Plasmonic metal/graphene heterostructures and related methods

US11908960B2 · US · B2

Patent metadata
FieldValue
Publication numberUS-11908960-B2
Application numberUS-201917255817-A
CountryUS
Kind codeB2
Filing dateJul 3, 2019
Priority dateJul 6, 2018
Publication dateFeb 20, 2024
Grant dateFeb 20, 2024

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  1. Title

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  2. Abstract

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  3. Assignees and inventors

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  4. Key dates

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  5. First independent claim

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  6. CPC / IPC classifications

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Abstract

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A method of making a plasmonic metal/graphene heterostructure comprises heating an organometallic complex precursor comprising a metal at a first temperature T1 for a first period of time t1 to deposit a layer of the metal on a surface of a heated substrate, the heated substrate in fluid communication with the precursor; and heating, in situ, the precursor at a second temperature T2 for a second period of time t2 to simultaneously form on the layer of the metal, a monolayer of graphene and a plurality of carbon-encapsulated metal nanostructures comprising the metal, thereby providing the plasmonic metal/graphene heterostructure. The heated substrate is characterized by a third temperature T3. The plasmonic metal/graphene heterostructures, devices incorporating the heterostructures, and methods of using the heterostructures are also provided.

First claim

Opening claim text (preview).

What is claimed is: 1. A method of making a plasmonic metal/graphene heterostructure, the method comprising: heating an organometallic complex precursor comprising a metal at a first temperature T 1 for a first period of time t 1 to deposit a layer of the metal on a surface of a heated substrate, the heated substrate in fluid communication with the precursor; and heating, in situ, the precursor at a second temperature T 2 for a second period of time t 2 to simultaneously form on the layer of the metal, a monolayer of graphene and a plurality of carbon-encapsulated metal nanostructures comprising the metal, thereby providing the plasmonic metal/graphene heterostructure, wherein the heated substrate is characterized by a third temperature T 3 . 2. The method of claim 1 , wherein T 1 <T 2 <T 3 . 3. The method of claim 2 , wherein the organometallic complex precursor is characterized by a vaporization temperature and a decomposition temperature and T 1 is greater than the vaporization temperature, T 2 is less than the decomposition temperature and T 3 is greater than the decomposition temperature. 4. The method of claim 1 , wherein t 1 <t 2 and t 1 . 5. The method of claim 1 , wherein the heating steps are carried out in the presence of a flowing gas. 6. The method of claim 1 , wherein the metal of the organometallic complex precursor is selected from Cu, Ag, Au, Ti, Zn, Co, Fe, and combinations thereof. 7. The method of claim 1 , wherein the carbon of the carbon-encapsulated metal nanostructures has a thickness consistent with that of a graphene monolayer. 8. The method of claim 1 , wherein the substrate is a silicon-containing substrate. 9. The method of claim 1 , wherein the deposited layer of metal is ultrathin having an average thickness of no more than 2 nm. 10. The method of claim 9 , wherein the deposited layer of metal is continuous. 11. The method of claim 1 , wherein the monolayer of graphene and the carbon of the plurality of carbon-encapsulated metal nanostructures provide a continuous carbon layer forming a continuous interface with each metal nanostructure of the plurality of carbon-encapsulated metal nanostructures and with the layer of the metal between neighboring metal nanostructures of the plurality of carbon-encapsulated metal nanostructures. 12. The method of claim 1 , wherein the formed monolayer of graphene is characterized by an I D /I G value of less than 0.2. 13. The method of claim 1 , wherein the carbon-encapsulated metal nanostructures of the plurality of carbon-encapsulated metal nanostructures have an average size in the range of 10 nm to 100 nm. 14. The method of claim 13 , wherein a deviation of sizes of the carbon-encapsulated metal nanostructures from the average size is no more than ±1%. 15. A plasmonic metal/graphene heterostructure comprising: a substrate having a surface; a layer of a metal on the surface of the substrate; and a monolayer of graphene and a plurality of carbon-encapsulated metal nanostructures comprising the metal on a surface of the layer of the metal. 16. The heterostructure of claim 15 , wherein the carbon of the carbon-encapsulated metal nanostructures has a thickness consistent with that of a graphene monolayer. 17. The heterostructure of claim 15 , wherein the substrate is a silicon-containing substrate. 18. The heterostructure of claim 15 , wherein the monolayer of graphene and the carbon of the plurality of carbon-encapsulated metal nanostructures provide a continuous carbon layer forming a continuous interface with each metal nanostructure of the plurality of carbon-encapsulated metal nanostructures and with the layer of the metal between neighboring metal nanostructures of the plurality of carbon-encapsulated metal nanostructures. 19. An optoelectronic device comprising the plasmonic metal/graphene heterostructure of claim 15 , a source configured to illuminate the heterostructure with electromagnetic radiation, and a detector configured to detect scattered light from the heterostructure. 20. A method of using a plasmonic metal/graphene heterostructure, the method comprising illuminating the plasmonic metal/graphene heterostructure of claim 15 with electromagnetic radiation to excite surface plasmons at a carbon-metal interface therein.

Assignees

Inventors

Classifications

  • of the semiconductor bodies, e.g. textured active layers · CPC title

  • H10F77/122Primary

    comprising only Group IV materials · CPC title

  • Optical elements or arrangements (surface textures H10F77/70) · CPC title

  • Manufacture or treatment of devices covered by this subclass (patterning processes to connect thin photovoltaic cells in integrated devices, or assemblies of multiple devices, having photovoltaic cells H10F19/33; manufacture or treatment of encapsulations or containers for integrated devices, or assemblies of multiple devices, having photovoltaic cells H10F19/80; manufacture or treatment of integrated devices, or assemblies of multiple devices, comprising at least one element in which radiation controls the flow of current H10F39/00) · CPC title

  • H10F77/306Primary

    for devices having potential barriers · CPC title

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What does patent US11908960B2 cover?
A method of making a plasmonic metal/graphene heterostructure comprises heating an organometallic complex precursor comprising a metal at a first temperature T1 for a first period of time t1 to deposit a layer of the metal on a surface of a heated substrate, the heated substrate in fluid communication with the precursor; and heating, in situ, the precursor at a second temperature T2 for a secon…
Who is the assignee on this patent?
Univ Kansas
What technology area does this patent fall under?
Primary CPC classification H10F77/122. Mapped technology areas include Electricity.
When was this patent published?
Publication date Tue Feb 20 2024 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
What related patents are in patentsdb?
We list 1 related publication on this page (citations in our corpus or others sharing the same primary CPC).