Phase modulator device and method

Patent metadata

Field	Value
Publication number	US-11947202-B2
Application number	US-202318295121-A
Country	US
Kind code	B2
Filing date	Apr 3, 2023
Priority date	Aug 19, 2019
Publication date	Apr 2, 2024
Grant date	Apr 2, 2024

Abstract

The present disclosure relates to a method including the following steps: a) forming a waveguide from a first material, the waveguide being configured to guide an optical signal; b) forming a layer made of a second material that is electrically conductive and transparent to a wavelength of the optical signal, steps a) and b) being implemented such that the layer made of the second material is in contact with at least one of the faces of the waveguide, or is separated from the at least one of the faces by a distance of less than half, preferably less than a quarter, of the wavelength of the optical signal. The application further relates to a phase modulator, in particular obtained by such a method.

First claim

What is claimed is:

1. A manufacturing method, comprising:
forming a waveguide from a first material, the waveguide used to guide an optical signal, the waveguide having a first side adjacent to an insulating layer, a second side and a third side perpendicular to the first side, and a fourth side parallel to the first side; and
forming a layer made of a second material, the second material being electrically conductive and transparent to a wavelength of the optical signal, the layer being disposed over the first side, the second side, the third side, and the fourth side of the waveguide, the layer being in direct contact with the first side, the second side, the third side, the fourth side, or a combination thereof.

2. The manufacturing method of claim 1 , wherein forming the waveguide comprises:
depositing a first layer made of the first material on a second layer made of a third material; and
etching the first layer to define the waveguide therein, wherein the first layer is deposited on and in contact with exposed faces of the waveguide.

3. The manufacturing method of claim 2 , further comprising:
depositing the second layer; and
forming electrically conductive vias through the second layer up to portions of the first layer.

4. The manufacturing method of claim 1 , wherein the insulating layer comprises silicon oxide.

5. The manufacturing method of claim 1 , wherein the layer is a first layer, the method further comprising forming a second layer of a thermally and electrically insulating material, wherein the first layer is disposed between the waveguide and the second layer.

6. The manufacturing method of claim 1 , wherein the layer is a first layer, the method further comprising:
etching a cavity in a second layer made of a third material;
depositing a third layer made of the first material to fill the cavity; and
performing mechanical-chemical planarization up to the second layer and a portion of the third layer left in place in the cavity forming the waveguide, wherein the first layer is deposited on and in contact with an exposed face of the waveguide.

7. The manufacturing method of claim 1 , wherein the first material is silicon nitride and the second material is indium tin oxide or amorphous carbon.

8. A manufacturing method, comprising:
forming a waveguide from a first material, the waveguide used to guide an optical signal, the waveguide having a first side adjacent to an insulating layer, a second side and a third side perpendicular to the first side, and a fourth side parallel to the first side; and
forming a layer made of a second material, the second material being electrically conductive and transparent to a wavelength of the optical signal, the layer being disposed over the first side, the second side, the third side, and the fourth side of the waveguide, the layer being separated from the first side, the second side, the third side, the fourth side, or a combination thereof by a distance of less than half of the wavelength of the optical signal.

9. The manufacturing method of claim 8 , wherein forming the waveguide comprises:
depositing a first layer made of the first material on a second layer made of a third material; and
etching the first layer to define the waveguide therein, wherein the first layer is deposited on and in contact with an intermediate layer with a thickness equal to the distance, wherein the intermediate layer is previously deposited on and in contact with the exposed faces of the waveguide.

10. The manufacturing method of claim 9 , further comprising:
depositing the second layer; and
forming electrically conductive vias through the second layer up to portions of the first layer.

11. The manufacturing method of claim 8 , wherein the layer is a first layer, the method further comprising:
etching a cavity in a second layer made of a third material;
depositing a third layer made of the first material to fill the cavity; and
performing mechanical-chemical planarization up to the second layer and a portion of the third layer left in place in the cavity forming the waveguide, wherein the first layer is deposited on and in contact with an intermediate layer with a thickness equal to the distance, wherein the intermediate layer is previously deposited on and in contact with the exposed face of the waveguide.

12. The manufacturing method of claim 8 , wherein the insulating layer comprises silicon oxide.

13. The manufacturing method of claim 8 , wherein the layer is a first layer, the method further comprising forming a second layer of a thermally and electrically insulating material, wherein the first layer is disposed between the waveguide and the second layer.

14. The manufacturing method of claim 8 , wherein the first material is silicon nitride, the second material is indium tin oxide or amorphous carbon, and the wavelength is between 450 nm and 1 μm.

15. The manufacturing method of claim 8 , wherein the layer is separated from the first side, the second side, the third side, or the fourth side by a distance of less than a quarter of the wavelength of the optical signal.

16. A method of operating a modulator comprising a waveguide, the method comprising:
applying a voltage between electronically conductive vias positioned on a first side and a second side of a waveguide, the applying the voltage causing a current to circulate in a first layer coupled to the waveguide resulting in an increase in a temperature of the waveguide and a modification of an optical index of the waveguide, the waveguide being formed from a first material, the waveguide used to guide an optical signal, the waveguide having a third side adjacent to an insulating layer and a fourth side parallel to the third side, the first side and the second side being perpendicular to the third side, a second layer being disposed over the first side, the second side, the third side, and the fourth side of the waveguide, the second layer being formed from a second material and electrically conductive and transparent to a wavelength of the optical signal, and
wherein the second layer is separated from the first side, the second side, the third side, the fourth side, or a combination thereof by a distance of less than half of the wavelength of the optical signal, or
wherein the second layer is in direct contact with the first side, the second side, the third side, the fourth side, or a combination thereof.

17. The method of claim 16 , wherein the modification of the optical index causes a modulation of the optical index of the waveguide.

18. The method of claim 16 , wherein the electronically conductive vias are positioned such that the current circulates along the modulator in a direction parallel to the third side.

19. The method of claim 16 , wherein the insulating layer comprises silicon oxide.

20. The method of claim 16 , wherein the second layer is disposed between the first layer and the waveguide.

Assignees

• St Microelectronics Crolles 2 Sas

Inventors

• Cremer Sébastien
• Boeuf Frédéric
• Monfray Stephane

Classifications

• G02F1/0147 Primary

  based on thermo-optic effects (G02F1/132 takes precedence) · CPC title

• G02B6/12004

  Combinations of two or more optical elements · CPC title

• G02F1/035 Primary

  in an optical waveguide structure · CPC title

• G02F2201/063

  ridge; rib; strip loaded · CPC title

• G02F1/009 Primary

  Thermal properties · CPC title