Deposition mask, method of manufacturing the same, and method of manufacturing display panel

Patent metadata

Field	Value
Publication number	US-11950489-B2
Application number	US-202117326194-A
Country	US
Kind code	B2
Filing date	May 20, 2021
Priority date	Sep 24, 2020
Publication date	Apr 2, 2024
Grant date	Apr 2, 2024

Abstract

A deposition mask for manufacturing a display panel includes a metallic base having a thickness of about 50 micrometers to about 200 micrometers and a plurality of openings defined therein, wherein at least some of the openings include a first opening having a first width and a second opening having a second width smaller than the first width respectively defined along a thickness direction of the metallic base, and wherein the metallic base includes a first part in which the first opening is defined, and a second part in which the second opening is defined, the second part having a width that increases in a direction downward from a top surface of the metallic base along the thickness direction of the metallic base.

First claim

What is claimed is:

1. A deposition mask for manufacturing a display panel, the deposition mask comprising:
a metallic base having a thickness of about 50 micrometers to about 200 micrometers and a plurality of openings defined therein;
wherein at least some of the plurality of openings include a first opening having a first width and a second opening having a second width smaller than the first width respectively defined along a thickness direction of the metallic base, and
wherein the metallic base includes a first part in which the first opening is defined, and a second part in which the second opening is defined, the second part having a width that increases in a direction downward from a top surface of the metallic base along the thickness direction of the metallic base,
wherein the first part includes a first sub-part disposed on the second part, and a second sub-part disposed under the second part, and the first and second sub-parts have thicknesses that are each about 5% to about 40% of a total thickness of the metallic base.

2. The deposition mask of claim 1 , wherein the metallic base comprises a mask body having invar.

3. The deposition mask of claim 1 , wherein the first part comprises a first side surface defining the first opening and having a rounded shape with a slope that changes in the thickness direction of the metallic base.

4. The deposition mask of claim 1 , wherein the second part comprises a second side surface defining the second opening, and being inclined at a predetermined taper angle.

5. The deposition mask of claim 4 , wherein the taper angle is about 30° to about 70°.

6. The deposition mask of claim 1 , wherein the openings comprise through-parts and the width of each of the plurality of through-parts is about 10 mm to about 400 mm.

7. A method of manufacturing a deposition mask for a display panel, the method comprising:
preparing a base having a thickness of about 50 micrometers to about 200 micrometers;
reducing the thickness of the base by wet-etching at least one surface of the base to form a thickness-reduced section; and
forming a plurality of openings by irradiating, with a laser, a portion of the thickness-reduced section,
wherein
the base has an upper surface and a lower surface facing the upper surface,
the step of reducing the thickness of the base comprises wet-etching both the upper surface and the lower surface, and
the step of forming the plurality of openings comprises irradiating the upper surface with the laser.

8. The method of claim 7 , wherein the openings comprise through-parts, and the step of forming of the plurality of openings comprises forming the through-parts to have a width of about 10 mm to about 400 mm.

9. A method of manufacturing a display panel, the method comprising:
preparing a target substrate;
forming and disposing, on the target substrate, a deposition mask having a base with a thickness and a plurality of openings defined therein;
forming, on the target substrate, a plurality of deposition patterns corresponding to the openings; and
removing the deposition mask,
wherein the forming of the deposition mask comprises:
reducing the thickness of a base by wet-etching at least one surface of the base to form a thickness-reduced section; and
forming a plurality of openings by etching a portion of the thickness-reduced section, and

wherein
the base has an upper surface and a lower surface facing the upper surface,
the step of reducing the thickness of the base comprises wet-etching both the upper surface and the lower surface, and
the step of forming the plurality of openings comprises irradiating the upper surface with the laser.

10. The method of claim 9 , wherein the disposition mask comprises:
a first part in which a first opening is defined; and
a second part in which a second opening is defined, the second part having a width that increases in a direction downward from a top surface of the deposition mask along the thickness direction of the deposition mask.

11. The method of claim 10 , wherein the first part comprises a first side surface defining the first opening and having a rounded shape with a slope that changes in the thickness direction.

12. The method of claim 10 , wherein the second part comprises a second side surface defining the second opening, and being inclined at a predetermined taper angle so that the thickness thereof increases in a direction toward the target substrate.

13. The method of claim 9 , wherein the target substrate comprises a base substrate and a plurality of circuit element layers disposed on the base substrate, and the plurality of deposition patterns are common layers respectively disposed on the plurality of circuit element layers.

14. The method of claim 13 , wherein
the plurality of circuit element layers comprises a first circuit element layer and a second circuit element layer spaced apart from on the first circuit element layer,
the plurality of deposition patterns comprises a first deposition pattern disposed on the first circuit element layer, and a second deposition pattern disposed on the second circuit element layer, and
the first deposition pattern and the second deposition pattern are spaced apart from each other.

Assignees

• Samsung Display Co Ltd

Inventors

• Hwang Kyu Hwan
• Kim Jeongkuk
• Kim Hwi
• Nam Kanghyun
• Park Sangha
• Lee Areum
• Jeong Da-Hee
• Jo Eunbee
• Jin Seungmin
• Hong Jaemin

Classifications

• H10K59/12

  Active-matrix OLED [AMOLED] displays · CPC title

• H10K71/166 Primary

  using selective deposition, e.g. using a mask · CPC title

• C23C14/042 Primary

  using masks · CPC title

• C23C14/24

  Vacuum evaporation · CPC title

• H10K71/00

  Manufacture or treatment specially adapted for the organic devices covered by this subclass · CPC title