Charged particle beam lens apparatus, charged particle beam column, and charged particle beam exposure apparatus
US-2017213689-A1 · Jul 27, 2017 · US
US11896041B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11896041-B2 |
| Application number | US-201916971160-A |
| Country | US |
| Kind code | B2 |
| Filing date | Feb 20, 2019 |
| Priority date | Feb 20, 2018 |
| Publication date | Feb 13, 2024 |
| Grant date | Feb 13, 2024 |
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A device(s) and method for pasteurizing and/or sterilizing particulate material using an electron beam. The device ( 10 ) includes at least one electron source ( 20 ) for generating an electron beam, a treatment zone ( 19 ) in which the material, particularly a freely falling material, can be pasteurized and/or sterilized by the electron beam, and a material channel ( 21 ) arranged in the region of the treatment zone ( 19 ) in which the material can be pasteurized and/or sterilized by the electron beam. A planar protective element ( 23 ), which is at least partially permeable by the electron beam, is arranged between the electron source ( 20 ) and the material channel ( 21 ). The device ( 10 ) includes a holding frame ( 120 ) which holds the protective element ( 23 ) and which has a cavity ( 121 ) through which a cooling fluid can flow.
Opening claim text (preview).
The invention claimed is: 1. An apparatus for pasteurizing and/or sterilizing particulate material, comprising: at least two electron sources for generating an electron beam, a treatment zone, in which the material, freely falling, can be pasteurized and/or sterilized by means of the electron beam, a material channel arranged in a region of the treatment zone, in which the material can be pasteurized and/or sterilized by means of the electron beam, wherein the at least two electron sources are arranged opposite each other with respect to the freely falling material, two flat protective elements arranged between the at least two electron sources and the material channel, wherein each flat protective element is at least partially transparent to the electron beam, and the apparatus includes at least one holding frame which holds the two flat protective elements and which has a cavity through which a cooling fluid can flow, the apparatus comprising a cassette holder and a cassette with the at least one holding frame for the two flat protective elements, wherein the cassette contains the complete material channel. 2. The apparatus according to claim 1 , wherein the two flat protective elements consist of a metal. 3. The apparatus according to claim 1 , wherein the cavity is formed as a closed tube. 4. The apparatus according to claim 3 , wherein the closed tube has a diameter of 3-8 mm. 5. The apparatus according to claim 1 , wherein the two flat protective elements are formed as protective films. 6. The apparatus according to claim 1 , wherein the apparatus has at least one secondary channel, through which a fluid can flow, which extends at least partially between the at least two electron sources and the material channel and is fluid-separated from the material channel. 7. The apparatus according to claim 6 , wherein the two flat protective elements separate the material channel from the secondary channel. 8. The apparatus according to claim 6 , wherein the secondary channel is arranged at least partially between the at least two electron sources and the two flat protective elements. 9. The apparatus according to claim 1 , wherein each of the two flat protective elements comprises at least one thickening extending along a main plane of the flat protective element and substantially perpendicular to a material flow direction. 10. The apparatus according to claim 9 , wherein the two flat protective elements are protective films. 11. The apparatus according claim 1 , wherein the apparatus includes a cooling device with two interconnected cooling circuits, and a cooling fluid can be supplied to the at least one holding frame by a first cooling circuit and can be supplied to the at least two electron sources by a second cooling circuit. 12. The apparatus according to claim 1 , the apparatus including at least one fan directed towards the two flat protective elements for further cooling the two flat protective elements. 13. The apparatus according to claim 1 , wherein the at least one holding frame is an integral component of the cassette. 14. The apparatus according to claim 1 , wherein the at least one holding frame is detachably received or receivable in the cassette. 15. The apparatus according to claim 1 , wherein the cassette contains a pressure measuring device. 16. The apparatus according to claim 1 , wherein the at least two electron sources are movable relative to the cassette holder in such a way that the at least two electron sources can be moved away from the cassette. 17. The apparatus according to claim 16 , wherein the at least two electron sources are pivotable and/or displaceable. 18. The apparatus according to claim 1 , wherein the cassette comprises a cavity, which is designed as a continuous tube and serves to cool both of the two flat protective elements and the cassette. 19. A method for pasteurizing and/or sterilizing particulate material with an apparatus according to claim 13 , comprising the following steps: a) Generating an electron beam by means of the at least two electron sources, b) Pasteurization and/or sterilization of the material by means of the electron beam in the treatment zone, and c) Passing a cooling fluid through the cavity of the at least one holding frame to cool the two flat protective elements. 20. A method according to claim 19 , wherein the cooling fluid has a temperature in a range of 15° C. to 43° C. when entering the cavity. 21. A method according to claim 19 , whereby the cooling fluid is passed through the cavity with a volume flow in the range of 3 l/min to 5 l/min.
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