Vacuum pump
US-2022397124-A1 · Dec 15, 2022 · US
Vacuum pump and linked-type thread groove spacer
US11898565B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11898565-B2 |
| Application number | US-202017611362-A |
| Country | US |
| Kind code | B2 |
| Filing date | May 22, 2020 |
| Priority date | May 31, 2019 |
| Publication date | Feb 13, 2024 |
| Grant date | Feb 13, 2024 |
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- Title
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- Abstract
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- Assignees and inventors
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- First independent claim
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- CPC / IPC classifications
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- Citations and related patents
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Abstract
Official abstract text for this publication.
A vacuum pump which can prevent lowering of an exhaust performance of the vacuum pump, even if a linked-type thread groove spacer is fastened by a fixing bolt, is provided.The linked-type thread groove spacer according to an embodiment of the present invention includes a structure for linking a Siegbahn pump portion and a thread-groove pump portion. When this linked-type thread groove spacer is to be fastened, a countersunk hole is provided in advance in an exhaust channel portion, and the linked-type thread groove spacer is fastened to a base by a fixing bolt. As a result, a head part of the fixing bolt does not protrude to the exhaust channel, and the head part of the fixing bolt does not make resistance against an exhaust gas. Thus, lowering of the exhaust performance of the vacuum pump can be suppressed.
First claim
Opening claim text (preview).
What is claimed is: 1. A vacuum pump comprising: a casing in which an inlet port or an outlet port is formed, a stator component enclosed in the casing, a Siegbahn pump portion comprising a stator comprising a spiral groove having a first ridge portion, a second ridge portion and a root portion positioned between an outer side in a radial direction of the first ridge portion and inner side in the radial direction of the second ridge portion, and a thread-groove pump portion, wherein a linked-type thread groove spacer comprises the Siegbahn pump portion and the thread-groove pump portion and the linked-type thread groove spacer links the Siegbahn pump portion and the thread-groove pump portion; and a countersunk hole is provided in an exhaust channel surface of the root portion in the Siegbahn pump portion in the linked-type thread groove spacer, and the linked- type thread groove spacer and the casing or the stator component are fastened by a fixing bolt disposed in the countersunk hole wherein the countersunk hole is positioned closer to the outer side of the first ridge portion than the inner side of the second ridge portion. 2. The vacuum pump according to claim 1 , wherein a heating means for heating the thread-groove pump portion is provided on the casing or the stator component; and the fixing bolt is disposed in contact with a high-temperature portion of the casing or the stator component heated by the heating means. 3. The vacuum pump according to claim 2 , wherein the fixing bolt has a material with greater heat conductivity than that of an iron bolt. 4. The vacuum pump according to claim 1 , wherein the fixing bolt is covered with a cap. 5. A linked-type thread groove spacer which is used in a vacuum pump having a casing in which an inlet port or an outlet port is formed, and a stator component enclosed in the casing, the linked-type thread groove spacer comprising: a Siegbahn pump portion comprising a spiral groove comprising a first ridge portion, a second ridge portion and a root portion positioned between an outer side in a radial direction of the first ridge portion and inner side in the radial direction of the second ridge portion; and a thread-groove pump portion linked to the Siegbahn pump portion, wherein the linked-type thread groove spacer has a countersunk hole for a fixing bolt provided in an exhaust channel surface of the root portion in the Siegbahn pump portion, and is fastened to the casing or the stator component by the fixing bolt, wherein the countersunk hole is positioned closer to the outer side of the first ridge portion than the inner side of the second ridge portion.
Assignees
Inventors
Classifications
especially adapted for elastic fluid pumps · CPC title
- F04D19/042Primary
Turbomolecular vacuum pumps · CPC title
- F04D19/044Primary
Holweck-type pumps · CPC title
heat insulation or conduction · CPC title
Mounting or removal of fans · CPC title
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Frequently asked questions
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- What does patent US11898565B2 cover?
- A vacuum pump which can prevent lowering of an exhaust performance of the vacuum pump, even if a linked-type thread groove spacer is fastened by a fixing bolt, is provided.The linked-type thread groove spacer according to an embodiment of the present invention includes a structure for linking a Siegbahn pump portion and a thread-groove pump portion. When this linked-type thread groove spacer is…
- Who is the assignee on this patent?
- Edwards Japan Ltd
- What technology area does this patent fall under?
- Primary CPC classification F04D19/042. Mapped technology areas include Mechanical Engineering.
- When was this patent published?
- Publication date Tue Feb 13 2024 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 4 related publications on this page (citations in our corpus or others sharing the same primary CPC).