Laser alignment fixture for a reactor system

Patent metadata

Field	Value
Publication number	US-11972969-B2
Application number	US-202318130543-A
Country	US
Kind code	B2
Filing date	Apr 4, 2023
Priority date	May 13, 2020
Publication date	Apr 30, 2024
Grant date	Apr 30, 2024

Abstract

A laser alignment fixture for a reactor system may be used to align components of the reactor system to allow for a uniform deposition of a thin film onto a substrate. The laser alignment fixture may include: a lid assembly; and a plurality of laser and sensor assemblies. The laser alignment fixture may align at least: a flow control ring, a susceptor, and a side wall of the reactor system.

First claim

What is claimed is:

1. A laser alignment fixture for a reactor system, comprising:
a lid assembly configured to be placed on the reactor system, the lid assembly comprising at least one viewing window;
a plurality of laser and sensor assemblies disposed on the lid assembly;
wherein the reactor system comprises:
a susceptor; and
a susceptor positioning system; and

wherein the plurality of laser and sensor assemblies shine and sense a light used to determine a position of the susceptor;
wherein the laser alignment fixture is configured to transmit light from a laser of a laser and sensor assembly of the plurality of laser and sensor assemblies to pass through a viewing window of the at least one viewing window and reflect back from at least one component of the reactor system through the viewing window of the at least one viewing window to the laser and sensor assembly; and
wherein the light is used to adjust the position of the susceptor by using the susceptor positioning system.

2. The laser alignment fixture of claim 1 , wherein the lid assembly comprises at least one of: titanium, aluminum, stainless steel, or Hastelloy.

3. The laser alignment fixture of claim 1 , wherein the viewing window comprises a transparent material.

4. The laser alignment fixture of claim 3 , wherein the viewing window comprises quartz.

5. The laser alignment fixture of claim 1 , wherein the plurality of laser and sensor assemblies are disposed equidistantly around the susceptor.

6. The laser alignment fixture of claim 5 , wherein the plurality of laser and sensor assemblies consist of three laser and sensor assemblies, wherein each of the plurality of laser and sensor assemblies are disposed above an edge of the susceptor, and disposed 120 degrees around the susceptor from each other.

7. A laser alignment fixture for a reactor system, comprising:
a lid assembly configured to be placed on the reactor system, the lid assembly comprising at least one viewing window, and the reactor system comprising a reactor component; and
a plurality of laser and sensor assemblies disposed on the lid assembly;
wherein the plurality of laser and sensor assemblies shine and sense a light used to determine a position of the reactor component; and
wherein the laser alignment fixture is configured to transmit light from a laser of a laser and sensor assembly of the plurality of laser and sensor assemblies to pass through a viewing window of the at least one viewing window and reflect back from at least one component of the reactor system through the viewing window of the at least one viewing window to the laser and sensor assembly.

8. The laser alignment fixture of claim 7 , wherein the reactor further comprises a component positioning system, and wherein the light is used to adjust the position of the reactor component by using the component positioning system.

9. The laser alignment fixture of claim 8 , further comprising a controller configured to receive a signal from the plurality of laser and sensor assemblies.

10. The laser alignment fixture of claim 9 , wherein the controller provides an instruction to the component positioning system to move the reactor component.

11. The laser alignment fixture of claim 9 , wherein the controller comprises a human operator.

12. The laser alignment fixture of claim 9 , wherein the controller comprises a computer.

13. The laser alignment fixture of claim 7 , wherein the viewing window comprises a transparent material.

14. The laser alignment fixture of claim 7 , wherein the lid assembly comprises at least one of: titanium, aluminum, stainless steel, or Hastelloy.

15. A laser alignment fixture for a reactor system, comprising:
a lid assembly configured to be placed on the reactor system, the lid assembly comprising a viewing window, and the reactor system comprising a reactor component; and
a laser and sensor assembly disposed on the lid assembly;
wherein the laser and sensor assembly shines and senses a light used to determine a position of the reactor component; and
wherein the laser alignment fixture is configured to transmit light from a laser of the laser and sensor assembly to pass through the viewing window and reflect back from at least one component of the reactor system through the viewing window to the laser and sensor assembly.

16. The laser alignment fixture of claim 15 , wherein the reactor further comprises a component positioning system, and wherein the light is used to adjust the position of the reactor component by using the component positioning system.

17. The laser alignment fixture of claim 16 , further comprising a controller configured to receive a signal from the laser and sensor assembly.

18. The laser alignment fixture of claim 17 , wherein the controller provides an instruction to the component positioning system to move the reactor component.

19. The laser alignment fixture of claim 15 , wherein the lid assembly comprises at least one of: titanium, aluminum, stainless steel, or Hastelloy.

20. The laser alignment fixture of claim 15 , wherein the viewing window comprises a transparent material.

Assignees

• Asm Ip Holding Bv

Inventors

• Ganguli Surojit
• Dunn Todd Robert
• Kimtee Ankit

Classifications

• H10P72/53 Primary

  using optical controlling means · CPC title

• H10P72/04

  Apparatus for manufacture or treatment · CPC title

• H10D62/118

  Nanostructure semiconductor bodies · CPC title

• H10P72/7624

  characterised by the mechanical construction of the susceptor, stage or support · CPC title

• H10P72/0606

  Position monitoring, e.g. misposition detection or presence detection · CPC title