Valve device, fluid control device, and manufacturing method of valve device

Patent metadata

Field	Value
Publication number	US-11859733-B2
Application number	US-202017630400-A
Country	US
Kind code	B2
Filing date	Jun 10, 2020
Priority date	Jul 31, 2019
Publication date	Jan 2, 2024
Grant date	Jan 2, 2024

Abstract

A valve device comprising: a flow passage block in which a flow passage is formed; a diaphragm configured to open and close the flow passage; an actuator configured to push down the diaphragm via a diaphragm holder; a tubular bonnet formed with an internal thread on an inner circumferential surface, the bonnet being configured to join the flow passage block and the actuator; a tubular adjusting screw threaded to the internal thread, the adjusting screw being configured to come into contact with the diaphragm holder to adjust a valve opening position of the diaphragm; and an annular lock nut configured to lock the adjusting screw by being screwed into the internal thread.

First claim

What is claimed is:

1. A valve device comprising:
a flow passage block in which a flow passage is formed;
a diaphragm configured to open and close the flow passage;
a diaphragm holder configured to hold the diaphragm;
an actuator configured to push down the diaphragm via the diaphragm holder;
a tubular bonnet formed with an internal thread on an inner circumferential surface, the bonnet being fixed to the flow passage block so as to join the flow passage block and the actuator;
a tubular position adjusting member being screwed into the internal thread, to press the diaphragm holder against the diaphragm side, thereby adjusting a valve opening position of the diaphragm; and
an annular lock nut configured to lock the position adjusting member by being screwed into the internal thread.

2. The valve device according to claim 1 , wherein
the actuator has a case,
the case has:
a tubular extended portion provided so as to extend toward the flow passage block side, the extended portion being formed with an external thread on an outer circumferential surface, and the external thread being configured to be threaded to the internal thread; and
an annular contact surface located at outer circumferential side from the extended portion, the contact surface facing the bonnet,

the bonnet is formed with an annular positioning surface facing the contact surface, and
a clearance is formed between the extended portion and the lock nut in a state in which the contact surface and the positioning surface are brought into contact by threading the external thread and the internal thread.

3. The valve device according to claim 1 , wherein
an annular portion is formed on an end portion of the bonnet located on the flow passage block side, the annular portion having an inner diameter smaller than an inner diameter of the internal thread,
an annular spacer is provided between the end portion and the flow passage block, the spacer having an inner diameter smaller than the inner diameter of the annular portion,
the diaphragm holder has:
a guided portion having a movement restricting surface facing the spacer, the guided portion being configured to be guided by the annular portion; and
an insertion portion configured to be inserted into an inner circumferential side of the spacer, the insertion portion being located at the flow passage block side from the guided portion, and

movement of the diaphragm holder toward the flow passage block side is restricted by contact between the movement restricting surface of the guided portion and the spacer.

4. The valve device according to claim 1 , wherein
an annular portion is formed on an end portion of the bonnet on the flow passage block side, the annular portion having an inner diameter smaller than an inner diameter of the internal thread,
the position adjusting member has:
a threaded portion threaded to the internal thread; and
a screwed amount restricting portion located at the flow passage block side from the threaded portion so as to face the annular portion, and

a screwed amount of the position adjusting member is restricted by contact between the screwed amount restricting portion and the annular portion.

5. A fluid control device comprising a plurality of fluid apparatuses arranged from an upstream side toward a downstream side, wherein
the plurality of fluid apparatuses include the valve device according to claim 1 .

6. A valve device comprising:
a flow passage block in which a flow passage is formed;
a diaphragm configured to open and close the flow passage;
a diaphragm holder configured to hold the diaphragm;
an actuator configured to push down the diaphragm via the diaphragm holder;
a tubular bonnet formed with an internal thread on an inner circumferential surface, the bonnet being configured to join the flow passage block and the actuator;
a tubular position adjusting member threaded to the internal thread, the position adjusting member being configured to come into contact with the diaphragm holder to adjust a valve opening position of the diaphragm; and
an annular lock nut configured to lock the position adjusting member by being screwed into the internal thread;
wherein a first engagement portion is formed in a region of the position adjusting member that does not overlap with the lock nut, the first engagement portion being configured such that a first rotary jig is engaged with the first engagement portion, and
a second engagement portion is formed in the lock nut, the second engagement portion being configured such that a second rotary jig is engaged with the second engagement portion.

7. The valve device according to claim 6 , wherein the first engagement portion is located at radially inward side from the second engagement portion.

8. A manufacturing method of a valve device for manufacturing the valve device, the manufacturing method comprising:
a diaphragm arranging step of arranging a diaphragm to a flow passage block in which a flow passage is formed, the diaphragm being configured to open and close the flow passage;
a bonnet fixing step of fixing a tubular bonnet to the flow passage block, the bonnet being formed with an internal thread on an inner circumferential surface thereof;
a diaphragm-holder arranging step of arranging a diaphragm holder on the bonnet so as to come into contact with the diaphragm;
a valve-opening-position adjusting step of adjusting a valve opening position of the diaphragm via the diaphragm holder by screwing a tubular position adjusting member into the internal thread to press the diaphragm holder against the diaphragm side;
a locking step of locking the position adjusting member by screwing an annular lock nut to the internal thread; and
an actuator attaching step of attaching an actuator to the bonnet, the actuator being configured to push down the diaphragm via the diaphragm holder.

9. The manufacturing method of the valve device according to claim 8 , wherein
in the locking step, the position adjusting member is locked by screwing the lock nut into the internal thread in a state in which rotation of the position adjusting member is restricted.

Assignees

• Fujikin Kk

Inventors

• Harada Akihiro
• Nakata Tomohiro
• Miura Takeru
• Yamaji Michio
• Yakushijin Tadayuki
• Ishibashi Keisuke

Classifications

• F16K7/16 Primary

  the diaphragm being mechanically actuated, e.g. by screw-spindle or cam · CPC title

• F16K31/122

  the fluid acting on a piston (F16K31/143, F16K31/163, F16K31/363, F16K31/383 take precedence) · CPC title

• F16K7/17 Primary

  the diaphragm being actuated by fluid pressure · CPC title

• F16K7/12 Primary

  with flat, dished, or bowl-shaped diaphragm · CPC title

• F16L41/02

  Branch units, e.g. made in one piece, welded, riveted · CPC title