Substrate container valve assemblies

Patent metadata

Field	Value
Publication number	US-11869787-B2
Application number	US-202016886371-A
Country	US
Kind code	B2
Filing date	May 28, 2020
Priority date	Dec 1, 2014
Publication date	Jan 9, 2024
Grant date	Jan 9, 2024

Abstract

A substrate container includes a container portion having an open side or bottom, and a door to sealingly close the open side or bottom, one of the door and the container portion defining access structure. The substrate container additionally includes a check-valve assembly, the check-valve assembly being retained with respect to the access structure to provide fluid communication with an interior of the substrate container. The check-valve assembly includes a grommet, the grommet being formed of an elastomeric material. A valve seat is disposed within the grommet, the valve seat being integrally formed with the grommet according to one aspect, and being formed of a separate piece according to another aspect. An elastomeric valve member, specifically an elastomeric umbrella valve member according to one aspect, is disposed within the grommet and held to engage the valve seat, thereby restricting fluid flow through the check-valve assembly with respect to the interior of the substrate container.

First claim

What is claimed is:

1. A substrate container, comprising:
a container portion having a container wall defining a container interior, the container portion further having a plurality of substantially horizontal spaced apart substrate shelves disposed within the interior;
at least one substantially tubular environmental control component for directing fluid flow into the container interior;
a check-valve assembly disposed within the control component, adapted to allow fluid flow into the substrate container through the control component, the check-valve assembly comprising:
a substantially cylindrical valve seat portion; and
an elastomeric umbrella check valve member held within the valve seat portion to substantially disallow fluid flow out of the container through the control component; and
an elastomeric interface stacked with the check-valve assembly, an end of the elastomeric interface being sealingly engaged with an end of the check-valve assembly, and an outer circumference of the elastomeric interface being sealingly connected to the control component.

2. The substrate container of claim 1 , further comprising:
a filter component stacked with the check-valve assembly, the filter component being sealingly engaged with and disposed at another end of the check-valve assembly opposite to the elastomeric interface.

3. The substrate container of claim 2 , wherein the filter component abuts against a stop disposed within the control component, to prevent over-insertion within the control component.

4. The substrate container of claim 1 , wherein the valve seat portion is in the shape of a cylindrical disk and defines a circumferential groove; further wherein the substrate container comprises an 0-ring disposed within the groove to sealingly connect the check-valve assembly to the control component.

5. The substrate container of claim 1 , wherein the valve seat portion is formed of a substantially rigid material.

Assignees

• Entegris Inc

Inventors

• Fuller Matthew A
• Smith Mark V
• King Jeffery J
• Burns John

Classifications

• H10P72/1918 Primary

  characterised by coupling elements, kinematic members, handles or elements to be externally gripped · CPC title

• H10P72/14

  Vertical carrier comprising wall type elements whereby the substrates are horizontally supported, e.g. comprising sidewalls · CPC title

• H10P72/1926 Primary

  characterised by the presence of atmosphere modifying elements inside or attached to the closed carrier · CPC title

• H01L21/67393 Primary

  Electricity · mapped topic

• F16K15/148 Primary

  the closure elements being fixed in their centre · CPC title