Container and method of preparing the same

Patent metadata

Field	Value
Publication number	US-11908709-B2
Application number	US-202016748826-A
Country	US
Kind code	B2
Filing date	Jan 22, 2020
Priority date	Jan 30, 2019
Publication date	Feb 20, 2024
Grant date	Feb 20, 2024

Abstract

A container for containing a raw material of a chemical liquid and a method of preparing a container are provided. The container at least includes an inner wall and solvent-treated surface of the inner wall. The method of preparing a container includes treating a surface of the inner wall with water and treating the surface the inner wall with an organic solvent.

First claim

What is claimed is:

1. A container for containing a raw material of a chemical liquid used for semiconductor manufacturing, the container comprising:
an inner wall, constructed with a stainless steel material or coated with a resin material; and
a solvent-treated surface of the inner wall, wherein the solvent-treated surface comes in contact with the raw material that includes a solvent having a content of iron (Fe) or calcium (Ca) atoms of 1 ppb or less and a content of organic impurities of 10 mass ppm or less during a course of being contained in the container,
wherein the solvent-treated surface comprises a water-treated surface, which is configured by treating a surface of the inner wall with only deionized water, or
wherein the solvent-treated surface comprises an organic solvent-treated surface, which is configured by treating a surface of the inner wall with only an organic solvent as the solvent included in the raw material, or
wherein the solvent-treated surface comprises a water-organic solvent-treated surface, which is configured by treating a surface of the inner wall with only deionized water, followed by treating the surface of the inner wall with only an organic solvent as the solvent included in the raw material.

2. The container of claim 1 , the stainless steel material used in constructing the inner wall has a 2B surface finish or higher.

3. The container of claim 2 , wherein the stainless steel material has an arithmetic average roughness Ra of about 0.5 μm or less.

4. The container of claim 1 , wherein the inner wall is coated with a phenolic resin lining material.

5. The container of claim 1 , wherein a material of the container includes stainless steel or carbon steel.

6. A method of preparing a container for containing a raw material of a chemical liquid, the method comprising:
providing a container having an inner wall that is constructed with a stainless steel material or coated with a resin material;
treating a surface of the inner wall with only water; and
treating the surface of the inner wall with only an organic solvent, wherein the organic solvent includes a solvent included in the raw material.

7. The method of claim 6 , wherein the treating of the surface of the inner wall with only the water comprises:
dousing an interior of the container with only the water;
allowing the water to remain in the container for a first time period;
draining the water from the container; and
drying the container.

8. The method of claim 6 , wherein the treating of the surface of the inner wall with only the organic solvent comprises:
fully or partially filling the container with only the organic solvent;
agitating or sloshing the organic solvent in the container;
allowing the organic solvent to remain in the container for a second time period;
draining the organic solvent from the container; and
drying the container.

9. The method of claim 6 , wherein the treating of the surface of the inner wall with only the organic solvent is performed after the treating of the surface of the inner wall with only the water is completed.

10. The method of claim 9 , wherein the treating of the surface of the inner wall with only the water is performed at least once.

11. The method of claim 9 , wherein the treating of the surface of the inner wall with only the organic solvent is performed at least once.

12. The method of claim 9 , wherein a number of particles having a size of 40 nm or more is 100 or less per 1 ml of the organic solvent used in the treating of the surface of the inner wall.

13. The method of claim 6 , wherein the water used in treating the surface of the inner wall is deionized water having a resistivity up to 18 meg Ohms.

14. The method of claim 6 , wherein the organic solvent used in treating surface of the inner wall has a content of iron (Fe) or calcium (Ca) atoms of 1 ppb or less and a content of organic impurities of 10 mass ppm or less.

15. The method of claim 6 , wherein the stainless steel material used in constructing the inner wall has a 2B surface finish or higher, and an arithmetic average roughness Ra of about 0.5 μm or less.

16. The method of claim 6 , wherein the resin material used in coating the inner wall comprises a phenolic resin.

17. The method of claim 6 , wherein the container is constructed with stainless steel or carbon steel.

18. The method of claim 6 , wherein the organic solvent is select from the group consisting of methanol, ethanol, 1-propanol, isopropanol, monomethyl ether, propylene glycol monoethyl ether, propylene glycol monomethyl ether, propylene glycol monopropyl ether, propylene glycol monomethyl ether acetate, ethyl lactate, methyl methoxypropionate, cyclopentanone, cyclohexanone, γ-butyrolactone, diisoamyl ether, butyl acetate, 4-methyl-2-pentanol, and a combination thereof.

Assignees

• Fujifilm Electronic Mat Usa Inc

Inventors

• Cole-Yocom Marcia
• Hinzie Bryan

Classifications

• H10P72/0404 Primary

  for general liquid treatment, e.g. etching followed by cleaning · CPC title

• B65D23/02

  Linings or internal coatings · CPC title

• B65D1/0215

  multilayered (B65D81/3837 takes precedence) · CPC title

• B65D33/008

  Individual filled bags or pouches connected together (B65D33/001, B65D33/002 take precedence) · CPC title

• B65D1/095 Primary

  made of flexible material · CPC title