VCSEL binning for optical interconnects

Patent metadata

Field	Value
Publication number	US-11955778-B2
Application number	US-202117156970-A
Country	US
Kind code	B2
Filing date	Jan 25, 2021
Priority date	Jan 25, 2021
Publication date	Apr 9, 2024
Grant date	Apr 9, 2024

Abstract

A method and system for large scale Vertical-Cavity Surface-Emitting Laser (VCSEL) binning from wafers to be compatible with a Clock-Data Recovery Unit (CDRU) and/or a VCSEL driver are provided. An illustrative method of binning is provided that includes: for at least a portion of VCSELs on a wafer, measuring a set of representative parameters of the VCSELs, of predetermined DC or small-signal values, and sorting the measured VCSELs into clusters according to the measured set of representative parameters of the VCSELs; further sorting the clusters into sub-groups that comply with specifications of the VCSEL driver; and providing a feedback signal to the CDRU for equalizing control signals provided to the VCSEL driver.

First claim

What is claimed is:

1. A method for large scale Vertical-Cavity Surface-Emitting Laser (VCSEL) binning, comprising:
for at least a portion of VCSELs on a wafer, measuring a set of representative parameters of the VCSELs, of predetermined DC or small-signal values, and sorting the measured VCSELs into clusters according to the measured set of representative parameters of the VCSELs;
matching between an input impedance and an output impedance of the VCSELs and a VCSEL driver;
further sorting the clusters into sub-groups based on the matching to that comply with specifications of the VCSEL driver; and
providing a feedback signal to a Clock Data Recovery Unit (CDRU) for equalizing control signals provided to the VCSEL driver.

2. The method of claim 1 , wherein the CDRU, the VCSEL driver, and a VCSEL are configured to operate at a bit rate that is at least 50Gbaud.

3. The method of claim 1 , wherein the VCSEL driver is configured to meet an optical performance requirement that includes modulation orders of PAM4, PAM8 or PAM16.

4. The method of claim 1 , wherein the set of representative parameters of the VCSELs are selected from the group of: threshold current (Ith); Slope Efficiency (SE); Optical power L at operation current (L_Iop); spectral bandwidth (WL_SBW); VCSEL forward bias at operation current (Vf_Iop); VCSEL differential resistance (Rs_Iop); VCSEL input impedance (s 11 ); and VCSEL optical bandwidth, damping factor and overshoots (s 21 ).

5. The method of claim 1 , wherein a correlation between two or more parameters from the set of representative parameters of the VCSELs is expressed by a correlation matrix, which provides a correlation coefficient to express the correlation between the two or more parameters.

6. The method of claim 5 , wherein the correlation coefficient is calculated using the Pearson correlation.

7. The method of claim 1 , further comprising:
matching between an input impedance and an output impedance of the CDRU and the VCSEL driver, thereby reducing reflections and improving link performance.

8. The method of claim 1 , wherein providing the feedback signal to the CDRU for equalizing the control signals provided to the VCSEL driver is performed using one or more of: look up tables; linear algebra related algorithms; artificial intelligence algorithms; machine learning algorithms; and deep learning algorithms.

9. The method of claim 1 , further comprising:
performing preliminary screening of clusters of VCSELs by:
calculating a correlation between selected pairs of representative parameters;
predicting a trend for an aperture diameter and/or a mirror reflectivity of the VCSELs, based on the calculated correlation;
screening clusters of VCSELs on the wafer, having an aperture diameter that meets a first condition and/or mirror reflectivity that meets a second condition; and
associating screened clusters of VCSELs to optical performance requirements from each VCSEL in a screened cluster, such that each screened cluster represents a grade of certain probability to comply with corresponding optical performance requirements.

10. The method of claim 9 , wherein the feedback signal is provided to the CDRU by using a look up table based on the preliminary screening of clusters of VCSELs.

11. A method, comprising:
for at least a portion of Vertical-Cavity Surface-Emitting Lasers (VCSELs) on a wafer, measuring a set of representative parameters of the VCSELs, of predetermined DC or small-signal values;
measuring a set of representative performance parameters of an optical transmitter that comprises a VCSEL from the at least a portion of VCSELs, wherein the VCSEL is driven by a driving chain of a Clock Data Recovery Unit (CDRU) and a VCSEL driver;
matching between an input impedance and an output impedance of the VCELs and the VCEL driver;
determining a correlation between the measured set of representative parameters of the VCSELs and the set of representative performance parameters of the optical transmitter;
sorting at least some VCSELs on the wafer into clusters according to electrical characteristics of the VCSEL driver based on the matching, such that each cluster comprises a number of VCSELs with a similar probability of complying with the set of representative performance parameters of the optical transmitter while being driven by the driver; and
providing a feedback signal to the CDRU for equalizing control signals provided to the driver.

12. The method of claim 11 , wherein at least one optical performance requirement from the set of representative performance parameters of the optical transmitter comprises at least one of: expected data bit rate; expected bandwidth; expected modulation order; damping factor of relaxation oscillations; overshoots response; settling time; timing jitter; Bit Error Rate (BER); and quality of eye diagram during modulation.

13. The method of claim 11 , at least one optical performance requirement from the set of representative performance parameters of the optical transmitter comprises a modulation requirement.

14. The method of claim 13 , wherein the modulation requirement comprises at least one of an amplitude modulation requirement, a phase modulation requirement, and a polybinary modulation requirement.

15. The method of claim 11 , further comprising:
matching between an input impedance and an output impedance of the CDRU and the VCSEL driver, thereby reducing reflections and improving link performance.

16. The method of claim 11 , wherein providing the feedback signal to the CDRU for equalizing the control signals provided to the driver is performed using one or more of: look up tables; linear algebra related algorithms; artificial intelligence algorithms; machine learning algorithms; and deep learning algorithms.

17. The method of claim 11 , further comprising:
performing preliminary screening of clusters of VCSELs by:
calculating a correlation between selected pairs of representative parameters;
predicting a trend for an aperture diameter and/or a mirror reflectivity of the VCSELs, based on the calculated correlation;
screening clusters of VCSELs on the wafer, having an aperture diameter that meets a first condition and/or mirror reflectivity that meets a second condition; and
associating screened clusters of VCSELs to optical performance requirements from each VCSEL in a screened cluster, such that each screened cluster represents a grade of certain probability to comply with corresponding optical performance requirements.

18. The method of claim 17 , wherein the feedback signal is provided to the CDRU by using a look up table based on the preliminary screening of clusters of VCSELs.

19. A system for Vertical-Cavity Surface-Emitting Lasers (VCSELs) binning, the system comprising:
a VCSEL stimulator that applies a stimulus to at least some VCSELs on a wafer;
a VCSEL measurement unit that measures two or more VCSEL parameters responsive to the stimulus;
a processor; and
memory coupled with the processor that comprises instructions which, when executed by the processor, enable the processor to:
for the at least some VCSELs, measure a set of representative parameters of the VCSELs and sort the measured VCSELs into clusters according to the measured set of representative parameters of the VCSELs;
match between an input impedance and an output impedance of the VCSELs and a VCSEL driver;
sort the clusters into sub-groups based on the matching to that comply with specifications of the VCSEL driver; and
provide a feedback signal to a Clock Data Recove

Assignees

• Mellanox Technologies Ltd

Inventors

• Septon Tali
• Kalifa Itshak
• Mentovich Elad
• Galanty Matan
• Gridish Yaakov
• Shumacher Hanan
• Balakhovski Vadim
• Olmos Juan Jose Vegas

Classifications

• H01S5/423 Primary

  having a vertical cavity · CPC title

• H01S5/0014

  Measuring characteristics or properties thereof (measuring techniques per se G01J, G01K, G01N, G01R) · CPC title

• H01S5/0042 Primary

  On wafer testing, e.g. lasers are tested before separating wafer into chips · CPC title

• H01S5/0261

  Non-optical elements, e.g. laser driver components, heaters (H01S5/0265 takes precedence) · CPC title

• H01S5/18302

  comprising an integrated optical modulator · CPC title