Methods for fabricating a chemical-mechanical polishing composition
US-9803106-B2 · Oct 31, 2017 · US
US11890621B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11890621-B2 |
| Application number | US-202117792891-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jan 15, 2021 |
| Priority date | Jan 15, 2020 |
| Publication date | Feb 6, 2024 |
| Grant date | Feb 6, 2024 |
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The present invention relates to a method for separating and collecting single aggregates from fumed silica, and a method for classifying a shape of the collected single aggregates, and more specifically, includes preparing a slurry in which fumed silica is dispersed in water; aerosolizing the slurry; and collecting single aggregates of the finned silica in the aerosol using the electric field.
Opening claim text (preview).
The invention claimed is: 1. A method for separating and collecting single aggregates from fumed silica, the method comprising: preparing a slurry in which fumed silica is dispersed in water; aerosolizing the slurry; and collecting single aggregates of the fumed silica in the aerosol using an electric field. 2. The method of claim 1 , wherein the preparing of the slurry in which the fumed silica is dispersed in the water includes: mixing the water and fumed silica powder to form the slurry; and adjusting a pH of the shiny to 10 to 12. 3. The method of claim 2 , wherein the mixing of the water and the fumed silica powder includes dispersing the fumed silica powder in the water using a rotor/stator. 4. The method of claim 2 , wherein the adjusting of the pH of the slurry includes adding a pH adjusting agent including potassium hydroxide (KOH) or sodium hydroxide (NaOH). 5. The method of claim 1 , wherein the slurry includes an abrasive in which the fumed silica is dispersed in the water. 6. The method of claim 1 , wherein the electric field is formed between first and second electrodes of a collection device, wherein a positive voltage is applied to the first electrode, and wherein the single aggregates in the aerosol moves toward the first electrode and is collected. 7. The method of claim 1 , further comprising performing an image analysis on the collected single aggregates. 8. A method for classifying a shape of single aggregates, the method comprising performing a shape classification algorithm on an image of the single aggregates obtained in claim 1 , wherein the shape classification algorithm includes: determining whether an aspect ratio of the single aggregates is greater than a first value; determining whether a roundness of the single aggregates is greater than a second value; and determining whether a solidity of the single aggregates is greater than a third value. 9. The method of claim 8 , wherein, when the aspect ratio of the single aggregates is less than the first value, the shape of the single aggregates is classified as a linear shape. 10. The method of claim 8 , wherein, when the aspect ratio of the single aggregates is greater than the first value and the roundness is greater than the second value, the shape of the single aggregates is classified as circular. 11. The method of claim 8 , wherein, when the aspect ratio of the single aggregates is greater than the first value, the roundness is less than the second value, and the solidity is greater than the third value, the shape of the single aggregates is classified as an elliptic shape. 12. The method of claim 8 , wherein, when the aspect ratio of the single aggregates is greater than the first value, the roundness is less than the second value, and the solidity is less than the third value, the shape of the single aggregates is classified as a branched shape.
Amassing particles by electric fields, e.g. agglomeration · CPC title
Addition of water; Heat exchange, e.g. by condensation · CPC title
Collecting-electrodes · CPC title
Checking the quality of the result or the well-functioning of the device · CPC title
flat, e.g. plates, discs, gratings · CPC title
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