Apparatus for supplying chemical liquid

Patent metadata

Field	Value
Publication number	US-11890864-B2
Application number	US-202117366322-A
Country	US
Kind code	B2
Filing date	Jul 2, 2021
Priority date	Jul 7, 2020
Publication date	Feb 6, 2024
Grant date	Feb 6, 2024

Abstract

An apparatus for supplying a chemical liquid may include a stage on which a substrate is placed, a chemical liquid discharging member and a direction changing member. The chemical liquid discharging member may supply the chemical liquid onto at least two first regions of the substrate for first pixels along a first direction. Additionally, the chemical liquid discharging member may supply the chemical liquid onto at least two second regions of the substrate for second pixels along a second direction. The direction changing member may change a direction of the substrate from the second direction to the first direction.

First claim

What is claimed is:

1. An apparatus for supplying a chemical liquid comprising: a stage on which a substrate is placed; a chemical liquid discharging member for supplying the chemical liquid onto at least two first regions of the substrate for first pixels along a first direction and for supplying the chemical liquid onto at least two second regions of the substrate for second pixels along a second direction; a direction changing member for changing a direction of the substrate from the second direction to the first direction; wherein the direction changing member includes a holding member for holding a portion of a bottom of the substrate and a rotating member for rotating the holding member; wherein the holding member provides a vacuum suction to the portion of the bottom of the substrate; and wherein the holding member simultaneously provides the vacuum suction and an air injection to the portion of the bottom of the substrate.

2. The apparatus for supplying a chemical liquid of claim 1 , further comprising a bending preventing member for preventing an edge portion of the substrate deviated from the state from being bent downwardly when the direction of the substrate is changed.

3. The apparatus for supplying a chemical liquid of claim 2 , wherein the bending preventing member provides an air injection to the edge portion of the substrate deviated from the state.

4. An apparatus for supplying a chemical liquid comprising: a stage on which a substrate having a relatively long side and a relatively short side is placed; a transferring member for holding an end portion of the relatively long side of the substrate or an end portion of the relatively short side of the substrate to transfer the substrate; a chemical liquid discharging member for supplying the chemical liquid onto at least two first regions of the substrate for first pixels along a first direction and for supplying the chemical liquid onto at least two second regions of the substrate for second pixels along a second direction; a direction changing member for changing a direction of the substrate from the second direction to the first direction; wherein the direction changing member includes a holding member for providing a vacuum suction to a central or peripheral portion of a bottom of the substrate and a rotating member for rotating the holding member; and wherein the holding member simultaneously provides the vacuum suction and an air injection to the bottom of the substrate.

5. The apparatus for supplying a chemical liquid of claim 4 , wherein the peripheral portion of the bottom of the substrate is separated from the relatively long side of the substrate and the relatively long short of the substrate by a same distance.

6. The apparatus for supplying a chemical liquid of claim 4 , further comprising a positioning member wherein when the transferring member grips an end portion of the relatively short side of the substrate instead of an end portion of the relatively long side of the substrate, or the end portion of the relatively long side of the substrate instead of the end portion of the relatively short side of the substrate as the substrate rotates, the positioning member adjusts a position of the substrate or a position of the transferring member such that the transferring member grips the end portion of the relatively long side of the substrate or the end portion of the relatively short side of the substrate when the end portion of the relatively long side of the substrate or the end portion of the relatively short side of the substrate deviates from the stage.

7. The apparatus for supplying a chemical liquid of claim 6 , wherein the positioning member includes a roller contacting the bottom of the substrate such that the substrate moves toward the transferring member.

8. The apparatus for supplying a chemical liquid of claim 4 , further comprising a bending preventing member for providing an air injection to an edge portion of the substrate deviated so as to prevent the edge portion of the substrate deviated from the state from being bent downwardly when the direction of the substrate is changed.

Assignees

• Semes Co Ltd

Inventors

• Ha Inseok
• Yang Jinhyuck
• Jang Jaeyoung

Classifications

• H10P72/78

  using vacuum or suction, e.g. Bernoulli chucks · CPC title

• H10P72/0448

  Apparatus for applying a liquid, a resin, an ink or the like · CPC title

• B41J11/0085 Primary

  Using suction for maintaining printing material flat (on rotatable drums B41J13/226) · CPC title

• B05B7/061

  with several liquid outlets discharging one or several liquids · CPC title

• B05B13/02

  Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work (B05B13/06 takes precedence) · CPC title