Display device and manufacturing method thereof

Patent metadata

Field	Value
Publication number	US-11937472-B2
Application number	US-202117445471-A
Country	US
Kind code	B2
Filing date	Aug 19, 2021
Priority date	Aug 20, 2018
Publication date	Mar 19, 2024
Grant date	Mar 19, 2024

Abstract

An manufacturing method of a display device may include the following steps: forming a transistor on a substrate; forming an insulating layer on the transistor; forming a conductive layer including silver on the insulating layer; forming a photosensitive member on the conductive layer; forming an electrode of a light-emitting element by etching the conductive layer; performing plasma treatment on a structure that comprises the electrode, the plasma treatment using a gas including a halogen; and removing a product that is resulted from the plasma treatment.

First claim

What is claimed is:

1. A display device comprising:
a substrate including a display area for displaying images and a non-display area around the display area;
a light-emitting element disposed in the display area and including an anode, a cathode, and emission layer between the anode and the cathode;
an electrically conductive pad for receiving signals from an external device, the electrically conductive pad being disposed in the non-display area and spaced from the light-emitting element;
an insulating layer covering edges of the electrically conductive pad and not covering a center of the electrically conductive pad; and
a transistor disposed on the substrate and including a transistor electrode,
wherein a surface of the electrically conductive pad is exposed to outside of the display device,
wherein the surface of the electrically conductive pad includes a silver halide,
wherein the electrically conductive pad includes a first electrical conductor and a second electrical conductor electrically connected to the first electrical conductor,
the second electrical conductor is positioned between the silver halide and the first electrical conductor,
wherein the anode is electrically connected to the transistor electrode, and
wherein a material of the second electrical conductor is identical to a material of the transistor electrode.

2. The display device of claim 1 , wherein the surface of the electrically conductive pad includes a metal nitride.

3. The display device of claim 2 , further comprising the surface of the electrically conductive pad includes a metal oxide.

4. The display device of claim 1 , wherein the metal fluoride includes titanium.

Assignees

• Samsung Display Co Ltd
• Postech Acad Ind Found

Inventors

• Kim Sang Gab
• Cho Hyun Min
• Kim Tae Sung
• Jeong Yu-Gwang
• Bae Su Bin
• Kim Jin Seock
• Kim Sang Gyun
• Ko Hyo Min
• Cho Kil Won
• Lee Hansol

Classifications

• H10K59/8051

  Anodes · CPC title

• H10K59/805

  Electrodes · CPC title

• H10K71/233

  by photolithographic etching · CPC title

• H10P50/242

  of Group IV materials · CPC title

• H10K71/00 Primary

  Manufacture or treatment specially adapted for the organic devices covered by this subclass · CPC title