Manufacturing apparatus and manufacturing method of porous glass base material for optical fiber

Patent metadata

Field	Value
Publication number	US-11897807-B2
Application number	US-202217872376-A
Country	US
Kind code	B2
Filing date	Jul 25, 2022
Priority date	Jun 11, 2019
Publication date	Feb 13, 2024
Grant date	Feb 13, 2024

Abstract

A porous glass base material manufacturing apparatus for an optical fiber includes: a liquid mass flow controller for controlling a flow rate of raw material liquid of an organic siloxane; a vaporizer for mixing raw material liquid and carrier gas to vaporize raw material liquid to form mixed gas; a raw material liquid nozzle for ejecting raw material liquid into the vaporizer; a carrier gas supply pipe for supplying carrier gas into the vaporizer; a raw material liquid pipe for introducing raw material liquid into the nozzle; a burner for combusting mixed gas with combustible gas and combustion supporting gas to produce SiO2 particles; a mixed gas pipe for supplying mixed gas to the burner; an open/close valve on a flow path of the raw material liquid pipe; and a purge gas supply pipe that joins the raw material liquid pipe between the valve and the raw material liquid nozzle.

First claim

What is claimed is:

1. A porous glass base material manufacturing apparatus for an optical fiber comprising:
a liquid mass flow controller for controlling a flow rate of a raw material liquid of an organic siloxane;
a vaporizer for mixing the raw material liquid and a carrier gas to vaporize the raw material liquid to form a mixed gas in which a raw material gas and the carrier gas are mixed;
a raw material liquid nozzle for ejecting the raw material liquid into the vaporizer;
a carrier gas supply pipe for supplying the carrier gas into the vaporizer;
a raw material liquid pipe for introducing the raw material liquid supplied from the liquid mass flow controller into the raw material liquid nozzle;
a burner for combusting the mixed gas together with a combustible gas and a combustion supporting gas to produce SiO 2 particles;
a mixed gas pipe for supplying the mixed gas to the burner;
an open/close valve provided on a flow path of the raw material liquid pipe; and
a purge gas supply pipe that joins the raw material liquid pipe between the open/close valve and the raw material liquid nozzle to supply purge gas.

2. The manufacturing apparatus according claim 1 further comprises an adjuster to change a flow rate of the purge gas supplied to the purge gas supply pipe.

3. The manufacturing apparatus according to claim 1 further comprises an adjuster to change a flow rate of the carrier gas supplied to the carrier gas supply pipe.

4. The manufacturing apparatus according to claim 1 further comprises an oxygen gas supply pipe that joins an oxygen gas in the middle of the mixed gas pipe.

5. The manufacturing apparatus according to claim 4 , wherein when a flow rate of the purge gas supplied from the purge gas supply pipe is L P and a flow rate of the oxygen gas supplied from the oxygen gas supply pipe is L O2 , the manufacturing apparatus is operable to supply the purge gas and the oxygen gas from the purge gas supply pipe and the oxygen gas supply pipe, respectively, so that L O2 /L P >14 is satisfied, in a state in which the open/close valve is closed and the supply of the raw material is stopped.

6. The manufacturing apparatus according to claim 1 , wherein when a flow rate of the purge gas supplied from the purge gas supply piping is L P and a flow rate of the carrier gas supplied from the carrier gas supply pipe is L C , the manufacturing apparatus is operable to supply the purge gas and the carrier gas from the purge gas supply pipe and the carrier gas supply pipe, respectively, so that L C /L P >10 is satisfied, in a state in which the open/close valve is closed and the supply of the raw material is stopped.

Assignees

• Shinetsu Chemical Co

Inventors

• Noda Naoto
• Iinuma Hitoshi

Classifications

• C03B37/01433 Primary

  for delivering and depositing additional reactants as liquids or solutions, e.g. for solution doping of the porous glass preform · CPC title

• C03B37/016

  by a liquid phase reaction process, e.g. through a gel phase · CPC title

• C03B37/07

  Controlling or regulating ({C03B37/0253 takes precedence } ; controlling or regulating in general G05) · CPC title

• G02B1/046

  characterised by the core material · CPC title

• C03B37/01815 Primary

  Reactant deposition burners or deposition heating means · CPC title