Aerosol-based liquid particle detection measurement

Patent metadata

Field	Value
Publication number	US-11933708-B2
Application number	US-202217675736-A
Country	US
Kind code	B2
Filing date	Feb 18, 2022
Priority date	May 7, 2021
Publication date	Mar 19, 2024
Grant date	Mar 19, 2024

Abstract

A measurement system includes an atomizer, an impactor, a particle counter, and a discharge reservoir. The atomizer has a liquid intake port and a gas intake port configured to aerosolize a liquid received at the liquid intake port. The impactor has an inlet coupled to the atomizer and has a first output port and a second output port. The impactor is configured to separate droplets wherein those droplets smaller than a selected cut point are directed to the first output port and those droplets larger than the selected cut point are directed to the second output port. The particle counter is coupled to the first output port and is configured to count particles larger than at least one particle size cut point. The discharge reservoir is coupled to the second output port.

First claim

What is claimed is:

1. A measurement system comprising:
an atomizer having a liquid intake port, a gas intake port and an orifice, the atomizer configured to aerosolize a liquid received at the liquid intake port resulting in aerosolized liquid;
a virtual impactor having an inlet coupled to the atomizer and having a first output port and a second output port, the impactor configured to separate droplets such that droplets smaller than a selected size cut point are directed to the first output port and those droplets larger than the selected size cut point are directed to the second output port;
an evaporator coupled to the first output port;
a first particle counter coupled downstream of the evaporator and including a first input growth tube within the first particle counter, the first input growth tube configured with a first particle size cut point;
a second particle counter coupled downstream of the evaporator and including a second input growth tube within the second particle counter, the second input growth tube configured with a second, different particle size cut point; and
a discharge reservoir coupled to the second output port.

2. The system of claim 1 , further comprising one or more diffusion screens coupled between the evaporator and the first and second particle counters.

3. The system of claim 1 , wherein the liquid intake port is coupled to at least one of a filter or a pressure regulator.

4. The system of claim 3 , wherein the filter includes a sintered metal media.

5. The system of claim 1 , wherein the liquid intake port is coupled to a component series, the series including a filter, a valve, a pressure regulator, and a pressure gauge.

6. The system of claim 1 , wherein the gas intake port is coupled to at least one of a filter or a valve.

7. The system of claim 1 , wherein the atomizer utilizes an orifice to accelerate the gas flow to break out and aerosolize the liquid.

8. The system of claim 1 , wherein the impactor is coupled to the output of the atomizer orifice and configured to direct some of the flow to discharge at the second output port.

9. The system of claim 8 , where in the impactor and the atomizer are discrete components or integrated into a single component.

10. The system of claim 1 , wherein the first output port is aligned transverse to a flow path between the orifice and the second output port.

11. The system of claim 1 , wherein the atomizer further includes a makeup flow port to receive a dried and filtered makeup flow, and the atomizer is configured to merge the makeup flow and the aerosolized liquid to dry the aerosolized liquid into particles.

12. The system of claim 1 , wherein the evaporator includes a heater between the first output port and the first and second particle counters.

13. The system of claim 1 , wherein the evaporator is internal or external to the atomizer and includes a section of conduit with gas flowing therethrough.

14. The system of claim 1 , further comprising a quench flow port coupled between the evaporator and the first and second particle counters.

15. The system of claim 1 , wherein the particle counter is a condensation particle counter and configured to condense fluid on a particle to facilitate particle count measurement.

16. The system of claim 1 , further comprising:
a mobility separator situated between the evaporator and the first and second particle counters, and
wherein the particle counter includes an imaging device configured to image mobility separated particles.

17. A measurement system comprising:
an atomizer having a liquid intake port, a gas intake port and an orifice, the atomizer configured to aerosolize a liquid received at the liquid intake port resulting in aerosolized liquid;
a virtual impactor having an inlet coupled to the atomizer and having a first output port and a second output port, the impactor configured to separate droplets such that droplets smaller than a selected size cut point are directed to the first output port and those droplets larger than the selected size cut point are directed to the second output port;
an evaporator coupled to the first output port;
a particle counter coupled downstream of the evaporator;
a liquid collection reservoir coupled to the second output port, the liquid collection reservoir including a trap container, a level sensor, and a pump.

18. The system of claim 17 , wherein the trap container is configured to separate liquid and gas.

19. The system of claim 18 , wherein the trap container is configured to convey the liquid in a first direction and to convey gas in a second direction and wherein the first direction opposes the second direction.

20. The system of claim 18 , wherein the level sensor is configured to provide a signal corresponding to liquid level.

21. The system of claim 18 , wherein the pump is configured to operate in response to the signal from the level sensor.

22. The system of claim 18 , wherein the liquid level sensor is a capacitive sensor.

23. The system of claim 17 further comprising:
a differential mobility analyzer configured to separate particles from the evaporator by mobility and including multiple outputs configured to provide particles of respective, different mobilities, and
wherein the first and second particle counters are coupled to respective outputs.

24. A method comprising:
aerosolizing, by an atomizer having a liquid intake port, a gas intake port and an orifice, a liquid received at the liquid intake port;
separating, by a virtual impactor having an inlet coupled to the atomizer and having a first output port and a second output port, droplets such that droplets smaller than a selected size cut point of the virtual impactor are directed to the first output port and those droplets larger than the selected size cut point of the virtual impactor are directed to the second output port;
evaporating, by an evaporator coupled to the first output port, the droplets from the first output port;
counting, by a particle counter coupled to the first output port downstream of the evaporator, particles in the droplets from the first output port larger than at least one particle size cut point determined by the settings of at least one particle counter growth tube;
collecting, at a discharge reservoir coupled to the second output port, droplets from the second output port; and
receiving different portions of the particles from the droplets from the first output port at multiple input growth tubes within the particle counter, the multiple input growth tubes configured for different particle size cut points and each having its own dedicated counter.

25. The method of claim 24 , further comprising filtering, by one or more diffusion screens coupled between the evaporator and the particle counter, to remove particles, of the particles from the first output port, less than a specified size of the diffusion screens.

Assignees

• Tsi Inc

Inventors

• Han Hee-Siew
• Farmer Ii Kenneth R
• Birkeland Nathan T
• Remiarz Richard J
• Russell Timothy S
• Dick William D

Classifications

• G01N2015/0038

  Investigating nanoparticles · CPC title

• G01N15/06 Primary

  Investigating concentration of particle suspensions (by weighing G01N5/00; investigating sedimentation of particle suspensions G01N15/04; investigating individual particles G01N15/10) · CPC title

• B01D39/2027

  Metallic material · CPC title

• G01F23/263

  by measuring variations in capacitance of capacitors · CPC title

• G01N15/0227 Primary

  using imaging; using holography · CPC title