Organic polymer film and manufacturing method thereof

Patent metadata

Field	Value
Publication number	US-11969752-B2
Application number	US-202117555289-A
Country	US
Kind code	B2
Filing date	Dec 17, 2021
Priority date	Dec 19, 2020
Publication date	Apr 30, 2024
Grant date	Apr 30, 2024

Abstract

The present invention discloses an organic polymer film and a manufacturing method thereof. The organic polymer film is mainly manufactured by the following steps. Firstly, the step (A) provides a xylene precursor and a substrate, and the step (B) places the substrate inside of a plasma equipment. After that, the step (C) evacuates the plasma equipment while introducing a carrier gas which carries vapor of the xylene precursor, and the step (D) turns on a pulse power supply system of the plasma equipment, generating a short pulse for plasma ignition. Finally, the step (E) forms the organic polymer film on the substrate. In the aforementioned steps, the frequency of the short pulse plasma is between 1 Hz˜10,000 Hz, and the pulse period of the short pulse plasma is between 1 μs˜60 μs.

First claim

What is claimed is:

1. A manufacturing method of an organic polymer film, comprising:
(A) providing a xylene precursor and a substrate;
(B) placing the substrate inside of a plasma equipment;
(C) evacuating the plasma equipment while introducing a carrier gas which carries vapor of the xylene precursor;
(D) turning on a pulse power supply system of the plasma equipment, generating a short pulse for plasma ignition; and
(E) forming the organic polymer film on the substrate;
wherein frequency of the short pulse plasma is between 1 Hz-10,000 Hz;
wherein pulse period of the short pulse plasma is between 1 μs and 60 μs;
wherein the xylene precursor is selected from the group consisting of the 1,2-Bis(trifluoromethyl)benzene, 1,3-Bis(trifluoromethyl)benzene, and 1,4-Bis(trifluoromethyl)benzene.

2. The manufacturing method of the organic polymer film as claimed in claim 1 , wherein the substrate is polymer material or metal.

3. The manufacturing method of the organic polymer film as claimed in claim 1 , wherein the plasma equipment of the step (B) comprises:
a chamber;
a gas inlet, connected with the chamber;
a gas outlet, connected with the chamber; and
wherein the pulse power supply system comprises:
an upper electrode and a lower electrode;
wherein the upper electrode and the lower electrode are configured inside the chamber;
wherein the substrate is placed onto the lower electrode.

4. The manufacturing method of the organic polymer film as claimed in claim 1 , wherein the carrier gas is Ar.

5. The manufacturing method of the organic polymer film as claimed in claim 1 , wherein the frequency of the short pulse plasma is 1,000 Hz.

6. The manufacturing method of the organic polymer film as claimed in claim 1 , wherein the xylene precursor is the 1,4-Bis(trifluoromethyl)benzene.

7. The manufacturing method of the organic polymer film as claimed in claim 6 , wherein the pulse period of the short pulse plasma is 20 μs.

8. The manufacturing method of the organic polymer film as claimed in claim 1 , wherein power of the short pulse plasma is 50 W.

Assignees

• Univ Feng Chia

Inventors

• Hsieh Ping-Yen
• Chang Xuan-Xuan
• Chen Ying-Hung
• Ho Chu-Liang

Classifications

• B05D1/62 Primary

  Plasma-deposition of organic layers (plasma deposition in general C23C14/00, C23C16/00) · CPC title

• C08G61/025

  Polyxylylenes · CPC title

• H01J37/32027

  DC powered · CPC title

• H01J37/32137

  controlling of the discharge by modulation of energy · CPC title

• H01J37/32449 Primary

  Gas control, e.g. control of the gas flow · CPC title