Collecting device and collecting method

Patent metadata

Field	Value
Publication number	US-11923138-B2
Application number	US-202217682934-A
Country	US
Kind code	B2
Filing date	Feb 28, 2022
Priority date	Sep 9, 2021
Publication date	Mar 5, 2024
Grant date	Mar 5, 2024

Abstract

A collecting device includes a stage configured to place a substrate. A magnetic field generating unit holds, by a magnetic field, a first liquid containing a magnetic fluid and a collecting liquid to bring the first liquid into contact with at least an end portion of the substrate. A collecting unit collects the first liquid from the magnetic field generating unit. A separating unit separates the collecting liquid from the first liquid.

First claim

What is claimed is:

1. A collecting device comprising:
a stage configured to support a substrate;
a magnetic field generator configured to hold, by a magnetic field, a first liquid containing a magnetic fluid and a collecting liquid, and to bring the first liquid into contact with at least an end portion of the substrate;
a collector configured to collect the first liquid from the magnetic field generator; and
a separator configured to separate the collecting liquid from the first liquid.

2. The collecting device according to claim 1 , wherein
the magnetic field generator includes a first magnetic field generator and a second magnetic field generator arranged to face each other, and
the first and second magnetic field generators hold the first liquid such that the first liquid is continuous between the first magnetic field generator and the second magnetic field generator.

3. The collecting device according to claim 2 , wherein
a gap between the first magnetic field generator and the second magnetic field generator is wider than the substrate in a thickness direction of the substrate.

4. The collecting device according to claim 2 , wherein the separator includes: a container configured to retain the first liquid from the collector, and a third magnetic field generator configured to apply, from an outside of the container, a magnetic field to the first liquid.

5. The collecting device according to claim 4 , wherein
the third magnetic field generator is configured to unevenly distribute the magnetic fluid of the first liquid in the container by applying a magnetic field to the first liquid, thereby separating the magnetic fluid from the collecting liquid.

6. The collecting device according to claim 5 , wherein the third magnetic field generator is configured to apply a magnetic field to attract the magnetic fluid to a bottom of the container.

7. The collecting device according to claim 4 , wherein the third magnetic field generator is configured to apply a stronger magnetic field than that of the first and second magnetic field generators to the first liquid.

8. The collecting device according to claim 4 , wherein the container is non-magnetic.

9. The collecting device according to claim 1 , wherein
the collector is an instrument that connects the magnetic field generator and the separator to cause the first liquid to flow from the magnetic field generator to the separator.

10. The collecting device according to claim 1 , further comprising:
a supply configured to supply the first liquid to the magnetic field generator.

11. The collecting device according to claim 10 , wherein the magnetic field generator is arranged to function as the supply.

12. The collecting device according to claim 1 , wherein
the magnetic field generator is a tubular body through which the first liquid passes.

13. The collecting device according to claim 1 , wherein the end portion of the substrate has a bevel shape.

14. The collecting device according to claim 1 , wherein the magnetic field generator includes a columnar body.

15. The collecting device according to claim 14 , wherein the magnetic field generator includes a tubular body around the columnar body.

16. The collecting device according to claim 1 , wherein the collector is non-magnetic.

17. The collecting device according to claim 1 , wherein the magnetic field generator includes a plurality of electromagnets.

18. The collecting device according to claim 1 , further comprising a controller configured to control the magnetic intensity of the magnetic field generator.

19. An analyzing apparatus comprising:
the collecting device of claim 1 ; and
an analyzing device arranged to receive and analyze the collecting liquid.

20. A collecting method using a collecting device, the collecting device including a stage configured to support a substrate, a magnetic field generator configured to hold a first liquid containing a magnetic fluid and a collecting liquid by a magnetic field, a collector configured to collect the first liquid from the magnetic field generator, and a separator configured to separate the collecting liquid from the first liquid, the collecting method comprising:
holding the first liquid with the magnetic field generator by generating a magnetic field;
bringing the first liquid into contact with at least an end portion of the substrate;
stopping the magnetic field of the magnetic field generator and collecting the first liquid from the magnetic field generator to the separator through the collector; and
separating the collecting liquid from the first liquid, in the separator.

Assignees

• Kioxia Corp

Inventors

• Kato Sho
• Yamada Yuji
• Wu Jiahong

Classifications

• H01F7/20 Primary

  without armatures (cores H01F3/00; coils H01F5/00 {; shaping metal by applying magnetic forces B21D26/14; electromagnets specially adapted for NMR applications G01R33/381}) · CPC title

• G01N1/04

  in the solid state, e.g. by cutting · CPC title

• G01N33/202

  Constituents thereof · CPC title

• H01F1/44

  of magnetic liquids, e.g. ferrofluids (particles in a bonding agent H01F1/28, H01F1/36, {H01F1/37}) · CPC title

• H01J49/105

  using high-frequency excitation, e.g. microwave excitation, Inductively Coupled Plasma [ICP] · CPC title