ/4) voltage and remove the voltage to each of the M number of EO mediums.
Opening claim text (preview).
What is claimed is: 1. A laser apparatus with a multi-pass configuration, comprising: an electro-optic (EO) medium through which a polarized laser beam passes; at least one reflection mirror configured to reflect the polarized laser beam so that the polarized laser beam passes through the EO medium for N times, forming a plurality of first-pass to Nth-pass beams, an optical axis of the EO medium being tilted with respect to at least one of the plurality of first-pass to Nth-pass beams; and a power supply configured to alternatingly provide a 1/N of a half-wave or quarter-wave voltage and remove the 1/N of the half-wave or quarter-wave voltage to the EO medium, λ being the wavelength of the polarized laser beam. 2. The laser apparatus according to claim 1 , wherein the optical axis of the EO medium is tilted at a first angle on a first plane and/or a second angle on a second plane with respect to the at least one of the plurality of first-pass to Nth-pass beams. 3. The laser apparatus according to claim 1 , wherein one of the EO medium or the at least one reflection mirror is tilted in multiple directions. 4. The laser apparatus according to claim 1 , wherein the plurality of first-pass to Nth-pass beams are slanted at angles of a same magnitude with respect to an optical axis of the EO medium. 5. The laser apparatus according to claim 4 , wherein the plurality of first-pass to Nth-pass beams are slanted at a first angle of a same magnitude on a first plane and at a second angle of another same magnitude on a second plane with respect to an optical axis of the EO medium. 6. The laser apparatus according to claim 1 , wherein the plurality of first-pass to Nth-pass beams are slanted with respect to an optical axis of the EO medium such that angles of odd-pass beams in a first plane have a same magnitude as angles of even-pass beams in a second plane and angles of even-pass beams in the first plane have a same magnitude as angles of odd-pass beams in the second plane. 7. The laser apparatus according to claim 6 , wherein an odd-pass beam is slanted at a first angle with respect to the optical axis on the first plane with respect to the optical axis of the EO medium, and an even-pass beam is slanted at a second angle on the second plane with respect to the optical axis of the EO medium. 8. The laser apparatus according to claim 1 , wherein even-pass beams and odd-pass beams are symmetric to each other with respect to a pitch plane of the optical axis of the EO medium. 9. The laser apparatus according to claim 1 , wherein even-pass beams and odd-pass beams are symmetric to each other with respect to a yaw plane of the optical axis of the EO medium. 10. The laser apparatus according to claim 1 , wherein even-pass beams are along with respect to the optical axis of the EO medium, and odd-pass beams deviate with respect to the optical axis of the EO medium, or even-pass beams deviate with respect to the optical axis of the EO medium, and odd-pass beams are along with respect to the optical axis of the EO medium. 11. The laser apparatus according to claim 1 , wherein the polarized laser beam that passed the EO medium for the N times is reflected by a polarizing beam splitter or passes through a thin film polarizer. 12. The laser apparatus according to claim 1 , wherein the EO medium comprises a M number of Pockels cells, and the power supplier is configured to alternately provide a 1/M*N of a half-wave (λ/2) or quarter-wave (λ/4) voltage and remove the 1/M*N of the half-wave (λ/2) or quarter-wave (λ/4) voltage to each of the M number of Pockels cells. 13. The laser apparatus according to claim 1 , wherein the N times is two times, the polarized laser beam enters the EO medium and passes through the EO medium for a first-pass beam, and the first-pass beam is reflected back to the EO medium by the at least one reflection mirror and passes through the EO medium for a second-pass beam. 14. The laser apparatus according to claim 1 , wherein the N times is three times, the at least one mirror include a first mirror and a second mirror, and the power supplier is configured to alternately provide a λ/6 voltage and no voltage to the EO medium, wherein the laser beam enters the EO medium and passes through the EO medium for a first-pass beam, the first-pass beam is reflected back to the EO medium by the first mirror and passes through Pockels cell for a second-pass beam, and the second-pass beam is reflected back to the EO medium by the at least one mirror and passes through Pockels cell for a third-pass beam. 15. The laser apparatus according to claim 1 , wherein the N times is four times, and the power supplier is configured to alternatingly provide a λ/8 of the half-wave voltage and remove the λ/8 of the half-wave voltage to the EO medium. 16. The laser apparatus according to claim 1 , wherein the N times is eight times, and the power supplier is configured to alternately provide a λ/16 of the half-wave voltage and remove the λ/16 of the half-wave voltage to the EO medium. 17. The laser apparatus according to claim 1 , wherein the power supplier is configured to provide the 1/N of a half-wave voltage with a tolerance of up to 10 percent. 18. A method for operating a laser apparatus comprising: entering a polarized laser beam to an electro-optic (EO) medium; reflecting, by at least one reflector, the polarized laser beam so that the beam passes through the EO medium for N times, forming a plurality of first-pass to Nth-pass beams, an optical axis of the EO medium being tilted with respect to at least one of the plurality of first-pass to Nth-pass beams; and alternatingly providing, by a power supplier, a 1/N of a half-wave voltage (λ/2N) and removing the λ/2N voltage to the EO medium, λ being a wavelength of the polarized laser beam. 19. The method according to claim 18 , further comprising: tilting one of the EO medium, or the at least one reflection mirror with respect to the at least one of the plurality of first-pass to Nth-pass beams in a yaw direction and/or a pitch direction. 20. The laser apparatus according to claim 1 , wherein the half-wave voltage is λ/2 voltage, λ being a wavelength of the polarized laser beam. 21. The laser apparatus according to claim 1 , wherein the EO medium is made of one of various crystals with electro-optical properties, the various crystals including BBO (Beta Barium Borate), RTP (Rubidium Titanyl Phosphate), KTP (Potassium Titanyl Phosphate), KD*P (Potassium dideuterium phosphate), KDP (Potassium dihydrogen phosphate) and LiNbO 3 (Lithium niobate) crystal. 22. The laser apparatus according to claim 1 , further comprising a laser polarizer configured to output the polarized laser beam. 23. The laser apparatus according to claim 1 , wherein the laser apparatus is placed outside a laser cavity as an electro-optic pulse picker and modulator. 24. The laser apparatus according to claim 1 , wherein the laser apparatus is placed in a laser cavity as an electro-optic Q switch.
using intracavity electro-optic devices · CPC title
Structural association of optical elements, e.g. lenses, polarizers, phase plates, with the crystal · CPC title
Arrangements comprising two or more independently controlled crystals · CPC title
Beam steering, e.g. whereby a mirror outside the cavity is present to change the beam direction · CPC title
Processes or apparatus for excitation, e.g. pumping · CPC title
Related publications grouped by family.
Answers are generated from the same data shown on this page.