High performance silicon electrodes having improved interfacial adhesion between binder and silicon
US-9564639-B2 · Feb 7, 2017 · US
US11876213B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11876213-B2 |
| Application number | US-202016752192-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jan 24, 2020 |
| Priority date | Jan 24, 2020 |
| Publication date | Jan 16, 2024 |
| Grant date | Jan 16, 2024 |
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A method of making an electrode material for an electrode in an electrochemical cell that cycles lithium ions is provided, where a protective coating is applied to an electrode precursor material. The electrode precursor may be a silicon-containing composition. The protective coating is selected from the group consisting of: an oxide-based coating, a fluoride-based coating, and a nitride-based coating. The method also includes lithiating the electrode precursor material in a continuous process. The continuous process is conducted in a reactor having a first reaction chamber and a second reaction chamber to form a lithiated electrode material comprising the protective coating.
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What is claimed is: 1. A method of making a negative electrode for an electrochemical cell that cycles lithium ions, the method comprising: applying a protective coating via an atomic layer deposition (ALD) process onto a silicon-based negative electrode precursor material in a first reaction chamber of a reactor, wherein the protective coating is selected from the group consisting of: aluminum oxide (Al 2 O 3 ), titanium dioxide (TiO 2 ), silicon dioxide (SiO 2 ), vanadium pentoxide (V 2 O 5 ), zirconium dioxide (ZrO 2 ), hafnium dioxide (HfO 2 ), tin oxide (SnO 2 ), zinc oxide (ZnO), lithium fluoride (LiF), aluminum fluoride (AlF 3 ), aluminum oxyfluoride (AlFO), aluminum nitride (AlN), silicon nitride (SiN), and combinations thereof; and then transferring the silicon-based negative electrode precursor material into a second reaction chamber of the reactor and lithiating the silicon-based negative electrode precursor material by a thermal evaporation process to form a negative electrode material comprising the protective coating and a lithium-containing coating, wherein applying the protective coating to the silicon-based negative electrode precursor material and lithiating the silicon-based negative electrode precursor material are performed in a continuous process respectively in the first reaction chamber and the second reaction chamber of the reactor. 2. The method of claim 1 , wherein a thickness of the lithium-containing coating is greater than or equal to about 1 micrometer to less than or equal to about 50 micrometers. 3. The method of claim 1 , wherein the first reaction chamber defines a plurality of deposition regions, and wherein each of the plurality of deposition regions comprises a first zone to introduce an oxidant and a second zone to introduce one or more ALD precursors. 4. The method of claim 1 , wherein the reactor is a vacuum chamber defining the first reaction chamber and the second reaction chamber. 5. The method of claim 1 , wherein a thickness of the protective coating is greater than or equal to about 1 nm to less than or equal to about 25 nm. 6. The method of claim 1 , wherein the method is conducted continuously in a roll-to-roll process. 7. The method of claim 1 , wherein the silicon-based negative electrode precursor material consists of silicon (Si), a Si—Sn alloy, a Si—Sn—Fe alloy, a Si—Sn—Al alloy, a Si—Fe—Co alloy, or a combination thereof. 8. The method of claim 1 , wherein the silicon-based negative electrode precursor material comprises a plurality of electroactive material particles. 9. The method of claim 8 , further comprising: mixing the negative electrode material with a polymeric binder to form a slurry, and then applying the slurry to a substrate. 10. The method of claim 8 , wherein the silicon-based negative electrode precursor material is a pre-formed composite electrode including a plurality of electroactive material particles distributed in a polymeric matrix. 11. The method of claim 1 , wherein the silicon-based negative electrode precursor material has a surface, and wherein, prior to applying the protective coating onto the silicon-based negative electrode precursor material, treating the surface with oxygen plasma or peroxide (H 2 O 2 ) to form a plurality of hydroxyl groups (OH) on the surface. 12. The method of claim 1 , wherein the protective coating is selected from the group consisting of: titanium dioxide (TiO 2 ), vanadium pentoxide (V 2 O 5 ), hafnium dioxide (HfO 2 ), tin oxide (SnO 2 ), zinc oxide (ZnO), aluminum oxyfluoride (AlFO), aluminum nitride (AlN), silicon nitride (SiN), and combinations thereof. 13. The method of claim 1 , wherein the protective coating is selected from the group consisting of: vanadium pentoxide (V 2 O 5 ), silicon nitride (SiN), and combinations thereof. 14. The method of claim 1 , further comprising: assembling the negative electrode material into a battery having a laminated structure comprising an anode layer, a cathode layer, an electrolyte, and a separator between the anode layer and the cathode layer, wherein the anode layer comprises the negative electrode material. 15. A method of making an electrode for an electrochemical cell that cycles lithium ions, the method comprising: applying a protective coating to a silicon-based electrode precursor material, and lithiating the silicon-based electrode precursor material in a continuous process conducted in a reactor having a first reaction chamber and a second reaction chamber to form a lithiated electrode material comprising the protective coating, wherein the protective coating is selected from the group consisting of: aluminum oxide (Al 2 O 3 ), titanium dioxide (TiO 2 ), silicon dioxide (SiO 2 ), vanadium pentoxide (V 2 O 5 ), zirconium dioxide (ZrO 2 ), hafnium dioxide (HfO 2 ), tin oxide (SnO 2 ), zinc oxide (ZnO), lithium fluoride (LiF), aluminum fluoride (AlF 3 ), aluminum oxyfluoride (AlFO), aluminum nitride (AlN), silicon nitride (SiN), and combinations thereof, wherein the protective coating is applied to the silicon-based electrode precursor material in the first reaction chamber by an atomic layer deposition (ALD) process and the silicon-based electrode precursor material is subsequently lithiated in the second reaction chamber by a thermal evaporation process, and wherein the first reaction chamber defines a plurality of deposition regions that each comprise a first zone to introduce an oxidant and a second zone to introduce one or more ALD precursors. 16. The method of claim 15 , wherein the reactor is a vacuum chamber defining the first reaction chamber and the second reaction chamber. 17. The method of claim 15 , wherein a thickness of the protective coating is greater than or equal to about 1 nm to less than or equal to about 25 nm. 18. The method of claim 15 , wherein the method is conducted continuously in a roll-to-roll process. 19. The method of claim 15 , wherein the protective coating is selected from the group consisting of: titanium dioxide (TiO 2 ), vanadium pentoxide (V 2 O 5 ), hafnium dioxide (HfO 2 ), tin oxide (SnO 2 ), zinc oxide (ZnO), aluminum oxyfluoride (AlFO), aluminum nitride (AlN), silicon nitride (SiN), and combinations thereof. 20. The method of claim 15 , wherein the protective coating is selected from the group consisting of: vanadium pentoxide (V 2 O 5 ), silicon nitride (SiN), and combinations thereof.
Processes of manufacture · CPC title
of aluminium, magnesium or beryllium · CPC title
applied in non-semiconductor technology · CPC title
Chemical vapour deposition · CPC title
involving thermal treatment, e.g. firing, sintering, backing particulate active material, thermal decomposition, pyrolysis · CPC title
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