Low voltage MEMS relay filled with alternative gas mixture to SF6

Patent metadata

Field	Value
Publication number	US-11842871-B2
Application number	US-202117475746-A
Country	US
Kind code	B2
Filing date	Sep 15, 2021
Priority date	Sep 15, 2021
Publication date	Dec 12, 2023
Grant date	Dec 12, 2023

Abstract

The switch contacts of a MEMS relay for a circuit interrupter are coated with a thin layer of liquid metal, and the MEMS relay is disposed in a sealed enclosure containing a gas medium. The gas medium provides an environmentally desirable alternative to sulfur hexafluoride (SF 6 ), prevents oxidation of the liquid metal coating the relay switch contacts, and has sufficient dielectric strength in order to prevent current flow after separation of the switch contacts.

First claim

What is claimed is:

1. A protective relay for a circuit interrupter, the protective relay being configured to be in electrical communication with a line conductor of the circuit interrupter and being configured to be operatively coupled to a trip unit of the circuit interrupter, the protective relay comprising:
a gas tight sealed enclosure structured to isolate components within the sealed enclosure from an environment exterior to the sealed enclosure;
a plurality of switch contacts enclosed within the sealed enclosure, the plurality of switch contacts being configured to be actuated between a closed state and an open state by the trip unit, with at least one switch contact of the plurality of switch contacts being coated with a liquid metal; and
a gas mixture contained within the sealed enclosure such that the gas mixture cannot diffuse to the environment exterior to the sealed enclosure and substances in the exterior environment cannot diffuse into the sealed enclosure,
wherein the plurality of switch contacts are configured such that, in the closed state, power can flow through the line conductor, and in the open state, power is prevented from flowing through the line conductor,
wherein the plurality of switch contacts are configured to be actuated to the open state by the trip unit upon detection of a fault condition, and
wherein the gas mixture comprises at least one of a number of anti-oxidation gases including nitrogen (N 2 ), helium (He), neon (Ne), argon (Ar), and xenon (Xe).

2. The protective relay of claim 1 , wherein the components of the protective relay are microelectromechanical system (MEMS) components.

3. The protective relay of claim 1 , wherein the liquid metal comprises a gallium alloy.

4. The protective relay of claim 3 , wherein the gallium alloy comprises either gallium indide (GaIn), gallium stannide (GaSn), or a ternary alloy Ga—In—Sn.

5. The protective relay of claim 1 , wherein the gas mixture comprises fluoronitrile C 3 F 7 CN.

6. The protective relay of claim 5 , wherein at 20° C., the gas mixture has a partial pressure of fluoronitrile C 3 F 7 CN between 0.05 bar and 0.50 bar and a total absolute pressure between 0.5 bar and 5.0 bar absolute.

7. The protective relay of claim 1 , wherein the gas mixture comprises fluoroketone C 5 F 10 O.

8. The protective relay of claim 7 , wherein at 20° C., the gas mixture has a partial pressure of fluoroketone C 5 F 10 O between 0.05 bar and 0.10 bar and a total absolute pressure between 0.5 bar and 5.0 bar absolute.

9. A protective microelectromechanical system (MEMS) relay for a circuit interrupter, the protective MEMS relay being configured to be in electrical communication with a line conductor of the circuit interrupter and being configured to be operatively coupled to a trip unit of the circuit interrupter, the protective MEMS relay comprising:
a gas tight sealed enclosure structured to isolate components within the sealed enclosure from an environment exterior to the sealed enclosure;
a plurality of switch contacts enclosed within the sealed enclosure, the plurality of switch contacts being configured to be actuated between a closed state and an open state by the trip unit, with at least one switch contact of the plurality of switch contacts being coated with a liquid gallium alloy coating; and
a gas mixture contained within the sealed enclosure such that the gas mixture cannot diffuse to the environment exterior to the sealed enclosure and substances in the exterior environment cannot diffuse into the sealed enclosure,
wherein the plurality of switch contacts are configured such that, in the closed state, power can flow through the line conductor, and in the open state, power is prevented from flowing through the line conductor,
wherein the plurality of switch contacts are configured to be actuated to the open state by the trip unit upon detection of a fault condition,
wherein the protective MEMS relay is structured such that each of an opening and a closing of the plurality of switch contacts takes between 10 microseconds and 200 microseconds, and
wherein the gas mixture comprises at least one of a number of anti-oxidation gases including nitrogen (N 2 ), helium (He), neon (Ne), argon (Ar), and xenon (Xe).

10. The protective MEMS relay of claim 9 , wherein a thickness of the liquid gallium alloy coating ranges between 1 micrometer and 20 micrometers.

11. The protective MEMS relay of claim 9 , wherein the maximum thickness of each protective MEMS relay switch contact is 0.15 millimeters.

12. The protective MEMS relay of claim 9 , wherein the protective MEMS relay is structured such that, when the plurality of switch contacts are in the open state, a separation distance between each switch contact relative to every other switch contact ranges between 20 micrometers and 200 micrometers.

13. The protective MEMS relay of claim 9 ,
wherein the gas mixture comprises fluoronitrile C 3 F 7 CN, and
wherein at 20° C., the gas mixture has a partial pressure of fluoronitrile C 3 F 7 CN between 0.05 bar and 0.50 bar and a total absolute pressure between 0.5 bar and 5.0 bar absolute.

14. The protective MEMS relay of claim 9 ,
wherein the gas mixture comprises fluoroketone C 5 F 10 O, and
wherein at 20° C., the gas mixture has a partial pressure of fluoroketone C 5 F 10 O between 0.05 bar and 0.10 bar and a total absolute pressure between 0.5 bar and 5.0 bar absolute.

15. A circuit interrupter structured to be disposed between a power source and an electrical load, the circuit interrupter comprising:
a line conductor configured to be electrically connected between a power source and a load;
a plurality of switch contacts configured such that, in the closed state, power can flow through the line conductor from the power source to the load, and in the open state, power is prevented from flowing through the line conductor from the power source to the load;
an operating mechanism operatively coupled to the plurality of switch contacts and structured to open and close the plurality of switch contacts;
a trip mechanism operatively coupled to the operating mechanism and structured to actuate the operating mechanism;
a fault detection component configured to detect fault conditions in the circuit interrupter and to communicate with the trip mechanism; and
a protective microelectromechanical system (MEMS) relay, the protective MEMS relay being in electrical communication with the line conductor and operatively coupled to the trip mechanism, the protective MEMS relay comprising:
a gas tight sealed enclosure structured to isolate components within the sealed enclosure from an environment exterior to the sealed enclosure;
the plurality of switch contacts, with the plurality of switch contacts being enclosed within the sealed enclosure, and with at least one switch contact of the plurality of switch contacts being coated with a liquid gallium alloy coating; and
a gas mixture contained within the sealed enclosure such that the gas mixture cannot diffuse to the environment exterior to the sealed enclosure and substances in the exterior environment cannot diffuse into the sealed enclosure,

wherein the plurality of switch contacts are configured to be actuated to the open state by the trip unit upon detection of a fault condition by the fault detection component,
wherein the protective MEMS relay is structured such that each of an opening and a closing of the plurality of switch contacts takes between 10 microseconds and 200 microseconds, and
wherein the gas mixture comprises at least one of a number of anti-oxidation gases including nitrogen (N

Assignees

• Eaton Intelligent Power Ltd

Inventors

• Kadlec Stanislav
• Jimenez Gonzalez Sandy Omar
• Thenkarai Narayanan Venkat Raman
• Gnybida Mykhailo
• Ruempler Christian

Classifications

• H01H59/0009 Primary

  making use of micromechanics · CPC title

• B81B3/0024

  Transducers for transforming thermal into mechanical energy or vice versa, e.g. thermal or bimorph actuators (electric motors using thermal effects H02N10/00) · CPC title

• H01H29/06

  Liquid contacts characterised by the material thereof · CPC title

• B81B2201/01

  Switches · CPC title

• H01H29/00 Primary

  Switches having at least one liquid contact (solid contacts wetted or soaked with mercury H01H1/08) · CPC title