Flanged joint and method of fluidly connecting two components

Patent metadata

Field	Value
Publication number	US-11906087-B2
Application number	US-202017025268-A
Country	US
Kind code	B2
Filing date	Sep 18, 2020
Priority date	Sep 18, 2020
Publication date	Feb 20, 2024
Grant date	Feb 20, 2024

Abstract

A flanged joint is described. The flanged joint has a first flange member with a first sealing surface and a second flange member with a second sealing surface. The flanged joint further has a hollow-metal gasket between the first flange member and the second flange member, and a spacer between the first flange member and the second flange member. The spacer defines a minimum distance between the first flange member and the second flange member. The flanged joint can be configured to seal a metal-conveying volume.

First claim

The invention claimed is:

1. A flanged joint, comprising:
a first flange member having a first flat sealing surface, the first flat sealing surface extending from a radial inward edge of the first flange member to a radially outermost edge of the first flange member;
a second flange member having a second flat sealing surface, the second flat sealing surface extending from a radial inward edge of the second flange member to a radially outermost edge of the second flange member;
a hollow-metal gasket between the first flange member and the second flange member, wherein the hollow metal gasket includes a material that is chemically resistant to an alkali-metal and an inert metal coating; and wherein the hollow-metal gasket is a hollow metal O-ring; and
a spacer between the first flat sealing surface of the first flange member and the second flat sealing surface of the second flange member, the spacer defining a minimum distance between the first flange member and the second flange member, wherein:
the first flange member includes a first plurality of fastener openings, the second flange member includes a second plurality of fastener openings, wherein each fastener opening of the first plurality of fastener openings faces a fastener opening of the second plurality of fastener openings,
the flange joint comprises a plurality of fasteners for pressing the first flange member and the second flange member towards each other, wherein each fastener is disposed in a fastener opening of the first plurality of fastener openings and in a fastener opening of the second plurality of fastener openings, and
the plurality of fasteners are in contact with an exterior surface of the spacer.

2. The flanged joint according to claim 1 , wherein the flanged joint is configured to seal a metal-conveying volume.

3. The flanged joint according to claim 2 , wherein the metal-conveying volume is configured to receive fluid lithium or gaseous lithium.

4. The flanged joint according to claim 3 , wherein the metal-conveying volume is an interior volume, the interior volume being sealed off from an exterior volume, wherein the flanged joint is configured to withstand a pressure difference between the interior volume and the exterior volume of up to 200 mbar.

5. The flanged joint according to claim 1 , wherein the spacer includes a material that is chemically resistant to an alkali-metal.

6. The flanged joint according to claim 1 , wherein the hollow-metal gasket forms a seal between the first sealing surface and the second sealing surface.

7. The flanged joint according to claim 1 , wherein the hollow-metal gasket includes an inert gas.

8. The flanged joint according to claim 1 , wherein the hollow-metal gasket and/or the spacer comprises at least one of a nickel/chromium alloy, tantalum and molybdenum.

9. The flanged joint according to claim 1 , wherein the inert metal coating includes gold, silver, nickel or copper.

10. The flanged joint according to claim 1 , wherein the flanged joint is operable in a temperature range from 15° C. to 950° C.

11. A method of fluidly connecting a first component to a second component, the method comprising:
connecting a first flange member having a first flat sealing surface to the first component, the first flat sealing surface extending from a radial inward edge of the first flange member to a radially outermost edge of the first flange member;
connecting a second flange member having a second flat sealing surface to the second component, the second flat sealing surface extending from a radial inward edge of the second flange member to a radially outermost edge of the second flange member;
arranging a hollow-metal gasket between the first flange member and the second flange member, wherein the hollow metal gasket includes a material that is chemically resistant to an alkali-metal and an inert metal coating;
arranging a spacer between the first flat sealing surface of the first flange member and the second flat sealing surface of the second flange member; and connecting the first flange member to the second flange member, wherein
the hollow-metal gasket forms a seal between the first sealing surface and the second sealing surface, and wherein

the spacer defines a minimum distance between the first flange member and the second flange member, wherein:
the first flange member includes a first plurality of fastener openings, the second flange member includes a second plurality of fastener openings, wherein each fastener opening of the first plurality of fastener openings faces a fastener opening of the second plurality of fastener openings,
the flange joint comprises a plurality of fasteners for pressing the first flange member and the second flange member towards each other, wherein each fastener is disposed in a fastener opening of the first plurality of fastener openings and in a fastener opening of the second plurality of fastener openings, and
the plurality of fasteners are in contact with an exterior surface of the spacer.

12. The method according to claim 11 , the method further comprising:
conveying one of the group consisting of liquid metal, gaseous metal, liquid alkali metal, gaseous alkali metal, liquid alkaline earth metal, gaseous alkaline earth metal, liquid lithium, and gaseous lithium from the first component to the second component.

13. The method according to claim 11 , the method further comprising:
pressing the first flange member and the second flange member towards each other.

14. The method according to claim 13 , wherein a pressing force is provided by the plurality of fasteners connecting the first flange member to the second flange member.

15. The method according to claim 11 , wherein the hollow-metal gasket is compressed to provide an elastic deformation of the hollow metal gasket.

16. The method according to claim 15 , wherein the hollow-metal gasket is compressed between the first flange member and the second flange member,
and wherein the difference in diameter of the uncompressed hollow-metal gasket and the compressed hollow-metal gasket in the direction of the compressing force is 0.2 mm or less.

17. The method according to claim 11 , wherein the first component and/or the second component is a pipe, a crucible, a reservoir, a nozzle, a diffuser, a showerhead and/or a wall portion of a processing chamber.

Assignees

• Applied Materials Inc

Inventors

• Kremser Lukas
• Sauer Andreas
• Bangert Stefan

Classifications

• F16J15/127

  the reinforcement being a compression stopper · CPC title

• F16L23/026

  by welding · CPC title

• F16L23/024

  characterised by how the flanges are joined to, or form an extension of, the pipes · CPC title

• F16L23/20 Primary

  made exclusively of metal · CPC title

• F16L23/032

  characterised by the shape or composition of the flanges · CPC title