Optical modulator
US-2022146901-A1 · May 12, 2022 · US
US11940708B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11940708-B2 |
| Application number | US-201917599916-A |
| Country | US |
| Kind code | B2 |
| Filing date | Sep 26, 2019 |
| Priority date | Mar 29, 2019 |
| Publication date | Mar 26, 2024 |
| Grant date | Mar 26, 2024 |
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Provided is an optical modulator that can be driven at lower voltage through the use of differential signal output. An optical modulator includes a substrate 1 and optical waveguides (21, 22) and a control electrode that are formed on the substrate, in which the optical waveguide includes Mach-Zehnder type optical waveguide, the control electrode is provided with two ground electrodes sandwiching three signal electrodes; the three signal electrodes are constituted by second and third signal electrodes that sandwich a first signal electrode, and have a wiring structure in which one modulation signal of the differential signal is applied to the first signal electrode, and the other modulation signal of the differential signal is applied to the second and third signal electrodes; and one branched waveguide (21) out of two Mach-Zehnder type optical waveguides is disposed between the first and second signal electrodes, and the other branched waveguide (22) is disposed between the first and third signal electrodes.
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The invention claimed is: 1. An optical modulator comprising: a substrate having an electro-optic effect and the thickness of the substrate being 20 μm or less; an optical waveguide having a rib structure, the optical waveguide includes at least one Mach-Zehnder type optical wavequide; and a control electrode that is formed on the substrate, the control electrode includes two ground electrodes sandwiching three signal electrodes, the three signal electrodes are composed of a first signal electrode, and second and third signal electrodes that sandwich the first signal electrode, and have a wiring structure in which one modulation signal of a differential signal is applied to the first signal electrode, and the other modulation signal of the differential signal is applied to the second and third signal electrodes, and one branched waveguide of two branched waveguides of the Mach-Zehnder type optical waveguide is disposed between the first and second signal electrodes, and the other branched waveguide is disposed between the first and third signal electrodes, and at least a part of the first to third signal electrodes is divided into two electrodes along an extending direction of the optical wavequide, and an electrical connection is partially provided between the divided electrodes along the extending direction. 2. The optical modulator according to claim 1 , the wiring structure includes a conversion line for converting an input wiring for input a set of differential signals into one output wiring for outputting the one modulation signal of the differential signal, and two output wirings for outputting the other modulation signal of the differential signal. 3. The optical modulator according to claim 2 , wherein the conversion line is provided on a relay substrate disposed outside the substrate having an electro-optic effect. 4. The optical modulator according to claim 1 , wherein a driver circuit that outputs the differential signal is provided on a relay substrate disposed outside the substrate having an electro-optic effect. 5. The optical modulator according to claim 1 , wherein the optical waveguide has a structure in which a plurality of the Mach-Zehnder type optical waveguides are disposed in parallel, and a crosstalk suppressing unit that suppresses signal crosstalk is provided on the ground electrode sandwiched between the Mach-Zehnder type optical waveguides adjacent to each other.
controlled by a high-frequency electromagnetic component in an electric waveguide structure · CPC title
in an optical waveguide structure · CPC title
Mach-Zehnder type · CPC title
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