Method for collecting dust from single crystal growth system and dust collecting system thereof

Patent metadata

Field	Value
Publication number	US-11845030-B2
Application number	US-202016907313-A
Country	US
Kind code	B2
Filing date	Jun 22, 2020
Priority date	Jun 22, 2020
Publication date	Dec 19, 2023
Grant date	Dec 19, 2023

Abstract

A dust collecting system for single crystal growth system includes an air compressor, a dust collecting device, a first inert gas source, a rotary pump and a scrubber. The air compressor is fluidly connected to an exit pipe of the single crystal growth system. The exit pipe is used to exhaust unstable dust from the single crystal growth system. The dust collecting device is fluidly connecting to the exit pipe to collect the dust oxide. The first inert gas source is fluidly connected to the exit pipe to blow a first inert gas into the exit pipe to compel the dust oxide toward the dust collecting device. The rotary pump is fluidly connected to the dust collecting device. The scrubber is fluidly connected to the rotary pump. The rotary pump transports the residual dust oxide toward the scrubber. The present disclosure further provides a method for collecting dust.

First claim

What is claimed is:

1. A dust collecting system for a single crystal growth system, comprising:
an air compressor fluidly connected to an exit pipe of the single crystal growth system, wherein the exit pipe is used to exhaust unstable dust from the single crystal growth system, wherein the air compressor provides clean dry air into the exit pipe, the air compressor includes a steam separator for separating water droplets from steam, the clean dry air from the air compressor is used to remove moisture out of the exit pipe, and provides oxygen into the exit pipe to react with unstable dust for forming dust oxide so as to stabilize the dust in the exit pipe;
a dust collecting device fluidly connected to the exit pipe to collect the dust oxide;
a first inert gas source fluidly connected to the exit pipe to blow a first inert gas into the exit pipe to compel the dust oxide toward the dust collecting device;
a rotary pump fluidly connected to the dust collecting device; and
a scrubber fluidly connected to the rotary pump, wherein the rotary pump transports residues of the dust oxide toward the scrubber via a third pipe connected between the rotary pump and the dust collecting device, and a transport pipe connected between the rotary pump and the scrubber;
wherein the dust collecting device is a cyclone filter, the cyclone filter has a collecting area at a bottom thereof, the collecting area is fluidly connected with the scrubber and is used to collect the dust oxide, and a second inert gas source connects to the collecting area of the cyclone filter for blowing a second inert gas into the collecting area of the cyclone filter to compel the collected dust oxide to the scrubber through a pipe connected between the collecting area of the cyclone filter and the scrubber;
a second airflow valve connecting to the collecting area of the cyclone filter to control an airflow of the second inert gas, and a second stop valve being connected between the collecting area of the cyclone filter and the scrubber; and
a third inert gas source for blowing a third inert gas into the rotary pump to clean a rotator of the rotary pump.

2. The dust collecting system as claimed in claim 1 , wherein a first valve is connected between the single crystal growth system and the exit pipe, and a second valve is connected between the air compressor and the exit pipe.

3. The dust collecting system as claimed in claim 1 , wherein the first inert gas is nitrogen, and a first airflow valve is connected to the exit pipe to control an airflow of the first inert gas.

4. The dust collecting system as claimed in claim 1 , wherein an exhaust pipe is connected between the exit pipe and the dust collecting device, a line valve is connected between the exit pipe and a dust collecting device, and a throttle valve is connected between the line valve and the dust collecting device.

5. The dust collecting system as claimed in claim 1 , further comprising a third stop valve and a third airflow valve, wherein the third stop valve is connected between the cyclone filter and the rotary pump, and the third airflow valve is connected between the third stop valve and the rotary pump to control an airflow of the third inert gas.

6. The dust collecting system as claimed in claim 5 , further comprising a fourth inert gas source for blowing an inert gas into a transport pipe connected the scrubber, and a valve being connected between the rotary pump and the scrubber.

Assignees

• Globalwafers Co Ltd

Inventors

• Nakanishi Masami
• Su Yu-Sheng
• Li I-Ching

Classifications

• B01D45/16 Primary

  generated by the winding course of the gas stream {, the centrifugal forces being generated solely or partly by mechanical means, e.g. fixed swirl vanes} · CPC title

• B01D53/145

  Pretreatment by separation of solid or liquid material · CPC title

• B01D53/46

  Removing components of defined structure · CPC title

• B01D53/76

  Gas phase processes, e.g. by using aerosols · CPC title

• B04C5/185 Primary

  Dust collectors · CPC title