Highly retentive polyamide hollow fiber membranes produced via controlled shrinkage

Patent metadata

Field	Value
Publication number	US-11890582-B2
Application number	US-201716312653-A
Country	US
Kind code	B2
Filing date	Jun 26, 2017
Priority date	Jun 27, 2016
Publication date	Feb 6, 2024
Grant date	Feb 6, 2024

Abstract

Described herein is a polyamide hollow fiber membrane and methods of making and using the hollow fiber membrane. The polyamide hollow fiber membrane has an isopropanol permeability of from about 5 L/m2 h bar to about 150 L/m2 h bar and a particle rejection percentage of about 100% for particles having a nominal diameter of from about 1 nm to about 25 nm. The polyamide hollow fiber membranes described herein are particularly useful for photoresist filtration, for example.

First claim

What is claimed is:

1. A polyamide hollow fiber membrane, having an isopropanol permeability of from about 5 L/m 2 h bar to about 150 L/m 2 h bar, a mean bubble point of from about 50 psi to about 150 psi as measured with HFE-7200, and a particle rejection percentage of about 100% for particles having a nominal diameter of from about 1 nm to about 25 nm after being wound onto and dried on a compressible frame.

2. The polyamide hollow fiber membrane of claim 1 , wherein the isopropanol permeability is from about 40 L/m 2 h bar to about 100 L/m 2 h bar.

3. The polyamide hollow fiber membrane of claim 1 , wherein the isopropanol permeability is from about 5 L/m 2 h bar to about 30 L/m 2 h bar.

4. The polyamide hollow fiber membrane of claim 1 , wherein the particle rejection percentage is about 100% for particles having a nominal diameter of from about 5 nm to about 25 nm.

5. The polyamide hollow fiber membrane of claim 1 , wherein the mean bubble point is from about 70 psi to about 95 psi.

6. The polyamide hollow fiber membrane of claim 1 , wherein the mean bubble point is from about 90 psi to about 150 psi.

7. The polyamide hollow fiber membrane of claim 1 , wherein the polyamide is polyamide 6, polyamide 6,6, polyamide 4,6, polyamide 6,10 or polyamide 12, or a combination of any of the foregoing.

8. The polyamide hollow fiber membrane of claim 7 , wherein the polyamide is polyamide 6.

9. The polyamide hollow fiber membrane of claim 1 , having an outer diameter of from about 400 microns to about 1,000 microns and having an inner diameter of from about 200 microns to about 800 microns.

10. The polyamide hollow fiber membrane of claim 1 , wherein the hollow fiber membrane has a thickness of from about 100 microns to about 250 microns.

11. The polyamide hollow fiber membrane of claim 1 , wherein the compressible frame comprises a rectangular frame and elastomeric material positioned along opposing edges of the frame, wherein the elastomeric material compresses as a wound hollow fiber shrinks along it length.

Assignees

• Entegris Inc

Inventors

• Woo Maybelle
• Townley Jeffrey E
• Cheng Kwok-Shun

Classifications

• B01D63/031

  Two or more types of hollow fibres within one bundle or within one potting or tube-sheet · CPC title

• B01D69/081

  characterised by the fibre diameter · CPC title

• B01D67/0016

  Coagulation · CPC title

• B01D69/087 Primary

  Details relating to the spinning process · CPC title

• B01D69/08 Primary

  Hollow fibre membranes (manufacture of hollow fibres D01D5/24, D01F1/08) · CPC title