Control method, storage medium, imprint method, and article manufacturing method

Patent metadata

Field	Value
Publication number	US-11890791-B2
Application number	US-202117326465-A
Country	US
Kind code	B2
Filing date	May 21, 2021
Priority date	Jun 1, 2020
Publication date	Feb 6, 2024
Grant date	Feb 6, 2024

Abstract

A method of controlling a control apparatus for controlling a forming apparatus operable to form a layer of a formable material on a substrate is provided. The method includes acquiring data that specifies a drop amount and a drop position on the substrate of each of droplets, calculating a spread of each of the droplets assuming that a spread shape of each of the droplets is a polygon, and calculating a surface area of an overlapping region in which a region of a droplet that spreads into the polygon and a region of a recessed portion in the mold to be filled with the formable material overlap, and correcting, based on a result of the calculation, the data so that the recessed portion is filled with the formable material.

First claim

What is claimed is:

1. A method of controlling a control apparatus for controlling a forming apparatus operable to form a layer of a formable material on a substrate by supplying a plurality of droplets of the formable material onto the substrate and then causing the plurality of droplets to merge by causing the plurality of droplets supplied onto the substrate and a mold to come into contact, the method comprising:
acquiring data that specifies a drop amount and a drop position on the substrate of each of the plurality of droplets;
calculating a spread of each of the plurality of droplets assuming that a spread shape of each of the plurality of droplets, for when the plurality of droplets are supplied onto the substrate in accordance with the data and then the plurality of droplets and the mold are caused to come into contact, is a polygon, and calculating a surface area of an overlapping region in which a region of a droplet that spreads into the polygon and a region of a recessed portion in the mold to be filled with the formable material overlap; and
correcting, based on a result of the calculation, the data so that the recessed portion is filled by the formable material.

2. The control method according to claim 1 , wherein the data acquired in the acquisition specifies the drop amount and the drop position on the substrate of each of the plurality of droplets based on a predetermined reference at which occurrence of gas trapped by the plurality of droplets is to be reduced.

3. The control method according to claim 2 , wherein the data acquired in the acquisition specifies the drop position so that the plurality of droplets are positioned in a grid based on the predetermined reference.

4. The control method according to claim 1 , wherein the recessed portion is a recessed portion of a mark formed in the mold.

5. The control method according to claim 1 , wherein the correction obtains a value, which is a volume of the recessed portion multiplied by a ratio that the overlapping region covers a region of the recessed portion, as an insufficient amount of a droplet and then corrects the drop amount of the droplet in the data based on the insufficient amount.

6. The control method according to claim 5 , wherein the correction, in a case where the corrected drop amount of the droplet is not within a predetermined range, corrects the drop position of the droplet.

7. A method of controlling a control apparatus for controlling a forming apparatus operable to form a layer of a formable material on a substrate by supplying a plurality of droplets of the formable material onto the substrate and then causing the plurality of droplets to merge by causing the plurality of droplets supplied onto the substrate and a mold to come into contact, the method comprising:
acquiring data that specifies a drop amount and a drop position on the substrate of each of the plurality of droplets;
calculating a spread of each of the plurality of droplets assuming that a spread shape of each of the plurality of droplets, for when the plurality of droplets are supplied onto the substrate in accordance with the data and then the plurality of droplets and the mold are caused to come into contact, is a polygon, and calculating a surface area of an overlapping region in which a region of a droplet that spreads into the polygon and a region of a recessed portion in the substrate to be filled with the formable material overlap; and
correcting, based on a result of the calculation, the data so that the formable material fills the recessed portion.

8. A non-transitory computer-readable storage medium configured to store a program for causing a computer to execute each process in the control method according to claim 1 .

9. An imprint method comprising:
supplying a plurality of droplets of an imprint material that is a formable material on a substrate in accordance with data acquired by the control method according to claim 1 ;
causing the imprint material supplied onto the substrate and a mold to come into contact;
curing the imprint material in a state in which the imprint material and the mold are in contact; and
separating the cured imprint material and the mold.

10. An article manufacturing method comprising:
forming a pattern on the substrate in accordance with the imprint method according to claim 9 ; and
processing the substrate onto which the pattern has been formed,
wherein an article is manufactured from the processed substrate.

Assignees

• Canon Kk

Inventors

• Ishida Shingo

Classifications

• B29C43/58 Primary

  Measuring, controlling or regulating {(for bank adjustment in calendering B29C43/245)} · CPC title

• B29C59/002

  Component parts, details or accessories; Auxiliary operations · CPC title

• B29C59/022

  characterised by the disposition or the configuration, e.g. dimensions, of the embossments or the shaping tools therefor · CPC title

• B29C2043/5875

  the material feed to the moulds or mould parts, e.g. controlling feed flow, velocity, weight, doses · CPC title

• G03F7/0002 Primary

  Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping · CPC title