Fast Lissajous lock control and synchronization of scanning axes of microelectromechanical system

Patent metadata

Field	Value
Publication number	US-11953676-B2
Application number	US-202217823404-A
Country	US
Kind code	B2
Filing date	Aug 30, 2022
Priority date	Aug 30, 2022
Publication date	Apr 9, 2024
Grant date	Apr 9, 2024

Abstract

A method of synchronizing a first oscillation about a first axis with a second oscillation about a second axis includes: generating a first position signal that indicates a position of the first oscillation about the first axis; generating a second position signal that indicates a position of the second oscillation about the first axis; determining a phase difference between the first and the second position signals; comparing the phase difference to a threshold value to generate a comparison result; generating a first reference signal having a first frequency and a second reference signal having a second frequency; synchronizing the first oscillation to the first frequency and synchronizing the second oscillation to the second frequency; monitoring the comparison result; and synchronously triggering a start of the first reference signal and the second reference signal responsive to the comparison result indicating that the phase difference is less than the threshold value.

First claim

What is claimed is:

1. An oscillator system, comprising:
an oscillator structure configured to oscillate about a first axis according to a first oscillation and oscillate about a second axis according to a second oscillation;
a first driver configured to generate a first drive signal to drive the first oscillation of the oscillator structure, monitor a first angular trajectory of the oscillator structure about the first axis, and generate a first position signal that indicates a position of the oscillator structure about the first axis based on the monitored first angular trajectory;
a second driver configured generate a second drive signal to drive the second oscillation of the oscillator structure, monitor a second angular trajectory of the oscillator structure about the second axis, and generate a second position signal that indicates a position of the oscillator structure about the second axis based on the monitored second angular trajectory;
a phase error detector configured to determine a phase difference between the first position signal and the second position signal;
a comparator circuit configured to compare the phase difference to a threshold value and generate a comparison result;
a reference signal generator configured to generate a first reference signal having a first frequency and a second reference signal having a second frequency;
a synchronization circuit configured to synchronize the first oscillation to the first frequency and synchronize the second oscillation to the second frequency according to the first reference signal and the second reference signal, respectively; and
a synchronization controller configured to monitor the comparison result and synchronously trigger a start of the first reference signal and the second reference signal in response to the comparison result indicating that the phase difference is less than the threshold value.

2. The oscillator system of claim 1 , wherein:
the first driver is configured to detect first zero-crossing events of the oscillator structure at which an oscillation angle of the oscillator structure about the first axis is detected to be at zero, and generate the first position signal that indicates each of the detected first zero-crossing events with a first pulse transition or a second pulse transition, and
the second driver is configured to detect second zero-crossing events of the oscillator structure at which an oscillation angle of oscillator structure about the second axis is detected to be at zero, and generate the second position signal that indicates each of the detected second zero-crossing events with a third pulse transition or a fourth pulse transition.

3. The oscillator system of claim 1 , wherein, following the start of the first reference signal and the second reference signal, the first driver is configured to regulate the first drive signal to drive the first oscillation at the first frequency and the second driver is configured to regulate the second drive signal to drive the second oscillation at the second frequency.

4. The oscillator system of claim 3 , wherein:
the synchronization circuit is configured to receive the first position signal and the first reference signal, and generate a first synchronization control signal based on a difference between the first position signal and the first reference signal,
the synchronization circuit is configured to receive the second position signal and the second reference signal, and generate a second synchronization control signal based on a difference between the second position signal and the second reference signal,
the first driver is configured to receive the first synchronization control signal and regulate the first drive signal to drive the first oscillation at the first frequency based on the first synchronization control signal, and
the second driver is configured to receive the second synchronization control signal and regulate the second drive signal to drive the second oscillation at the second frequency based on the second synchronization control signal.

5. The oscillator system of claim 1 , wherein the synchronization controller is configured to synchronously trigger a first transition edge of the first reference signal and a second transition edge of the second reference signal in response to the comparison result indicating that the phase difference is less than the threshold value, wherein the first transition edge and the second transition edge are either a rising transition edge or a falling transition edge.

6. The oscillator system of claim 1 , wherein the synchronization controller is configured to synchronously trigger a first transition edge of the first reference signal and a second transition edge of the second reference signal in response to the comparison result indicating that the phase difference is less than the threshold value such that the first reference signal and the second reference signal start in-phase.

7. The oscillator system of claim 1 , wherein the first frequency and the second frequency are different and have a fixed frequency difference therebetween.

8. The oscillator system of claim 1 , wherein the synchronization controller is configured to trigger a start of a Lissajous frame in response to the comparison result indicating that the phase difference is less than the threshold value.

9. The oscillator system of claim 8 , wherein the start of the Lissajous frame is synchronous with the start of the first reference signal and the second reference signal.

10. The oscillator system of claim 1 , wherein the reference signal generator comprises:
a common clock source configured to generate a common clock signal;
a first divider configured to divide the common clock signal by a first integer to generate a first reference clock signal having the first frequency;
a second divider configured to divide the common clock signal by a second integer to generate a second reference clock signal having the second frequency;
a first counter configured to trigger signal pulses of the first reference signal according to the first reference clock signal; and
a second counter configured to trigger signal pulses of the second reference signal according to the second reference clock signal,
wherein the synchronization controller is configured to synchronously initialize or reset the first counter and the second counter in response to the comparison result indicating that the phase difference is less than the threshold value in order to synchronously trigger the start of the first reference signal and the second reference signal.

11. The oscillator system of claim 1 , further comprising:
a frame start detector configured to generate a frame start detection signal in response to the comparison result indicating that the phase difference is less than the threshold value, wherein the frame start detection signal is triggered synchronously with the start of the first reference signal and the second reference signal.

12. The oscillator system of claim 1 , further comprising:
a Lissajous lock detector configured to evaluate the phase difference between the first position signal and the second position signal, and generate a Lissajous lock signal in response to the comparison result indicating that the phase difference is less than the threshold value.

13. The oscillator system of claim 1 , wherein the synchronization controller is configured to monitor the comparison result during a start-up phase of the oscillator system, wherein an end of the start-up phase is demarked by a first instance the comparison result indicates that the phase difference is less than the threshold value, wherein a monito

Assignees

• Infineon Technologies Ag

Inventors

• Druml Norbert
• Garcia Izquierdo Alberto

Classifications

• H03L7/12

  using a scanning signal · CPC title

• G02B26/127

  Adaptive control of the scanning light beam, e.g. using the feedback from one or more detectors (G02B27/0031 takes precedence) · CPC title

• G02B26/10 Primary

  Scanning systems · CPC title

• G02B26/101 Primary

  with both horizontal and vertical deflecting means, e.g. raster or XY scanners (colour television using laser beams scanning a display screen H04N9/3129) · CPC title

• G01S7/4817

  relating to scanning · CPC title