Mechanical memory and tunable nano-electromechanical systems (NEMS) resonator

Patent metadata

Field	Value
Publication number	US-11862265-B2
Application number	US-202017613192-A
Country	US
Kind code	B2
Filing date	May 27, 2020
Priority date	May 27, 2019
Publication date	Jan 2, 2024
Grant date	Jan 2, 2024

Abstract

A method of tuning a resonant frequency of a nano-electromechanical systems (NEMS) drum device is performed by applying a gate voltage between the drum membrane [ 100 ] and a back gate [ 104 ] to alter the resonant frequency of the membrane to a desired frequency; photoionizing the drum membrane with a laser to detune the membrane resonant frequency to a ground state frequency; and releasing the gate voltage to set the membrane to the desired resonant frequency. The method provides the basis for various applications including NEMS memory and photodetection techniques. The NEMS device may be implemented as a graphene/hBN membrane [ 100 ] suspended on a SiO2 layer [ 102 ] deposited on a Si substrate [ 104].

First claim

The invention claimed is:

1. A method of storing a multi-state value in a nano-electromechanical systems (NEMS) drum device, the method comprising:
applying a gate voltage between a drum membrane and a back gate to alter the resonant frequency of the membrane to a desired frequency;
photoionizing the drum membrane with a laser to detune the membrane resonant frequency to a ground state frequency;
releasing the gate voltage to set the membrane to the desired resonant frequency.

2. The method of claim 1 wherein photoionizing the drum membrane is performed while the gate voltage continues to be applied between the drum membrane and the back gate.

3. The method of claim 1 wherein the nano-electromechanical systems (NEMS) drum device comprises a graphene/hBN membrane suspended on a SiO 2 layer deposited on a Si substrate.

4. The method of claim 1 further comprising measuring the drumhead resonance frequency via optical interferometry to read the desired resonant frequency to which the membrane is set.

5. The method of claim 1 further comprising setting the gate voltage to zero and illuminating the drum membrane with a laser to reset the drum device.

6. The method of claim 1 wherein the nano-electromechanical systems (NEMS) drum device is an element of an array of nano-electromechanical systems (NEMS) drum devices.

7. A method for photodetection of light with a nanoelectromechanical (NEMS) resonator, the method comprising:
applying a gate voltage between the drum membrane and a back gate,
exposing the membrane to laser light to produce photoionization of the drum membrane such that a resulting charge alters the membrane resonant frequency,
turning off the laser light and releasing the gate voltage to set the resonant frequency of the membrane to a predetermined frequency;
exposing the drum membrane to the light to produce photoionization of the drum membrane such that a resulting charge alters the membrane resonant frequency;
measuring the drumhead resonance frequency and comparing it to the predetermined frequency to determine total accumulated exposure of the drumhead to the light.

8. The method of claim 7 wherein exposing the membrane to laser light is performed while the gate voltage continues to be applied between the drum membrane and the back gate.

9. The method of claim 7 further comprising setting the gate voltage to zero and illuminating the drum membrane with a laser to reset the drum device.

10. The method of claim 7 wherein the nano-electromechanical systems (NEMS) drum device is an element of an array of nano-electromechanical systems (NEMS) drum devices.

Assignees

• Univ Oregon

Inventors

• Alemán Benjamín J
• Miller David J

Classifications

• G11C23/00 Primary

  Digital stores characterised by movement of mechanical parts to effect storage, e.g. using balls; Storage elements therefor · CPC title

• G02B26/001 Primary

  based on interference in an adjustable optical cavity (interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26) · CPC title

• G11C11/56

  using storage elements with more than two stable states represented by steps, e.g. of voltage, current, phase, frequency · CPC title

• H03H2007/008

  the MEMS being trimmable · CPC title

• H03H9/2463

  Clamped-clamped beam resonators · CPC title