Composite waveguiding structures including semiconductor fins
US-10670804-B1 · Jun 2, 2020 · US
US11896347B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11896347-B2 |
| Application number | US-202117462165-A |
| Country | US |
| Kind code | B2 |
| Filing date | Aug 31, 2021 |
| Priority date | Sep 11, 2020 |
| Publication date | Feb 13, 2024 |
| Grant date | Feb 13, 2024 |
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An optical waveguide-transmitter apparatus, an ultrasonic transceiver apparatus, an ultrasonic imaging apparatus and an associated production method are disclosed. The optical waveguide-transmitter apparatus includes a substrate made of a semiconductor material; a carrier layer arranged on the substrate; and at least one transmitter-optical waveguide made of a semiconductor material with a refractive index greater than a refractive index of the carrier layer. At least one side of the waveguide is at least partially surrounded by the carrier layer. The waveguide is configured at an end facing toward the examination region for a decoupling of the light beams into the examination region for generating the ultrasonic waves in the examination region by way of the decoupled light beams for an optoacoustic imaging and/or has, on the end facing toward the examination region, an optical absorption layer for such a conversion of the light beams.
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What is claimed is: 1. An optical waveguide-transmitter apparatus for imaging an examination region via ultrasonic waves generated by light beams, comprising: a substrate, the substrate including a first semiconductor material; a carrier layer, the carrier layer being on the substrate; at least one transmitter-optical waveguide, the at least one transmitter-optical waveguide including a second semiconductor material with a refractive index greater than a refractive index of the carrier layer, and the at least one transmitter-optical waveguide including at least one longitudinal side surrounded by the carrier layer; and a further transmitter-optical waveguide, the further transmitter-optical waveguide including at least one longitudinal side surrounded by the carrier layer, wherein the at least one transmitter-optical waveguide and the further transmitter-optical waveguide are configured to guide the light beams simultaneously, the at least one transmitter-optical waveguide includes an optical absorption layer configured to convert the light beams to generate ultrasonic waves which are decoupled into the examination region for an ultrasonic imaging process, the optical absorption layer being at an end of the at least one transmitter-optical waveguide facing toward the examination region, and the further transmitter-optical waveguide is configured for an optoacoustic imaging process. 2. The optical waveguide-transmitter apparatus of claim 1 , wherein the light beams are laser beams. 3. The optical waveguide-transmitter apparatus of claim 1 , wherein: the further transmitter-optical waveguide including an end configured to decouple the light beams into the examination region for generating the ultrasonic waves in the examination region by way of the decoupled light beams for the optoacoustic imaging process. 4. The optical waveguide-transmitter apparatus of claim 1 , wherein the first semiconductor material and the second semiconductor material include at least one of silicon, germanium, gallium, phosphorus, Ti:LiNbO 3 or antimony. 5. The optical waveguide-transmitter apparatus of claim 1 , wherein the carrier layer surrounds each longitudinal side of at least one section of the at least one transmitter-optical waveguide. 6. The optical waveguide-transmitter apparatus of claim 1 , further comprising: a multiplexer, the multiplexer being configured to multiplex the light beams guided in the at least one transmitter-optical waveguide. 7. An ultrasonic transceiver apparatus, comprising: the optical waveguide-transmitter apparatus of claim 1 ; and an ultrasonic receiver-optical waveguide configured to receive the ultrasonic waves reflected in the examination region, the ultrasonic receiver-optical waveguide including at least one longitudinal side at least partially surrounded by the carrier layer of the optical waveguide-transmitter apparatus. 8. The ultrasonic transceiver apparatus of claim 7 , further comprising: a screening element in a region between the end of the at least one transmitter-optical waveguide facing toward the examination region and an end of the ultrasonic receiver-optical waveguide facing toward the examination region. 9. The ultrasonic transceiver apparatus of claim 7 , wherein the ultrasonic receiver-optical waveguide includes, a metallic reflection layer, a first Bragg grating with a grating period, a second Bragg grating with the grating period, and a discontinuous portion between the first Bragg grating and the second Bragg grating. 10. The ultrasonic transceiver apparatus of claim 7 , wherein the ultrasonic receiver-optical waveguide is between the at least one transmitter-optical waveguide and the further transmitter-optical waveguide, and the ultrasonic transceiver apparatus further comprises: a further ultrasonic receiver-optical waveguide, the at least one transmitter-optical waveguide being between the ultrasonic receiver-optical waveguide and the further ultrasonic receiver-optical waveguide. 11. The ultrasonic transceiver apparatus of claim 7 , wherein the at least one transmitter-optical waveguide, the ultrasonic receiver-optical waveguide and the further transmitter-optical waveguide are arranged two-dimensionally with respect to the examination region. 12. An ultrasonic imaging apparatus, comprising: the ultrasonic transceiver apparatus of claim 7 ; a control apparatus; and a light source apparatus, the light source apparatus being connected, via at least one fiber, to the at least one transmitter-optical waveguide, wherein the control apparatus is configured to actuate the light source apparatus to enable the at least one transmitter-optical waveguide to guide the light beams during operation of the ultrasonic imaging apparatus. 13. The ultrasonic imaging apparatus of claim 12 , wherein the light source apparatus includes a laser. 14. An arrangement of the optical waveguide-transmitter apparatus of claim 1 in a main magnetic field of a magnetic resonance tomograph or in an X-ray beam path of an X-ray device. 15. A method for producing an optical waveguide-transmitter apparatus, comprising: providing a substrate including a semiconductor material; arranging a carrier layer on the substrate; and mounting at least one transmitter-optical waveguide on the carrier layer such that at least one longitudinal side of the at least one transmitter-optical waveguide is at least partially surrounded by the carrier layer. 16. The optical waveguide-transmitter apparatus of claim 2 , wherein: the further transmitter-optical waveguide including an end configured to decouple the light beams into the examination region for generating the ultrasonic waves in the examination region by way of the decoupled light beams for the optoacoustic imaging process. 17. The optical waveguide-transmitter apparatus of claim 2 , wherein the first semiconductor material and the second semiconductor material include at least one of silicon, germanium, gallium, phosphorus, Ti:LiNbO 3 or antimony. 18. The optical waveguide-transmitter apparatus of claim 2 , further comprising: a multiplexer, the multiplexer being configured to multiplex the light beams guided in the at least one transmitter-optical waveguide. 19. An ultrasonic transceiver apparatus, comprising: the optical waveguide-transmitter apparatus of claim 2 ; and an ultrasonic receiver-optical waveguide to receive ultrasonic waves reflected in the examination region, the ultrasonic receiver-optical waveguide including at least one longitudinal side at least partially surrounded by the carrier layer of the optical waveguide-transmitter apparatus. 20. The ultrasonic transceiver apparatus of claim 8 , wherein the ultrasonic receiver-optical waveguide includes, a metallic reflection layer, a first Bragg grating with a grating period, a second Bragg grating with the grating period, and a discontinuous portion between the first Bragg grating and the second Bragg grating. 21. The ultrasonic transceiver apparatus of claim 8 , wherein the ultrasonic receiver-optical waveguide is between the at least one transmitter-optical waveguide and the further transmitter-optical waveguide, and the ultrasonic transceiver apparatus further comprises: a further ultrasonic receiver-optical waveguide, the at least one transmitter-optical waveguide being between the ultrasonic receiver-optical waveguide and the further ultrasonic receiver-optical waveguide. 22. The ultrasonic transceiver app
by applying light and detecting acoustic waves, i.e. photoacoustic measurements · CPC title
Control of the diagnostic device · CPC title
with opto-acoustic detection, e.g. for gases or analysing solids · CPC title
Refractive index modulation gratings, e.g. Bragg gratings · CPC title
related to combined acquisition of different diagnostic modalities · CPC title
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