Semiconductor process surface monitoring
US-2022380896-A1 · Dec 1, 2022 · US
US11913830B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11913830-B2 |
| Application number | US-202117522123-A |
| Country | US |
| Kind code | B2 |
| Filing date | Nov 9, 2021 |
| Priority date | Nov 11, 2020 |
| Publication date | Feb 27, 2024 |
| Grant date | Feb 27, 2024 |
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A laser absorptivity measurement device uses a linearly polarized incident beam, an optical configuration comprising an internal polarizing beamsplitter that transmits the linearly polarized incident beam and a quarter-wave plate that converts linearly polarized incident beam into a circularly polarized incident beam that is reflected off a processing substrate. The quarter-wave plate and polarizing beamsplitter can then direct the reflected light back into an integrating volume, where the power of the reflected light can be measured by a photodetector. The laser absorptivity measurement device is capable of making real-time absorption efficiency measurements of a variety of laser-based processes, including laser welding and brazing, additive manufacturing, and laser marking.
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We claim: 1. A laser absorptivity measurement device, comprising: an optical configuration, comprising a linearly polarized incident beam, an internal polarizing beamsplitter that transmits the linearly polarized incident beam, and a quarter-wave plate that converts the linearly polarized incident beam into a circularly polarized incident beam; an integrating volume comprising a photodetector; and a processing substrate that reflects and thereby reverses the handedness of at least a portion of the circularly polarized incident beam, resulting in a reverse circularly polarized reflected light; wherein the reverse circularly polarized reflected light passes back through the quarter-wave plate and is converted into a linearly polarized reflected light having linear polarization orthogonal to that of the linearly polarized incident beam, wherein the linearly polarized reflected light passes back into the internal polarizing beam splitter and is reflected into the integrating volume, wherein the power of the linearly polarized reflected light is measured by the photodetector. 2. The laser absorptivity measurement device of claim 1 , wherein the integrating volume comprises a hemispherical dome. 3. The laser absorptivity measurement device of claim 1 , wherein the photodetector comprises a photodiode. 4. The laser absorptivity measurement device of claim 1 , wherein the optical configuration further comprises an external polarizing beamsplitter that transmits a preferred linear polarization and reflects unwanted polarizations of an incident beam, thereby providing the linearly polarized incident beam. 5. The laser absorptivity measurement device of claim 1 , wherein the processing substrate comprises a laser welding, additive manufacturing, brazing, or laser marking process. 6. The laser absorptivity measurement device of claim 1 , wherein the processing substrate can be translated relative to the circularly polarized incident beam. 7. The laser absorptivity measurement device of claim 1 , wherein the circularly polarized incident beam can be rastered relative to the processing substrate.
using polarisation elements · CPC title
with measurement of absorption or reflection · CPC title
with measurement of polarization · CPC title
Electric circuits {(for command of an exposure part G03B7/02)} · CPC title
Birefringent or phase retarding elements (G02B5/3008, G02B5/3016 take precedence; systems for polarisation control G02B27/286; manufacturing phase modulating patterns by lithographic processes G03F7/001) · CPC title
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