Optical encoder and control apparatus

Patent metadata

Field	Value
Publication number	US-11946780-B2
Application number	US-202117337918-A
Country	US
Kind code	B2
Filing date	Jun 3, 2021
Priority date	Jun 8, 2020
Publication date	Apr 2, 2024
Grant date	Apr 2, 2024

Abstract

A scale includes a diffraction grating configured to condense diffracted light in a periodic direction of the diffraction grating in order to detect a reference position. A light receiving element array is configured to receive light from the diffraction grating. The light receiving element array includes first to fourth light receiving elements configured to output signals having phases different from each other. The first light receiving element and the second light receiving element are adjacent to each other and are arranged between the third light receiving element and the fourth light receiving element. The processing unit generates a signal representing the reference position based on a differential signal between a signal from the first light receiving element and a signal from the third light receiving element and a differential signal between a signal from the second light receiving element and a signal from the fourth light receiving element.

First claim

What is claimed is:

1. An optical encoder comprising:
a light source;
a scale;
a light receiving unit configured to receive light from the scale; and
a processing unit configured to process a signal from the light receiving unit,
wherein the scale includes a diffraction grating configured to condense diffracted light in a periodic direction of the diffraction grating in order to detect a reference position,
wherein the light receiving unit includes a light receiving element array configured to receive light from the diffraction grating,
wherein the light receiving element array includes a first light receiving element, a second light receiving element, a third light receiving element, and a fourth light receiving element configured to output signals having phases different from each other,
wherein the first light receiving element and the second light receiving element are adjacent to each other and are arranged between the third light receiving element and the fourth light receiving element,
wherein the processing unit obtains a first differential signal between a signal from the first light receiving element and a signal from the third light receiving element and obtains a second differential signal between a signal from the second light receiving element and a signal from the fourth light receiving element, and
wherein the processing unit adds the first differential signal and the second differential signal and subtracts the first differential signal and the second differential signal to output a reference voltage as a reference.

2. The optical encoder according to claim 1 , wherein the diffraction grating includes a first diffraction grating of which a grating period is reduced as a distance from a center increases.

3. The optical encoder according to claim 2 , wherein the diffraction grating includes a reflection portion formed in a vicinity of the first diffraction grating.

4. The optical encoder according to claim 3 , wherein no diffraction grating is formed in the reflection portion.

5. The optical encoder according to claim 2 , wherein the diffraction grating includes a second diffraction grating that is different from the first diffraction grating and is formed in a vicinity of the first diffraction grating.

6. The optical encoder according to claim 5 , wherein the light receiving element array includes a fifth light receiving element of which an output is added to an output of the first light receiving element, and the fifth light receiving element is arranged at a position at which a distance from a portion where the first light receiving element adjacent to the second light receiving element is greater than that from the third light receiving element.

7. The optical encoder according to claim 5 , wherein a plurality of the second diffraction gratings is formed at predetermined intervals in the vicinity of the first diffraction grating in the diffraction grating.

8. The optical encoder according to claim 1 , wherein the third light receiving element and the fourth light receiving element are arranged at positions at which a distance X from a center of the light receiving element array satisfies the following conditional expression:
X <( Z 1+ Z 2)/ Z 1×( w/ 2),

where Z 1 is a distance from the light source to the scale, Z 2 is a distance from the scale to a surface of the light receiving element array, and w is a width of the first diffraction grating.

9. The optical encoder according to claim 5 , wherein the third light receiving element and the fourth light receiving element are arranged at positions where a distance X from a center of the light receiving element array satisfies the following conditional expression:
X <( Z 1+ Z 2)/ Z 1×( w/ 2+ Z 2×tan(arcsin(λ/ d ))),

where Z 1 is a distance from the light source to the scale, Z 2 is a distance from the scale to a surface of the light receiving element array, λ is a wavelength of the light source, d is a period of the second diffraction grating, and w is a width of the diffraction grating.

10. The optical encoder according to claim 1 , further comprising a diffraction grating arranged between the light source and the scale,
wherein a divergent luminous flux from the light source converges to a side farther than a surface of the light receiving element array.

11. The optical encoder according to claim 1 , further comprising a diffraction grating arranged between the scale and the light receiving element array.

12. The optical encoder according to claim 1 ,
wherein phases of the signal from the first light receiving element and the signal from the third light receiving element are different by 180 degrees, and
wherein phases of the signal from the second light receiving element and the signal from the fourth light receiving element are different by 180 degrees.

13. The optical encoder according to claim 1 , wherein the light receiving element array includes a plurality of first light receiving elements adjacent to each other, a plurality of second light receiving elements adjacent to each other, a plurality of third light receiving elements adjacent to each other, and a plurality of fourth light receiving elements adjacent to each other.

14. A control apparatus comprising:
the optical encoder according to claim 1 ; and
a control unit configured to control displacement of an object based on a result of a detection made by the optical encoder.

15. The optical encoder according to claim 2 ,
wherein the diffraction grating includes a plurality of second diffraction gratings formed at predetermined intervals and adjacent to the first diffraction grating, and
wherein a region between the plurality of second diffraction gratings does not include a diffraction grating.

Assignees

• Canon Kk

Inventors

• Nagura Chihiro
• Uemura Takanori

Classifications

• G01D5/30 Primary

  the beams of light being detected by photocells · CPC title

• G01B11/26

  for measuring angles or tapers; for testing the alignment of axes · CPC title

• G01D5/285

  using a movable mirror · CPC title

• G01D5/38 Primary

  by diffraction gratings · CPC title

• G01D5/34707 Primary

  Scales; Discs, e.g. fixation, fabrication, compensation · CPC title