Vibrating element

Patent metadata

Field	Value
Publication number	US-11921283-B2
Application number	US-202117331639-A
Country	US
Kind code	B2
Filing date	May 27, 2021
Priority date	Jun 3, 2020
Publication date	Mar 5, 2024
Grant date	Mar 5, 2024

Abstract

A vibrating element includes a movable part, a substrate made of metal, a driving source, and a holding member holding the substrate. The substrate includes a pair of support beam parts, a support part, and a torsion beam part. Each of the support beam parts has a first end part and a second end part. The support part supports the first end part. The torsion beam part swingably supports the movable part. The second end part of each of the support beam parts is provided with a fixing part fixed to the holding member. By adjusting an inclination with respect to the holding member, the fixing part is fixed to the holding member in a state in which each of the support beam parts applies tension to the torsion beam part in a direction away from the movable part in a first direction in which the torsion beam part extends.

First claim

What is claimed is:

1. A vibrating element comprising:
a movable part;
a substrate made of metal, comprising:
a pair of support beam parts each having a first end part and a second end part;
a support part supporting the first end part of each of the pair of support beam parts; and
a torsion beam part which swingably supports the movable part;

a driving source provided on the support part and generating a plate wave which swings the movable part; and
a holding member holding the substrate,
wherein the second end part of each of the pair of support beam parts is provided with a fixing part fixed to the holding member, and
by adjusting any of an inclination with respect to the holding member, a fixing position with respect to the holding member in a fixing plane along a front surface of the substrate, and a fixing orientation in the fixing plane, the fixing part is fixed to the holding member in a state in which each of the pair of support beam parts applies tension to the torsion beam part in a direction away from the movable part in a first direction in which the torsion beam part extends.

2. The vibrating element according to claim 1 , wherein, by twisting in directions opposite to each other, the fixing parts are fixed in a state in which the inclination with respect to the holding member is adjusted, or
by bending the pair of support beam parts in directions opposite to each other, the fixing parts are fixed in a state in which the fixing position with respect to the holding member in the fixing plane is adjusted.

3. The vibrating element according to claim 2 , wherein the fixing part is fixed to the holding member in a twisted state in which, of portions of the fixing part in the first direction, a first portion on a side close to the movable part rotates in a direction from a rear surface side toward a front surface side of the movable part, or in a twisted state in which, of the portions of the fixing part in the first direction, a second portion on a side far from the movable part rotates in a direction from the front surface side toward the rear surface side of the movable part, or
the fixing part is fixed to the holding member in a state in which the pair of support beam parts is bent so that a distance between the second end parts of the pair of support beam parts is larger than a distance between the first end parts of the pair of support beam parts.

4. The vibrating element according to claim 3 , wherein in a case where the fixing part is fixed to the holding member in a twisted state,
the holding member comprises an abutting part having an abutting surface which abuts the fixing part, and
the abutting surface is inclined so that a first abutting portion on a side close to the movable part in the first direction and a second abutting portion on a side far from the movable part in the first direction are located at positions different from each other in a second direction orthogonal to a front surface of the movable part.

5. The vibrating element according to claim 4 , wherein the abutting part comprises an abutting member provided separately from the holding member, and
the vibrating element further comprises a fixing angle adjustment mechanism capable of adjusting an inclination angle of the abutting surface.

6. The vibrating element according to claim 3 , wherein in a case where the fixing part is fixed to the holding member in a twisted state,
the holding member comprises an abutting part having an abutting surface which abuts the fixing part, and
the vibrating element further comprises a first spacer member provided at a position between the fixing part and the abutting surface in a second direction orthogonal to a front surface of the movable part,
wherein the fixing part is fixed to the holding member in a state in which the inclination with respect to the holding member is adjusted by the first spacer member.

7. The vibrating element according to claim 4 , wherein the fixing part is fixed to the holding member in a state in which the support beam part is twisted in a direction in which, of the torsion beam part, an end part connected to the movable part protrudes toward the front surface side of the movable part.

8. The vibrating element according to claim 4 , further comprising a second spacer member arranged between the abutting part and the holding member in a direction in which the support beam part extends,
wherein the abutting part is configured to be capable of adjusting the fixing position of the fixing part in a direction in which the support beam part extends by the second spacer member.

9. The vibrating element according to claim 3 , wherein in a case of fixing to the holding member in a state in which the support beam part is bent,
the fixing part has a fixing position adjustment part which penetrates the fixing part in a thickness direction of the fixing part and extends along the first direction, and
the fixing part is fixed to the holding member in a state in which position adjustment in the fixing plane is performed by a fixing member inserted through the fixing position adjustment part.

10. The vibrating element according to claim 3 , comprising a first screw member which fixes one of the pair of fixing parts and a second screw member which fixes another of the pair of fixing parts,
wherein the holding member is provided with a first screw hole to which the first screw member is fastened and a second screw hole to which the second screw member is fastened, and
the first screw hole and the second screw hole are configured so that each of a force applied to one of the pair of support beam parts via the one of the fixing parts when the first screw member is tightened, and a force applied to another of the pair of support beam parts via the another of the fixing parts when the second screw member is tightened is directed in a direction away from the movable part in the first direction.

Assignees

• Funai Electric Co

Inventors

• Fujita Kenichi
• Tanehashi Kenji
• Tanaka Fuminori

Classifications

• G02B26/0833 Primary

  the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD (G02B26/0825 takes precedence; micromechanical devices in general B81B) · CPC title

• B81B3/004

  Angular deflection · CPC title

• B81C1/00658

  Treatments for improving the stiffness of a vibrating element · CPC title

• G02B26/101

  with both horizontal and vertical deflecting means, e.g. raster or XY scanners (colour television using laser beams scanning a display screen H04N9/3129) · CPC title

• B81B2201/042

  Micromirrors, not used as optical switches · CPC title