Ultrasonic transducers, wire bonding machines including ultrasonic transducers, and related methods

Patent metadata

Field	Value
Publication number	US-11937979-B2
Application number	US-202217718474-A
Country	US
Kind code	B2
Filing date	Apr 12, 2022
Priority date	Apr 27, 2021
Publication date	Mar 26, 2024
Grant date	Mar 26, 2024

Abstract

An ultrasonic transducer system is provided. The ultrasonic transducer system includes a transducer body, wherein at least a portion of a surface of the transducer body includes a processed area. The processed area has a changed condition at the surface of the transducer body.

First claim

What is claimed:

1. An ultrasonic transducer comprising:
a transducer body, the transducer body defining an aperture configured to receive a wire bonding tool, wherein an area of the transducer body defining the aperture is coated with a coating to reduce wear at the area.

2. The ultrasonic transducer of claim 1 wherein the transducer body defines a second aperture configured to receive a fastener for tightening the aperture during engagement with the wire bonding tool, another area of the transducer body defining the second aperture also being coated with the coating to reduce wear at the another area.

3. The ultrasonic transducer of claim 1 wherein the coating is configured to reduce galling at the area of the transducer body defining the aperture.

4. The ultrasonic transducer of claim 1 wherein an exterior surface of the transducer body also includes the coating.

5. The ultrasonic transducer of claim 1 wherein the coating has a thickness of between 1 μm and 10 μm.

6. The ultrasonic transducer of claim 1 wherein the coating includes at least one of titanium nitride, diamond-like carbon, flash chrome, tungsten disulfide, titanium aluminum nitride, and composite diamond coating.

7. The ultrasonic transducer of claim 1 wherein the coated area has a hardness greater than 90 HRC.

8. The ultrasonic transducer of claim 1 wherein the coated area has a coefficient of friction of less than 0.2.

9. The ultrasonic transducer of claim 1 , the coating having a thickness of between 1 μm and 5 μm.

10. The ultrasonic transducer of claim 9 wherein the coating includes at least one of titanium nitride, diamond-like carbon, flash chrome, tungsten disulfide, titanium aluminum nitride, and composite diamond coating.

11. A wire bonding machine comprising:
a bond head assembly; and
an ultrasonic transducer carried by the bond head assembly, the ultrasonic transducer including a transducer body, the transducer body defining an aperture configured to receive a wire bonding tool, wherein an area of the transducer body defining the aperture is coated with a coating to reduce wear at the area.

12. The wire bonding machine of claim 11 wherein the transducer body defines a second aperture configured to receive a fastener for tightening the aperture during engagement with the wire bonding tool, another area of the transducer body defining the second aperture also being coated with the coating to reduce wear at the another area.

13. The wire bonding machine of claim 11 , the coating having a thickness of between 1 μm and 5 μm.

14. The wire bonding machine of claim 13 wherein the coating includes at least one of titanium nitride, diamond-like carbon, flash chrome, tungsten disulfide, titanium aluminum nitride, and composite diamond coating.

15. A method of providing an ultrasonic transducer, the method comprising the steps of:
(a) providing a transducer body, the transducer body defining an aperture configured to receive a wire bonding tool; and
(b) applying a coating to an area of the transducer body defining the aperture to reduce wear at the area.

16. The method of claim 15 wherein the transducer body provided in step (a) defines a second aperture configured to receive a fastener for tightening the aperture during engagement with the wire bonding tool, and step (b) includes applying the coating to another area of the transducer body defining the second aperture.

17. The method of claim 15 , the coating having a thickness of between 1 μm and 10 μm.

18. The method of claim 17 wherein the coating includes at least one of titanium nitride, diamond-like carbon, flash chrome, tungsten disulfide, titanium aluminum nitride, and composite diamond coating.

Assignees

• Kulicke & Soffa Ind Inc

Inventors

• Deangelis Dominick Albert
• Schulze Gary Walter

Classifications

• H10W72/07141

  Means for applying energy, e.g. ovens or lasers · CPC title

• B23K20/106 Primary

  Features related to sonotrodes · CPC title

• A61B8/445 Primary

  Details of catheter construction · CPC title

• A61B8/4433

  involving a docking unit · CPC title

• A61B8/4455

  Features of the external shape of the probe, e.g. ergonomic aspects · CPC title