Anisotropic conductive sheet, anisotropic conductive composite sheet, anisotropic conductive sheet set, electric inspection device and electric inspection method

Patent metadata

Field	Value
Publication number	US-11860193-B2
Application number	US-201917295474-A
Country	US
Kind code	B2
Filing date	Nov 21, 2019
Priority date	Nov 21, 2018
Publication date	Jan 2, 2024
Grant date	Jan 2, 2024

Abstract

This anisotropic conductive sheet includes: a plurality of conductive paths; and an insulation layer which is disposed to fill the space between the plurality of conductive paths and has a first surface and a second surface. Each of the conductive path extends in a thickness direction of the insulation layer and has a first end part on the first surface side and a second end part on the second surface side. When the conductive paths are seen through so that the center of the first end part overlaps the center of the second end part, at least a portion of the conductive paths does not overlap the first end part and the second end part.

First claim

The invention claimed is:

1. An anisotropic conductive sheet comprising:
a plurality of conduction paths;
an insulation layer disposed to fill a gap between the plurality of conduction paths, the insulation layer including a first surface and a second surfacer; and
a plurality of bonding layers, each of the plurality of bonding layers being disposed in at least a part of a region between the plurality of conduction paths and the insulation layer;
wherein each of the plurality of conduction paths extends in a thickness direction of the insulation layer, and includes a first end portion on a first surface side and a second end portion on a second surface side,
wherein when each of the plurality of conduction paths is viewed through such that a center of the first end portion and a center of the second end portion overlap each other, at least a part of each of the plurality of conduction paths does not overlap the first end portion and the second end portion, and
wherein the bonding layer includes a polycondensation product of alkoxysilane or an oligomer thereof.

2. The anisotropic conductive sheet according to claim 1 ,
wherein the first end portion is exposed to the first surface side; and
wherein the second end portion is exposed to the second surface side.

3. The anisotropic conductive sheet according to claim 1 ,
wherein as viewed through along the thickness direction of the insulation layer in plan, the center of the first end portion and the center of the second end portion overlap each other, and at least a part of each of the plurality of conduction paths does not overlap the first end portion and the second end portion.

4. The anisotropic conductive sheet according to claim 1 ,
wherein in a cross-section along the thickness direction of the insulation layer, at least a part of each of the plurality of conduction paths has a wavy shape, a zigzag shape, an arch shape, or a v shape.

5. The anisotropic conductive sheet according to claim 4 ,
wherein in a cross-section along the thickness direction of the insulation layer, at least a part of each of the plurality of conduction paths located on the first end portion side than a midpoint between the first end portion and the second end portion has a wavy shape, a zigzag shape, an arch shape, or a v shape.

6. The anisotropic conductive sheet according to claim 1 , wherein a center-to-center distance of the first end portions of the plurality of conduction paths is 5 to 55 μm.

7. The anisotropic conductive sheet according to claim 6 , wherein a circle equivalent diameter of the first end portion of each of the plurality of conduction paths is 2 to 20 μm.

8. The anisotropic conductive sheet according to claim 1 ,
wherein the insulation layer includes a first resin composition;
wherein the bonding layer includes a second resin composition; and
wherein a glass transition temperature of the second resin composition is higher than a glass transition temperature of the first resin composition.

9. The anisotropic conductive sheet according to claim 1 ,
wherein the anisotropic conductive sheet is used for electrical testing of an inspection object; and
wherein the inspection object is disposed on the first surface.

10. An anisotropic conductive composite sheet comprising:
a first anisotropic conductive sheet including a plurality of first conduction paths extending through the first anisotropic conductive sheet in a thickness direction of the first anisotropic conductive sheet, and a first insulation layer disposed to fill a gap between the plurality of first conduction paths, the first insulation layer including a third surface and a fourth surface; and
a second anisotropic conductive sheet including a plurality of second conduction paths extended in a thickness direction of the second anisotropic conductive sheet, and a second insulation layer disposed to fill a gap between the plurality of second conduction paths, the second insulation layer including a fifth surface and a sixth surface;
wherein the first anisotropic conductive sheet and the second anisotropic conductive sheet are stacked such that the third surface of the first insulation layer and the sixth surface of the second insulation layer face each other,
wherein a center-to-center distance p 2 of the plurality of second conduction paths on a fifth surface side is smaller than a center-to-center distance p 1 of the plurality of first conduction paths on a third surface side,
wherein a rockwell hardness of the fifth surface of the second anisotropic conductive sheet is smaller than a rockwell hardness of the third surface of the first anisotropic conductive sheet, and
wherein at least one of the first anisotropic conductive sheet or the second anisotropic conductive sheet is an anisotropic conductive sheet,
wherein the anisotropic conductive sheet comprises:
a plurality of conduction paths; and
an insulation layer disposed to fill a gap between the plurality of conduction paths, the insulation layer including a first surface and a second surface,

wherein each of the plurality of conduction paths extends in a thickness direction of the insulation layer, and includes a first end portion on a first surface side of the insulation layer and a second end portion on a second surface side of the insulation layer, and
wherein when each of the plurality of conduction paths is viewed through such that a center of the first end portion and a center of the second end portion overlap each other, at least a part of each of the plurality of conduction paths does not overlap the first end portion and the second end portion.

11. The anisotropic conductive composite sheet according to claim 10 , wherein the rockwell hardness of the fifth surface of the second anisotropic conductive sheet is M120 or less.

12. The anisotropic conductive composite sheet according to claim 10 , wherein the center-to-center distance p 2 of the plurality of second conduction paths on the fifth surface side is 18 to 31% of the center-to-center distance p 1 of the plurality of first conduction paths on the third surface side.

13. The anisotropic conductive composite sheet according to claim 10 , wherein a thickness of the second insulation layer is smaller than a thickness of the first insulation layer.

14. The anisotropic conductive composite sheet according to claim 10 ,
wherein the anisotropic conductive composite sheet is used for electrical testing of an inspection object; and
wherein the inspection object is disposed on the fifth surface of the second anisotropic conductive sheet.

15. An anisotropic conductive sheet set comprising:
a first anisotropic conductive sheet including a plurality of first conduction paths extending through the first anisotropic conductive sheet in a thickness direction of the first anisotropic conductive sheet, and a first insulation layer disposed to fill a gap between the plurality of first conduction paths, the first insulation layer including a third surface and a fourth surface; and
a second anisotropic conductive sheet including a plurality of second conduction paths extended in a thickness direction of the second anisotropic conductive sheet, and a second insulation layer disposed to fill a gap between the plurality of second conduction paths, the second insulation layer including a fifth surface and a sixth surface;
wherein the first anisotropic conductive sheet and the second anisotropic conductive sheet are configured to be stacked such that the third surface of the first insulation layer and the sixth surface of the second insulation layer face each other,
wherein a cen

Assignees

• Mitsui Chemicals Inc

Inventors

• Koyama Taichi
• Nishiura Katsunori
• Yamada Daisuke
• Kodama Yoichi

Classifications

• G01R1/07314 Primary

  the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support (on an elastic support, e.g. a film, G01R1/0735) · CPC title

• G01R1/06761 Primary

  related to layers · CPC title

• H01B5/16

  comprising conductive material in insulating or poorly conductive material, e.g. conductive rubber (H01B1/14, H01B1/20 take precedence; insulating bodies with conductive admixtures H01B17/64; conductive paints C09D5/24) · CPC title

• H01R11/01

  characterised by the form or arrangement of the conductive interconnection between the connecting locations · CPC title

• H01R43/00

  Apparatus or processes specially adapted for manufacturing, assembling, maintaining, or repairing of line connectors or current collectors or for joining electric conductors (of trolley lines B60M1/28) · CPC title