Method and device for depositing a nano-object

Patent metadata

Field	Value
Publication number	US-11854801-B2
Application number	US-201917285369-A
Country	US
Kind code	B2
Filing date	Oct 18, 2019
Priority date	Oct 18, 2018
Publication date	Dec 26, 2023
Grant date	Dec 26, 2023

Abstract

A method for depositing an object, including: —approaching, in an enclosure, a holder in the direction of a carrier substrate, then—transferring, in the enclosure, the object from the holder to an area for depositing the carrier substrate. The transfer step is preferably carried out when the inside of the enclosure is in a vacuum at a pressure below 10 −6 bar.

First claim

The invention claimed is:

1. A method for depositing an object, comprising:
an approach, of a comb in an enclosure, in the direction of a carrier substrate, the comb comprising at least two teeth, wherein a pair of adjacent teeth carries an object to be transferred, extended between the two teeth of the pair; then
a transfer, in the enclosure, of the object from the comb and to a deposit area of the carrier substrate while the deposit area is inserted between the two teeth of the pair; and
the transfer step is carried out while the inside of the enclosure is under vacuum at a pressure less than 10 −6 bar.

2. The method according to claim 1 , characterized in that the approach comprises an optical control:
of a tilt of the comb with respect to the deposit area, and/or
of a relative position between the comb and the deposit area, and/or
of at least one angle between the comb and the deposit area.

3. The method according to claim 2 , characterized in that the approach comprises an adjustment, from outside the enclosure, of:
a tilt of the comb with respect to the deposit area, inside the enclosure, and/or
a relative position between the comb and the deposit area inside the enclosure, and/or
at least one angle between the comb and the deposit area inside the enclosure.

4. The method according to claim 3 , characterized in that during the adjustment step:
the comb is mobile with respect to the enclosure, and
the deposit area is immobile with respect to the enclosure.

5. The method according to claim 1 , characterized in that the transfer is carried out at a temperature inside the enclosure greater than −50° C. and/or less than +90° C.

6. The method according to claim 1 , characterized in that the temperature inside the enclosure is equal to a temperature outside the enclosure.

7. The method according to claim 1 , comprising an encapsulation, in the enclosure and under vacuum at a pressure less than 10 −6 bar of the transferred object.

8. The method according to claim 1 , characterized in that the carrier substrate comprises, on either side of the deposit area, trenches in which the teeth of the comb are inserted during the transfer.

9. The method according to claim 1 , characterized in that the deposit area comprises electrodes or an electronic circuit, such that these electrodes and/or the electronic circuit are in contact, at the end of the transfer step, with the object to be transferred.

10. The method according to claim 9 , comprising, during the transfer step, an electrical measurement between two measurement electrodes of the deposit area.

11. The method according to claim 9 , characterized in that the deposit area comprises two pairs of electrodes called cutting electrodes, the transfer comprising an electric current flow between each pair of cutting electrodes so as to cut the object between each pair of cutting electrodes.

12. The method according to claim 1 , comprising, before the approach step, cleaning the deposit area inside the enclosure, the cleaning being carried out while the inside of the enclosure is under vacuum, at a pressure less than 10 −6 bar, the vacuum at a pressure less than 10 −6 bar being maintained from the cleaning step to the transfer step.

13. The method according to claim 12 , characterized in that the comb is isolated from the substrate by a valve closed during the cleaning step.

14. The method according to claim 1 , characterized in that the object to be transferred is a carbon nanotube, a nanowire and/or graphene or a two-dimensional hetero structure.

15. The method according to claim 1 , characterized in that the comb:
comprises at least five teeth, preferably at least 25 teeth, and/or
has pairs of adjacent teeth spaced apart by a gap, defined in a direction of alignment of the teeth, greater than 5 μm and/or less than 100 μm, and/or
has teeth each having a width, defined in a direction of alignment of the teeth, greater than 5 μm and/or less than 100 μm, and/or
has teeth each having a length, defined in a direction perpendicular to the direction of alignment of the teeth, greater than 5 μm and/or less than 1000 μm.

16. The method according to claim 1 , comprising, before the approach step, depositing carbon nanotubes on the comb, comprising:
depositing catalyst on the comb; then
growing nanotubes on the comb.

17. The method according to claim 16 , characterized in that the catalyst is not deposited uniformly on the comb but is deposited in a localized manner on a surface area less than 500 μm 2 per tooth at the end of several teeth of the comb.

18. The method according to claim 1 , comprising, before the approach step, a step of locating and selecting, on the comb, the object to be transferred.

19. The method according to claim 18 , characterized in that the selection comprises measuring conductivity and/or chirality and/or defects in the object to be transferred.

20. A device for depositing an object comprising:
an enclosure;
means arranged for carrying, in a comb area, a comb comprising at least two teeth;
means arranged to carry a substrate in a deposit area;
evacuation means, arranged to create a vacuum in the enclosure at a pressure less than 10 −6 bar; and
handling means arranged to approach the comb area, in the enclosure, in the direction of the deposit area, so as to allow a transfer, in the enclosure, of an object, from the comb area to the deposit area;
characterized in that the handling means are arranged to approach the comb area, in the enclosure, in the direction of the deposit area, so as to allow a transfer, in the enclosure, of an object, from the comb area to the deposit area while the inside of the enclosure is under vacuum, at a pressure less than 10 −6 bar, created by the evacuation means.

21. The device according to claim 20 , comprising optical control means arranged for optical control of:
a tilt of the comb with respect to the deposit area, and/or
a relative position between the comb and the deposit area, and/or
at least one angle between the comb and the deposit area.

22. The device according to claim 21 , comprising adjustment means arranged to adjust, from the outside of the enclosure:
a tilt of the comb with respect to the deposit area, inside the enclosure, and/or
a relative position between the comb and the deposit area, inside the enclosure, and/or
at least one angle between the comb and the deposit area inside the enclosure.

23. The device according to claim 22 , characterized in that the adjustment means are arranged so that the comb area can be mobile with respect to the enclosure, while the deposit area is immobile with respect to the enclosure.

24. The device according to claim 20 , characterized in that the handling means are arranged to approach the comb area, in the enclosure, in the direction of the deposit area, so as to allow a transfer, in the enclosure, of an object from the comb area to the deposit area while the inside of the enclosure is at a temperature greater than −50° C. and/or less than +90° C.

25. The device according to claim 20 , characterized in that the handling means are arranged to approach the comb area, in the enclosure, in the direction of the deposit area, so as to allow a transfer, in the enclosure, of an object from the comb area to the deposit area while the temperature inside the enclosure is equal to a temperature outside the enclosure.

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Assignees

• Centre Nat Rech Scient
• Ecole Normale Superieure
• Univ Sorbonne
• Univ Paris

Inventors

• Delbecq Matthieu
• Cubaynes Tino
• Palomo José
• Dartiailh Matthieu
• Kontos Takis
• Desjardins Matthieu

Classifications

• H10P74/207

  Electrical properties, e.g. testing or measuring of resistance, deep levels or capacitance-voltage characteristics · CPC title

• H10P14/3406 Primary

  Carbon, e.g. diamond-like carbon · CPC title

• H01L21/02527 Primary

  Electricity · mapped topic

• B82B3/0004

  Apparatus specially adapted for the manufacture or treatment of nanostructural devices or systems or methods for manufacturing the same · CPC title

• B82B3/0057

  Processes for assembling discrete nanostructures not provided for in groups B82B3/0047 - B82B3/0052 · CPC title