Bonding device and method of manufacturing display device using the same

Patent metadata

Field	Value
Publication number	US-11930689-B2
Application number	US-202117355612-A
Country	US
Kind code	B2
Filing date	Jun 23, 2021
Priority date	Sep 8, 2020
Publication date	Mar 12, 2024
Grant date	Mar 12, 2024

Abstract

A bonding device includes: a support in which a plurality of through-holes is defined, a diaphragm disposed on the support to cover the support, a pressing pad disposed on the diaphragm over a top surface of the support, and a window fixing chuck disposed on the pressing pad and in which a groove facing the pressing pad is defined. Here, the pressing pad includes a pad and at least one support bar disposed in the pad and extending in a first direction.

First claim

What is claimed is:

1. A bonding device comprising:
a support in which a plurality of through-holes is defined;
a diaphragm disposed on the support to cover the support;
a pressing pad disposed on the diaphragm over a top surface of the support; and
a window fixing chuck disposed on the pressing pad and in which a groove facing the pressing pad is defined,
wherein the pressing pad comprises:
a pad; and
at least one support bar disposed in the pad and extending in a first direction.

2. The bonding device of claim 1 , wherein the pad has elasticity and is deformable by an external force.

3. The bonding device of claim 2 , wherein the pad comprises a silicon.

4. The bonding device of claim 1 , wherein the at least one support bar has rigidity greater than rigidity of the pad.

5. The bonding device of claim 4 , wherein the at least one support bar comprises a metal.

6. The bonding device of claim 1 , wherein the pad extends in the first direction, and a top surface of the pad has a curved surface convex in a direction to the groove when viewed in the first direction.

7. The bonding device of claim 6 , wherein the groove extends in the first direction, and the window fixing chuck has a concave curved surface at an inner end of the groove, and the concave curved surface faces the curved surface of the pad.

8. The bonding device of claim 6 , further comprising a plurality of columns arranged in the first direction,
wherein the support and the pressing pad are disposed between the columns, and the at least one support bar extends in the first direction further than the pad and is connected to at least two columns of the plurality of columns.

9. The bonding device of claim 1 , wherein a direction crossing the first direction is defined as a second direction, and a direction crossing a plane defined by the first and second directions is defined as a third direction, and
the support has a shape of a plate defined by the first and third directions.

10. The bonding device of claim 9 , wherein at least one cavity extending in the third direction is defined in the support, and
the through-holes extend from the at least one cavity and defined in both side surfaces of the support, and the both side surfaces are opposite to each other in the second direction.

11. The bonding device of claim 9 , wherein the window fixing chuck moves in the third direction so that the diaphragm and the pressing pad are disposed in the groove.

12. The bonding device of claim 1 , wherein the diaphragm is expanded toward an outside of the support by air injected through the through-holes.

13. The bonding device of claim 1 , further comprising a stage,
wherein the support and the diaphragm are disposed on the stage, and the diaphragm covers the support and is connected to the stage.

14. The bonding device of claim 13 , wherein the diaphragm comprises:
a cover portion covering the support; and
a connection portion extending from a lower end of the cover portion in parallel to the stage and connected to the stage.

15. The bonding device of claim 1 , wherein the at least one support bar comprises:
a first support bar extending in the first direction; and
a second support bar extending in the first direction and disposed over the first support bar.

16. The bonding device of claim 15 , wherein when viewed in the first direction, a cross-section of the first support bar has a size different from a size of a cross-section of the second support bar.

17. The bonding device of claim 15 , wherein when viewed in the first direction, a cross-section of the first support bar has a same size as a cross-section of the second support bar.

18. The bonding device of claim 15 , wherein when viewed in the first direction, the first support bar has a shape different from a shape of the second support bar.

19. The bonding device of claim 1 , wherein the at least one support bar comprises a support bar having a cylindrical shape extending in the first direction.

20. A bonding device comprising:
a support in which a plurality of through-holes is defined;
a diaphragm disposed on the support to cover the support;
a pressing pad disposed on the diaphragm on a top surface of the support; and
a window fixing chuck disposed on the pressing pad and in which a groove facing the pressing pad is defined,
wherein the pressing pad is deformable by a pressure caused by the window fixing chuck when the window fixing chuck moves such that the pressing pad is disposed in the groove.

Assignees

• Samsung Display Co Ltd

Inventors

• Yoo Kisang
• Ko Kyungrok
• Kim Youngsu
• Yoo Jaesuk
• Choi Jeong-Seop

Classifications

• H10K59/871

  Self-supporting sealing arrangements · CPC title

• H10K71/00 Primary

  Manufacture or treatment specially adapted for the organic devices covered by this subclass · CPC title

• H10K59/1201 Primary

  Manufacture or treatment · CPC title

• H10K2102/311

  Flexible OLED · CPC title

• B32B2457/20

  Displays, e.g. liquid crystal displays, plasma displays · CPC title