Adjustable attenuation optical unit

Patent metadata

Field	Value
Publication number	US-11835769-B2
Application number	US-202117404900-A
Country	US
Kind code	B2
Filing date	Aug 17, 2021
Priority date	Aug 17, 2021
Publication date	Dec 5, 2023
Grant date	Dec 5, 2023

Abstract

An adjustable attenuation optical unit that may include a lightguide that includes a core, wherein the core comprises an output, an input and an exterior surface; and an adjustable attenuator that is configured to define an interfacing parameter related to an area of the exterior surface thereby receiving at least some of the light that impinges on the area.

First claim

What is claimed is:

1. An adjustable attenuation optical unit, comprising:
a lightguide having an input, an output and an exterior surface extending between the input and output that surrounds a core, wherein the light guide is configured such that light received at the input propagates through the core of the lightguide and exits from the output;
a photomultiplier tube operatively coupled to receive light that propagates through the lightguide; and
an adjustable attenuator coupled between the input of the lightguide and the photomultiplier tube and configured to reduce an intensity of light that propagates through the lightguide prior to the light reaching the photomultiplier tube.

2. The adjustable attenuation optical unit according to claim 1 wherein the adjustable attenuator comprises liquid crystal (LC) glass.

3. The adjustable attenuation optical unit according to claim 1 wherein the adjustable attenuator comprises suspected particle device (SPD) glass, SPD smart glass, electrochromic glass, thermochromic glass or photochromatic glass.

4. The adjustable attenuation optical unit according to claim 1 wherein the area is annular.

5. The adjustable attenuation optical unit according to claim 1 wherein the area is located outside an optical path between the input and the photomultiplier tube.

6. A method of attenuating an intensity of light that impinges upon a photomultiplier tube operatively coupled to detect electrons scattered or reflected from a sample illuminated by a charged particle column of scanning electron microscope, the method comprising:
receiving light generated by the scattered or reflected electrons at an input of a light guide;
propagating the light through a core of the lightguide;
reducing an intensity of the light with an adjustable attenuation optical unit prior to the light reaching the photomultiplier tube.

7. The method according to claim 6 further comprising: wherein the evaluation of the sample comprises:
illuminating the sample with an electron beam;
collecting emitted electrons that were reflected or scattered from the sample, and
converting the emitted electrons to the light that is received at the input of the light guide.

8. The method according to claim 6 wherein reducing an intensity of the light with an adjustable attenuator comprises passing the light through liquid crystal glass.

9. An adjustable attenuation optical unit, comprising:
a lightguide having an input, an output and an exterior surface extending between the input and output that surrounds a core, wherein the light guide is configured such that light received at the input propagates through the core of the lightguide and exits from the output; and
an adjustable attenuator coupled to and disposed inline with the output of the lightguide, the adjustable attenuator configured to receive light from the lightguide and reduce an intensity of the received light by adjusting one or more of the transparency of the adjustable attenuator or an aperture of the adjustable attenuator.

10. The adjustable attenuation optical unit set forth in claim 9 wherein the adjustable attenuator comprises liquid crystal (LC) glass.

11. The adjustable attenuation optical unit set forth in claim 9 wherein the adjustable attenuator comprises suspected particle device (SPD) glass, SPD smart glass, electrochromic glass, thermochromic glass or a photochromatic glass.

12. The adjustable attenuation optical unit set forth in claim 9 wherein the adjustable attenuator comprises a blocking portion and an adjustable aperture formed through the blocking portion.

13. The adjustable attenuation optical unit set forth in claim 9 further comprising a photomultiplier tube, wherein the adjustable attenuator is disposed between the output of the lightguide and an input of the photomultiplier tube.

Assignees

• Applied Materials Israel Ltd

Inventors

• Vinegrad Eitam Yitzchak
• Asulin Itay

Classifications

• G02B6/3538 Primary

  based on displacement or deformation of a liquid (controlling the intensity of light by displacement or deformation of a fluid in general G02B26/004; fluid-filled lens of variable focal length G02B3/14) · CPC title

• H01J37/244 Primary

  Detectors; Associated components or circuits therefor · CPC title

• H01J37/3045

  Object or beam position registration · CPC title

• H01J2237/28

  Scanning microscopes · CPC title

• G02B6/266 Primary

  the optical element being an attenuator · CPC title