Laser apparatus and manufacturing method of display apparatus using the same

Patent metadata

Field	Value
Publication number	US-11961851-B2
Application number	US-202217672574-A
Country	US
Kind code	B2
Filing date	Feb 15, 2022
Priority date	Apr 12, 2019
Publication date	Apr 16, 2024
Grant date	Apr 16, 2024

Abstract

A laser apparatus includes a laser generator configured to generate a first laser beam proceeding along a first direction, and an inversion module configured to convert the first laser beam to a second laser beam proceeding along the first direction, the inversion module including a splitter configured to form a reflected laser beam by partially reflecting the first laser beam, and a transmitted laser beam by partially transmitting the first laser beam, and a prism configured to reflect the reflected laser beam.

First claim

What is claimed is:

1. A manufacturing method of a display apparatus, the method comprising:
forming an amorphous silicon thin film on a substrate;
crystallizing the amorphous silicon thin film into a polycrystalline silicon thin film by irradiating a laser beam onto the amorphous silicon thin film using a laser apparatus; and
forming an insulating layer,
wherein the laser apparatus comprises:
a laser generator configured to generate a first laser beam proceeding along a first direction from the laser generator to a target; and
an inversion module configured to convert the first laser beam to a second laser beam proceeding along the first direction toward the target, the inversion module comprising:
a splitter between the laser generator and the target in the first direction, configured to form a reflected laser beam by partially reflecting the first laser beam, and configured to form a transmitted laser beam by partially transmitting the first laser beam; and
a prism configured to reflect the reflected laser beam.

2. The manufacturing method of claim 1 , wherein, in crystallizing the amorphous silicon thin film, the second laser beam is formed by mixing the transmitted laser beam and the reflected laser beam from the inversion module.

3. The manufacturing method of claim 1 , wherein the inversion module of the laser apparatus further comprises:
a first mirror that is configured to reflect the reflected laser beam that is reflected from the splitter, and to provide the reflected laser beam to the prism; and
a second mirror that is configured to reflect the reflected laser beam that is reflected from the prism, and to provide the reflected laser beam to the splitter.

4. A manufacturing method of a display apparatus, the method comprising:
forming an amorphous silicon thin film on a substrate;
crystallizing the amorphous silicon thin film into a polycrystalline silicon thin film by irradiating a laser beam onto the amorphous silicon thin film using a laser apparatus; and
forming an insulating layer,
wherein the laser apparatus comprises:
a laser generator configured to generate a first laser beam proceeding along a first direction;
an inversion module configured to convert the first laser beam to a second laser beam proceeding along the first direction, the inversion module comprising:
a splitter configured to form a reflected laser beam by partially reflecting the first laser beam, and a transmitted laser beam by partially transmitting the first laser beam; and
a prism configured to reflect the reflected laser beam,

a first path converter that is configured to receive the second laser beam emitted from the inversion module, and to emit a third laser beam traveling in a third direction that is perpendicular to the first direction; and
a second path converter that is configured to receive the third laser beam, and to emit a fourth laser beam traveling in a direction that is opposite to the first direction.

5. The manufacturing method of claim 4 , wherein the laser apparatus further comprises a laser optical system that is configured to receive the fourth laser beam, and to emit a fifth laser beam in a form of a linear laser beam.

6. The manufacturing method of claim 5 , wherein the fifth laser beam travels in the third direction, and has a linear laser beam shape in a second direction that is perpendicular to the first and third directions.

7. The manufacturing method of claim 1 , wherein the splitter of the inversion module is configured to transmit ⅓ of the laser beam and to reflect ⅔ of the laser beam.

8. The manufacturing method of claim 1 , wherein the reflected laser beam is both upside down and left and right inverted with respect to the transmitted laser beam.

Assignees

• Samsung Display Co Ltd

Inventors

• Lee Dong-Min
• Kim Ji-Hwan
• Seo Jongoh
• So Byung Soo
• Lee Dong-Sung
• Choi Jonghoon

Classifications

• H10P14/3411

  Silicon, silicon germanium or germanium · CPC title

• H10P14/3808 Primary

  using laser beams · CPC title

• H10P72/04

  Apparatus for manufacture or treatment · CPC title

• H10D86/0227 Primary

  using structural arrangements to control crystal growth, e.g. placement of grain filters · CPC title

• H01L27/1281 Primary

  Electricity · mapped topic