Chemical liquid purification method and chemical liquid

Patent metadata

Field	Value
Publication number	US-11958005-B2
Application number	US-202217957408-A
Country	US
Kind code	B2
Filing date	Sep 30, 2022
Priority date	Aug 31, 2017
Publication date	Apr 16, 2024
Grant date	Apr 16, 2024

Abstract

An object of the present invention is to provide a chemical liquid purification method which makes it possible to obtain a chemical liquid having excellent defect inhibition performance. Another object of the present invention is to provide a chemical liquid. The chemical liquid purification method according to an embodiment of the present invention is a chemical liquid purification method including obtaining a chemical liquid by purifying a substance to be purified containing an organic solvent, in which a content of the stabilizer in the substance to be purified with respect to the total mass of the substance to be purified is equal to or greater than 0.1 mass ppm and less than 100 mass ppm.

First claim

What is claimed is:

1. A chemical liquid comprising:
an organic solvent;
a stabilizer;
at least one kind of metal ions selected from a group consisting of Fe, Cr, Pb, and Ni, and
at least one kind of metal particles selected from a group consisting of Fe, Cr, Pb, and Ni,
wherein a content of the stabilizer with respect to a total mass of the chemical liquid is 0.1 to 50 mass ppm,
in a case where the chemical liquid contains one kind of the at least one kind of metal ions, a content of the at least one kind of metal ions with respect to the total mass of the chemical liquid is equal to or smaller than 100 mass ppt,
in a case where the chemical liquid contains two or more kinds of the at least one kind of metal ions, a content of each of the at least one kind of metal ions with respect to the total mass of the chemical liquid is equal to or smaller than 100 mass ppt,
in a case where the chemical liquid contains one kind of the at least one kind of metal particles, a content of the at least one kind of metal particles with respect to the total mass of the chemical liquid is equal to or smaller than 100 mass ppt, and
in a case where the chemical liquid contains two or more kinds of the at least one kind of metal particles, a content of each of the at least one kind of metal particles with respect to the total mass of the chemical liquid is equal to or smaller than 100 mass ppt.

2. A chemical liquid according to claim 1 ,
wherein the chemical liquid comprises Pb ions and Pb particles.

3. A chemical liquid according to claim 1 ,
wherein a content of the organic solvent with respect to the total mass of the chemical liquid is equal to or greater than 99.0%.

4. A chemical liquid according to claim 1 ,
wherein the stabilizer is at least one compound selected from a group consisting of a compound represented by Formula (1), and a compound represented by Formula (2),

in Formula (1), m represents an integer of 1 to 4, and n represents an integer of 1 to 6,
in a case where n is 1, L 1 represents a hydrogen atom, a hydroxyl group, or a monovalent organic group, R 1 represents a hydrogen atom, R 2 represents a hydrogen atom, a hydroxyl group, or a monovalent organic group, and a plurality of R 2 's may be the same as or different from each other,
in a case where n is 2 to 6, L 1 represents an n-valent linking group, R 1 represents a hydrogen atom or a monovalent organic group, although a plurality of R 1 's may be the same as or different from each other, at least one of R 1 's represents a hydrogen atom, R 2 represents a hydrogen atom, a hydroxyl group, or a monovalent organic group, and a plurality of R 2 's may be the same as or different from each other, and
in Formula (2), L 3 represents a single bond or a divalent linking group, R 3 represents a monovalent organic group, and a plurality of L 3 's and R 3 's may be the same as or different from each other respectively.

5. A chemical liquid according to claim 1 ,
wherein the stabilizer is at least one compound selected from a group consisting of dibutylhydroxytoluene, amylene, hydroquinone, dilauryl thiodipropionate, distearyl thiodipropionate, dimyristyl thiodipropionate, 4,4′-butylidenebis-(6-t-butyl-3-methylphenol), and 2,2′-methylenebis-(4-ethyl-6-t-butylphenol).

6. A chemical liquid according to claim 1 ,
wherein the organic solvent is at least one compound selected from a group consisting of propylene glycol monomethyl ether, propylene glycol monoethyl ether, propylene glycol monopropyl ether, propylene glycol monomethyl ether acetate, ethyl lactate, methoxymethyl propionate, cyclopentanone, cyclohexanone, γ-butyrolactone, diisoamyl ether, butyl acetate, isoamyl acetate, hexane, 2-heptanone, and isopropanol.

Assignees

• Fujifilm Corp

Inventors

• Kamimura Tetsuya
• Yoshidome Masahiro
• KAWADA Yukihisa

Classifications

• H10P52/00

  Grinding, lapping or polishing of wafers, substrates or parts of devices · CPC title

• B01D37/04 Primary

  Controlling the filtration · CPC title

• B01D19/0404

  characterised by the nature of the chemical substance · CPC title

• B01D27/00

  Cartridge filters of the throw-away type · CPC title

• B01D39/1676

  of synthetic origin · CPC title