Shaping system including an evaporation cover, shaping process, and method of manufacturing an article

Patent metadata

Field	Value
Publication number	US-11951660-B2
Application number	US-202117498568-A
Country	US
Kind code	B2
Filing date	Oct 11, 2021
Priority date	Oct 11, 2021
Publication date	Apr 9, 2024
Grant date	Apr 9, 2024

Abstract

A shaping system comprises a dispensing station configured to dispense formable material on a substrate, a shaping station configured to contact the dispensed formable material on the substrate with a plate, a positioning system configured to move the substrate having the dispensed formable material from the dispensing system to the shaping station, and a cover having one or more walls. While the substrate having the dispensed formable material is moved by the positioning system from the dispensing station to the shaping station, the cover is positioned to enclose the substrate and the dispensed formable material such that a ratio of a diameter of the substrate to a distance between the cover and the substrate to 80:1 to 30:1.

First claim

What is claimed is:

1. A shaping system comprising:
a dispensing station including:
a first substrate chuck configured to hold a substrate; and
a dispenser configured to dispense formable material on the substrate while the first substrate chuck is holding the substrate;

a shaping station including:
a second substrate chuck configured to hold the substrate; and
a plate chuck configured to hold a plate and configured to contact the dispensed formable material on the substrate with the plate while the plate chuck is holding the plate;

a positioning system configured to move the substrate having the dispensed formable material from the dispensing system to the shaping station; and
a cover having one or more walls,
wherein, while the substrate having the dispensed formable material is moved by the positioning system from the dispensing station to the shaping station, the cover is positioned to enclose the substrate and the dispensed formable material such that a ratio of a diameter of the substrate to a distance between the cover and the substrate is 80:1 to 30:1.

2. The shaping system of claim 1 , wherein the cover comprises an enclosed top end and an open bottom end.

3. The shaping system of claim 2 , wherein the one or more sidewalls extends from the enclosed top end.

4. The shaping system of claim 2 , wherein the positioning system is configured to enclose the substrate and the formable material with the cover at the dispensing station by lowering the cover until the substrate and formable material passes through the open bottom end.

5. The shaping system of claim 2 , wherein positioning system is configured to uncover the substrate and the formable material at the shaping station by raising the cover until the substrate and formable material passes through the open bottom end.

6. The shaping system of claim 2 , further comprising a porous pad disposed between the enclosed top end and the dispensed formable material while the cover encloses the substrate and the dispensed formable material.

7. The shaping system of claim 6 , wherein the porous pad is disposed within the cover.

8. The shaping system of claim 6 , wherein the porous pad comprises a material selected from the group consisting of stainless steel, titanium, nickel, a ceramic, polyether ether ketone, polyoxymethylene, polytetrafluoroethylene, and perfluoroalkoxy alkane.

9. The shaping system of claim 1 , wherein the cover has a circular cross section.

10. The shaping system of claim 1 , further comprising a supply line having one end in communication with a fluid supply and another end in communication with the cover.

11. The shaping system of claim 10 , wherein the fluid supply contains liquid components of the formable material, wherein the formable material contains solid components and the liquid components.

12. The shaping system of claim 1 , wherein the distance between the cover and the substrate is 10 mm or less.

13. The shaping system of claim 1 , wherein the positioning of the cover to enclose the substrate and the dispensed formable material is performed by the positioning system.

14. The shaping system of claim 1 , wherein the positioning system comprises a hand configured to carry the substrate.

15. The shaping system of claim 1 , wherein the distance between the cover and the substrate is 5 mm or less.

16. The shaping system of claim 1 , wherein the plate is a superstrate.

17. The shaping system of claim 1 , wherein the shaping station is a planarizing station.

18. A shaping system comprising:
a dispensing station including:
a first substrate chuck configured to hold a substrate; and
a dispenser configured to dispense formable material on the substrate while the first substrate chuck is holding the substrate;

a shaping station including:
a second substrate chuck configured to hold the substrate; and
a plate chuck configured to hold a plate and configured to contact the dispensed formable material on the substrate with the plate while the plate chuck is holding the plate;

a positioning system configured to move the substrate having the dispensed formable material from the dispensing system to the shaping station;
a cover positioned to enclose the substrate and the dispensed formable material while the substrate having the dispensed formable material is being moved by the positioning system from the dispensing system to the shaping station; and
a porous pad disposed inside the cover while the cover encloses the substrate and the dispensed formable material.

19. A shaping method, comprising:
dispensing formable material on a substrate at a first location while the substrate is held by a first substrate chuck;
moving the substrate having the dispensed formable material from the first location to a second location; and
while a plate is held by a plate chuck and while the substrate is held by a second substrate chuck at the second location, contacting the dispensed formable material on the substrate with the plate to form a film layer,
wherein, while the substrate having the dispensed formable material is moved from the first location to the second location, a cover having one or more walls is positioned to enclose the substrate and the dispensed formable material such that a ratio of a diameter of the substrate to a distance between the cover and the substrate is 80:1 to 30:1.

20. A method of manufacturing an article, comprising:
dispensing formable material on a substrate at a first location while the substrate is held by a first substrate chuck;
moving the substrate having the dispensed formable material from the first location to a second location;
while a plate is held by a plate chuck and while the substrate is held by a second substrate chuck at the second location, contacting the dispensed formable material on the substrate with a plate at the second location to form a film layer;
curing the film layer to form a cured film layer; and
processing the cured film layer to make the article,

wherein, while the substrate having the dispensed formable material is moved from the first location to the second location, a cover having one or more walls is positioned to enclose the substrate and the dispensed formable material such that a ratio of a diameter of the substrate to a distance between the cover and the substrate is 80:1 to 30:1.

21. The shaping system of claim 1 , wherein the positioning system is configured to move the substrate having the dispensed formable material from the dispensing system to the shaping station while the plate is held by the plate chuck at the shaping station.

22. The shaping system of claim 1 ,
wherein the positioning system is configured to remove the cover from enclosing the formable material at the shaping station, and
wherein the shaping station is configured to contact the dispensed formable material on the substrate with the plate after the positioning system has removed the cover from enclosing the formable material at the shaping station.

23. The shaping system of claim 1 ,
wherein the positioning system includes a hand and an arm, and
wherein the hand and the cover are couple to the arm.

24. The shaping system of claim 1 ,
wherein the dispensing system includes a lifting mechanism configured to lift the substrate from the first substrate chuck after the dispenser dispenses the formable material on the substrate.

Assignees

• Canon Kk

Inventors

• Shackleton Steven C
• Aghili Alireza
• Ye Zhengmao

Classifications

• B29C43/10 Primary

  Isostatic pressing, i.e. using non-rigid pressure-exerting members against rigid parts or dies · CPC title

• B29C43/021

  characterised by the shape of the surface · CPC title

• B29C43/18

  incorporating preformed parts or layers, e.g. compression moulding around inserts or for coating articles {(B29C43/206 takes precedence)} · CPC title

• B29C43/203

  Making multilayered articles · CPC title

• B29C43/34

  Feeding the material to the mould or the compression means {(B29C43/085 takes precedence)} · CPC title