Scale measuring device, method for generating position information, and device with multi-axis stage
US-9970788-B2 · May 15, 2018 · US
US11940304B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11940304-B2 |
| Application number | US-202117405065-A |
| Country | US |
| Kind code | B2 |
| Filing date | Aug 18, 2021 |
| Priority date | Aug 27, 2020 |
| Publication date | Mar 26, 2024 |
| Grant date | Mar 26, 2024 |
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A position-measuring device includes a scale having first and second measuring graduations, which each include graduation structures that respectively extend parallel to first and second directions. A first scanning unit is associated with the first measuring graduation, and second and third scanning units are associated with the second measuring graduation. A fourth scanning unit is associated with the first or second measuring graduation. In the former case, a first straight connecting line running through scanning locations of the first and fourth scanning units and a second straight connecting line running through scanning locations of the second and third scanning units are parallel or form a predetermined angle therebetween that is not equal to a sum of the angles of the first and second directions. In the latter case, the scanning locations of the second, third and fourth scanning units do not lie on a common straight connecting line.
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What is claimed is: 1. A position-measuring device, comprising: a scale having a first measuring graduation and a second measuring graduation, the first measuring graduation including a series of graduation structures which each extend parallel to a first direction, the second measuring graduation including a series of graduation structures which each extend parallel to a second direction, the first and second directions extending at a respective angle different from 0° with respect to a longitudinal axis of the scale; a first scanning unit associated with the first measuring graduation for scanning the first measuring graduation; a second scanning unit associated with the second measuring graduation for scanning the second measuring graduation; a third scanning unit associated with the second measuring graduation for scanning the second measuring graduation; and a fourth scanning unit associated with the first measuring graduation for scanning the first measuring graduation, and wherein a first straight connecting line running through centers of the first and fourth scanning units and a second straight connecting line running through centers of the second and third scanning units form a predetermined angle therebetween, the predetermined angle being not equal to a sum of the angle of the first direction and the angle of the second direction. 2. The position-measuring device as recited in claim 1 , wherein the position-measuring device has a scanning unit carrier disposed so as to be movable relative to the scale, the scanning unit carrier being configured to carry each of the scanning units. 3. The position-measuring device as recited in claim 2 , wherein the first and second measuring graduations and each of the scanning units are arranged and adapted such that a position of the scanning unit carrier relative to the scale can be determined in a first measurement direction and in two other degrees of freedom. 4. The position-measuring device as recited in claim 1 , wherein the angle of the first direction and the angle of the second direction are each in a range of 15° to 165°. 5. The position-measuring device as recited in claim 4 , wherein the angle of the first direction and the angle of the second direction are each in a range of 30° to 150°. 6. The position-measuring device as recited in claim 1 , wherein the angle of the first direction and the angle of the second direction are equal in magnitude. 7. The position-measuring device as recited in claim 6 , wherein the angle of the first direction and the angle of the second direction are each 45°. 8. The position-measuring device as recited in claim 1 , wherein the angle of the first direction is 90° and the angle of the second direction is 45°. 9. The position-measuring device as recited in claim 1 , wherein the first straight connecting line or the second straight connecting line is parallel to the longitudinal axis of the scale. 10. The position-measuring device as recited in claim 1 , wherein the predetermined angle differs by more than ±5°, ±10° or ±15° from the sum of the angle of the first direction and the angle of the second direction. 11. The position-measuring device as recited in claim 1 , wherein a perpendicular distance of the center of the fourth scanning unit from the second straight connecting line is greater than 2 mm, 1 mm, or 0.1 mm. 12. The position-measuring device as recited in claim 1 , wherein the graduation structures of the first measuring graduation and the graduation structures of the second measuring graduation are respectively arranged periodically along a first measurement direction. 13. The position-measuring device as recited in claim 1 , wherein the first and second measuring graduations are each absolute graduations. 14. The position-measuring device as recited in claim 1 , wherein the first and second measuring graduations are each optically scannable. 15. The position-measuring device as recited in claim 1 , wherein the predetermined angle is not equal to zero. 16. The position-measuring device as recited in claim 15 , wherein the predetermined angle is 15°. 17. The position-measuring device as recited in claim 1 , wherein the scanning units each include a scanning location that is a reference point for a position measurement and is located at the center of the respective scanning unit.
Special design of the sensing element or scale · CPC title
Scales; Discs, e.g. fixation, fabrication, compensation · CPC title
Scale reading or illumination devices · CPC title
Linear encoders · CPC title
Circular or rotary encoders · CPC title
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