Ultrasonic sensing device, electronic device using same, and method for making same
US-2019363241-A1 · Nov 28, 2019 · US
US11847263B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11847263-B2 |
| Application number | US-202117620538-A |
| Country | US |
| Kind code | B2 |
| Filing date | Feb 26, 2021 |
| Priority date | Feb 26, 2021 |
| Publication date | Dec 19, 2023 |
| Grant date | Dec 19, 2023 |
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The present disclosure provides a haptic feedback base plate, a haptic feedback apparatus and a haptic feedback method. The haptic feedback base plate comprises: a substrate and a deformation unit disposed on one side of the substrate. The deformation unit comprises a first electrode, a piezoelectric material layer and a second electrode that are arranged in a stacked manner, the first electrode is arranged close to the substrate, the first electrode and the second electrode are configured to form an alternating electric field, and the piezoelectric material layer vibrates under the effect of the alternating electric field and drives the substrate to resonate, wherein a difference between a frequency of the alternating electric field and an inherent frequency of the substrate is less than or equal to a preset threshold.
Opening claim text (preview).
The invention claimed is: 1. A haptic feedback base plate, comprising: a substrate and a deformation unit disposed on a side of the substrate, wherein the deformation unit comprises a first electrode, a piezoelectric material layer and a second electrode that are arranged in a stacked manner, the first electrode is arranged close to the substrate, the first electrode and the second electrode are configured to form an alternating electric field, and the piezoelectric material layer vibrates under the effect of the alternating electric field and drives the substrate to resonate; wherein, a difference between a frequency of the alternating electric field and an inherent frequency of the substrate is less than or equal to a preset threshold; wherein the deformation unit is arranged at a vibration crest and/or a vibration trough of a vibration signal of the substrate. 2. The haptic feedback base plate according to claim 1 , further comprising: a bind electrode disposed on a same layer with the first electrode, wherein the bind electrode is arranged close to an edge of the substrate and is configured to connect a drive voltage input terminal, and a voltage signal input by the drive voltage input terminal is an alternating voltage signal; and an insulating layer and a trace layer that are disposed on a side, away from the substrate, of the second electrode, wherein the trace layer comprises a trace having one end connected to the second electrode through a first via hole formed in the insulating layer and the other end connected to the bind electrode through a second via hole formed in the insulating layer. 3. The haptic feedback base plate according to claim 2 , further comprising: a lead electrode disposed on a same layer with the first electrode, wherein the lead electrode is connected to the first electrode and is configured to connect a grounding voltage input terminal, and a voltage signal input by the grounding voltage input terminal is a grounding voltage signal. 4. The haptic feedback base plate according to claim 3 , wherein when the lead electrode is connected to a plurality of the first electrodes, resistances between the lead electrode and each of the plurality of the first electrodes are equal. 5. The haptic feedback base plate according to claim 2 , wherein a plurality of the deformation units are provided, the plurality of the deformation units are arranged on one side of the substrate in an array, the first electrodes of the deformation units in a same column are communicated with each other, and the second electrodes of the deformation units in the same column are connected to a same trace in the trace layer. 6. The haptic feedback base plate according to claim 1 , wherein in a plane parallel to the substrate, a size of the deformation unit is less than a half-wavelength of vibrations of the substrate. 7. The haptic feedback base plate according to claim 1 , wherein a thickness of the piezoelectric material is greater than or equal to 1 μm and less than or equal to 10 μm. 8. The haptic feedback base plate according to claim 1 , wherein edges of the second electrode are indented relative to edges of the piezoelectric material layer. 9. The haptic feedback base plate according to claim 8 , wherein indentation distances of the edges of the second electrode relative to the edges of the piezoelectric material layer are greater than or equal to 100 μm and less than or equal to 500 μm. 10. The haptic feedback base plate according to claim 1 , wherein the edges of the piezoelectric material layer are indented relative to edges of the first electrode. 11. A haptic feedback apparatus, comprising the haptic feedback base plate according to claim 1 . 12. The haptic feedback apparatus according to claim 11 , further comprising: a displaying substrate disposed on a side, away from the substrate, of the deformation unit, wherein the displaying substrate comprises an active area and a peripheral area located on a periphery of the active area, and an orthographic projection of the deformation unit on the displaying substrate is located within the peripheral area. 13. The haptic feedback apparatus according to claim 12 , wherein a touch electrode layer or a touch film is disposed on a side, close to the displaying substrate, of the substrate, and an orthographic projection of the touch electrode layer or the touch film on the displaying substrate covers the active area. 14. A haptic feedback method, wherein the haptic feedback method is applied to the haptic feedback base plate according to claim 1 , and the method comprises: applying voltage signals to the first electrode and the second electrode, respectively, to form an alternating electric field between the first electrode and the second electrode, and enabling the piezoelectric material layer to vibrate under the effect of the alternating electric field and drive the substrate to resonate, wherein a difference between a frequency of the alternating electric field and an inherent frequency of the substrate is less than or equal to a preset threshold.
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