Showerhead for providing multiple materials to a process chamber
US-2020048767-A1 · Feb 13, 2020 · US
US11911780B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11911780-B2 |
| Application number | US-201916695531-A |
| Country | US |
| Kind code | B2 |
| Filing date | Nov 26, 2019 |
| Priority date | Nov 29, 2018 |
| Publication date | Feb 27, 2024 |
| Grant date | Feb 27, 2024 |
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Official abstract text for this publication.
A washcoat showerhead for depositing a washcoat onto a face of a substrate comprises a housing having an inlet for receiving the washcoat, a showerhead plate and a baffle. The housing and showerhead plate define a showerhead cavity with the baffle located within the showerhead cavity. The showerhead plate has a plurality of nozzle apertures for discharging the washcoat towards the face of the substrate. The baffle comprises an impermeable central body and a plurality of arms extending from the impermeable central body, the plurality of arms defining a plurality of flow apertures circumferentially arranged around the impermeable central body.
Opening claim text (preview).
The invention claimed is: 1. A washcoat showerhead for depositing a liquid washcoat onto a face of a substrate located below the washcoat showerhead, the washcoat showerhead comprising: a housing having an inlet for receiving the liquid washcoat; a showerhead plate; and a baffle; the housing and showerhead plate defining a showerhead cavity and the baffle being located within the showerhead cavity; the showerhead plate comprising a plurality of nozzle apertures for discharging the liquid washcoat towards the face of the substrate; the baffle comprising an impermeable central body and a plurality of arms extending from the impermeable central body, the plurality of arms defining a plurality of flow apertures circumferentially arranged around the impermeable central body; the baffle being mounted in the showerhead cavity such that the impermeable central body is spaced from the showerhead plate; the impermeable central body being aligned below the inlet of the housing such that liquid washcoat entering the showerhead cavity through the inlet is diverted to flow around the impermeable central body and through the plurality of flow apertures before being discharged through the nozzle apertures of the showerhead plate; wherein an upper face of the impermeable central body facing the inlet comprises a protrusion. 2. The washcoat showerhead as claimed in claim 1 , wherein the baffle comprises four arms extending from the impermeable central body, the four arms defining four flow apertures circumferentially arranged around the impermeable central body. 3. The washcoat showerhead as claimed in claim 1 , wherein the plurality of arms extend radially from the impermeable central body. 4. The washcoat showerhead as claimed in claim 1 , wherein the impermeable central body is circular in shape in plan view. 5. The washcoat showerhead as claimed in claim 1 , wherein the impermeable central body has a diameter greater than a diameter of the inlet to the housing; and optionally wherein a central longitudinal axis of the inlet and a central axis of the impermeable central body are coincident. 6. The washcoat showerhead as claimed in claim 1 , wherein the impermeable central body has a diameter of 20 to 55 mm; preferably 25 to 50 mm; more preferably selected to be 27, 35 or 50 mm. 7. The washcoat showerhead as claimed in claim 1 , wherein the inlet of the housing has an internal diameter of up to 25.4 mm (1 inch). 8. The washcoat showerhead as claimed in claim 1 , wherein the protrusion is a conical, or part-conical surface. 9. The washcoat showerhead as claimed n claim 1 , wherein the baffle is mounted to at least one of the housing and the showerhead plate. 10. The washcoat showerhead as claimed in claim 1 , wherein the baffle is mounted to mounting points of the housing which surround, but do not impinge on, the inlet of the housing. 11. The washcoat showerhead as claimed in claim 1 , wherein the baffle is mounted by fixatives extending between the plurality of arms and at least one of the housing and the showerhead plate. 12. The washcoat showerhead as claimed in claim 11 , wherein the fixatives extend from a distal end of each of the plurality of arms. 13. The washcoat showerhead as claimed in claim 11 , wherein the fixatives are located on a pitch circle diameter of 65 to 75 mm centred on a central axis of the impermeable central body. 14. The washcoat showerhead as claimed in claim 1 , wherein the showerhead cavity has a depth of 15 to 30 mm. 15. The washcoat showerhead as claimed in claim 1 , wherein the impermeable central body is spaced from the showerhead plate by a gap of 5 to 10 mm. 16. A substrate coating apparatus comprising the washcoat showerhead as claimed in claim 1 .
characterised by their outlet element; Mounting arrangements therefor · CPC title
Masking elements, i.e. elements defining uncoated areas on an object to be coated · CPC title
Coating heads with several outlets, e.g. aligned transversally to the moving direction of a web to be coated (B05C5/0254 takes precedence) · CPC title
performed by spraying · CPC title
the liquid or other fluent material flowing or being moved through the work; the work being filled with liquid or other fluent material and emptied · CPC title
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