Nano membrane, method of manufacturing nano membrane, and apparatus for speaker and microphone using nano membrane

Patent metadata

Field	Value
Publication number	US-11930339-B2
Application number	US-202016918868-A
Country	US
Kind code	B2
Filing date	Jul 1, 2020
Priority date	Oct 11, 2017
Publication date	Mar 12, 2024
Grant date	Mar 12, 2024

Abstract

Disclosed herein is a nano membrane. The nano membrane includes an insulating layer having a thickness corresponding to a diameter of each of metal nanowires and configured to contain the metal nanowires therein, and the metal nanowires arranged to cross and having portions of side surfaces which protrude from one surface of the insulating layer.

First claim

What is claimed is:

1. A method of manufacturing a nano membrane, comprising:
depositing zinc oxide (ZnO) on a silicon (Si) substrate to form a ZnO sacrificial layer;
coating the ZnO sacrificial layer with metal nanowires, which are arranged to cross each other, through solution-based bar-coating;
depositing a polymer coating raw material comprising parylene-C on the ZnO sacrificial layer coated with the metal nanowires, to form an insulating layer that is a parylene thin film,
wherein the metal nanowires have portions of side surfaces which protrude from one surface of the insulating layer; and
removing the ZnO sacrificial layer,
wherein a distance y 0 between a neutral axis and a bottom of the parylene thin film is calculated according to following Equation 3:

y
0

=

h
2

*

1
+

2
⁢
h

+

2
⁢
r

h

⁢

(

E
Ag

E
Pa

-
1

)

⁢
n
⁢
π
⁢

r
2

/
bh

1
+

(

E
Ag

E
Pa

-
1

)

⁢
n
⁢
π
⁢

r
2

/
bh

,

[

Equation
⁢

3

]

where y 0 is the distance between the neutral axis and the bottom of the parylene thin film, h is a thickness of the parylene thin film, h′ is a distance between the metal nanowires and the bottom of the parylene thin film, r is a radius of each of the metal nanowires, b is a width of the parylene thin film, and E Ag and E Pa are Young's moduli of the metal nanowire and the parylene thin film, respectively.

2. The method of claim 1 , wherein the coating comprises:
coating the ZnO sacrificial layer with the metal nanowires to direct a length direction of each of the metal nanowires in a first direction; and
coating the ZnO sacrificial layer, which is coated with the metal nanowires, with the remaining metal nanowires to direct a length direction of each of the remaining metal nanowires in a second direction perpendicular to the first direction.

3. The method of claim 1 , wherein the depositing the polymer coating raw material comprises depositing the polymer coating raw material to have a predetermined thickness based on a diameter of each of the metal nanowires to include the metal nanowires in the deposited polymer coating raw material.

4. The method of claim 1 , wherein the metal nanowires are included inside the insulating layer so that a part of a side surface of each of the metal nanowires protrudes from one surface of the insulating layer.

5. The method of claim 1 , wherein the removing of the ZnO sacrificial layer includes etching the ZnO sacrificial layer using a citric acid solution by which the ZnO sacrificial layer is dissolved.

Assignees

• Ulsan Nat Inst Science & Tech Unist

Inventors

• Ko Hyunhyub
• Kang Saewon
• Cho Seungse

Classifications

• H04R7/06 Primary

  comprising a plurality of sections or layers · CPC title

• B29C41/20

  incorporating preformed parts or layers, e.g. moulding inserts or for coating articles · CPC title

• B29C66/03

  After-treatments in the joint area (B29C66/3262 takes precedence) · CPC title

• C08J7/02

  with solvents, e.g. swelling agents · CPC title

• C23C26/00

  Coating not provided for in groups C23C2/00 - C23C24/00 · CPC title